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    • 8. 发明公开
    • METHOD OF BALANCING MULTILAYER SUBSTRATE STRESS AND MULTILAYER SUBSTRATE
    • 平衡多层基板应力和多层基板的方法
    • EP2270851A1
    • 2011-01-05
    • EP08733855.4
    • 2008-03-31
    • Princo Corp.
    • YANG, Chih-kuang
    • H01L23/12H05K1/02B32B9/00
    • H05K1/0271H05K1/0224H05K1/028H05K3/4611H05K3/4644H05K2201/0394H05K2201/09136H05K2201/0969H05K2201/09781
    • Disclosed is a method to decrease warpage of a multi-layer substrate, comprises a first metal layer and a second metal layer. First area of the first metal layer is larger than second area of the second metal layer. In the same layer of the second metal layer, a redundant metal layer can be set to make a redundant metal layer area plus the second area considerably equivalent to the first area. Alternatively, a redundant space can be set in the first metal layer to achieve the same result. When the multi-layer substrate comprises a first dielectric layer with an opening and a second dielectric layer, a redundant opening positioned corresponding to the opening can be set in the second dielectric layer. The present invention employs a method of balancing the multi-layer substrate stress, i.e. to homogenize the multi-layer structure composed of different metal layers and dielectric layers to decrease warpage thereof.
    • 公开了一种减少多层基板翘曲的方法,包括第一金属层和第二金属层。 第一金属层的第一面积大于第二金属层的第二面积。 在第二金属层的同一层中,可以设置冗余金属层以形成冗余金属层区域加上与第一区域相当的第二区域。 或者,可以在第一金属层中设置冗余空间以实现相同的结果。 当多层基板包括具有开口的第一电介质层和第二电介质层时,可以在第二电介质层中设置与开口对应的冗余开口。 本发明采用平衡多层衬底应力的方法,即均匀化由不同金属层和介电层组成的多层结构以减少其翘曲。