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    • 10. 发明公开
    • INSULATED GATE SEMICONDUCTOR DEVICE
    • EP4145534A1
    • 2023-03-08
    • EP21909946.2
    • 2021-10-26
    • Fuji Electric Co., Ltd.
    • NARITA, Syunki
    • H01L29/78H01L21/336H01L29/06H01L29/12H01L29/739
    • Provide is a trench-gate insulated gate semiconductor device capable of increasing a cell density while avoiding an increase in ON resistance. The insulated gate semiconductor device includes: a carrier transport layer (1, 3) of a first conductivity-type; an injection control region (4) of a second conductivity-type provided on a top surface of the carrier transport layer (1, 3); a carrier supply region (5) of the first conductivity-type provided at an upper part of the injection control region (4); a base contact region (7) of the second conductivity-type provided at an upper part of the injection control region (4); trenches (8a, 8b) penetrating the injection control region (4) to reach the carrier transport layer (1, 3); an insulated gate structure (9, 10a), (9, 10b) provided inside the respective trenches (8a, 8b); an upper buried region (6) of the second conductivity-type being in contact with a bottom surface of the injection control region (4); and a lower buried region of the second conductivity-type being in contact with a bottom surface of the upper buried region (6) and a bottom surface of the respective trenches (8a, 8b), wherein the lower buried region (2) is separated from each other via the carrier transport layer (1, 3) between the trenches (8a, 8b).