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    • 4. 发明公开
    • DIE BONDING APPARATUS COMPRISING THREE INERT GAS CONTAINERS
    • TER TER TER TER TER TER TER TER TER TER TER TER TER TER TER TER TER TER
    • EP3098837A3
    • 2017-02-08
    • EP16001177.1
    • 2016-05-24
    • ASM Technology Singapore Pte Ltd.
    • LAU, Siu WingHUNG, Kin YikAU, Yuk CheungLAI, Wing ChiuLEE, Man LeoGO, Sai Yuen
    • H01L21/67H01L21/603
    • H01L24/75H01L21/67742H01L24/81H01L2224/7501H01L2224/751H01L2224/75101H01L2224/75251H01L2224/75252H01L2224/75305H01L2224/7565H01L2224/75804H01L2224/75821H01L2224/75824H01L2224/75841H01L2224/759H01L2224/81011H01L2224/81022H01L2224/81024H01L2224/81075H01L2224/81093H01L2224/81203H01L2924/00012
    • A die bonding apparatus (10) comprises a first inert gas container (40) having a first inert gas concentration and a second inert gas container (50) having a second inert gas concentration enclosed within the first inert gas container (40). The second inert gas concentration is higher than the first inert gas concentration. The die bonding apparatus (10) further comprises a bond head (52) located in the second inert gas container (50) for receiving a die (24) for bonding and a third inert gas container (80) having an inert gas environment that is separate from the first and second inert gas containers (40, 50) and where a substrate (26) is locatable for die bonding. The bond head (52) is operative to move the die (24) between a first position within the second inert gas container (50) and a second position within the third inert gas container (80) to bond the die (24) onto the substrate (26) located in the third inert gas container (80). The third inert gas container (80) may comprise a portion of a bond stage (60) enclosed by the walls (62) on the sides, by a bond stage pedestal (66) on the bottom and by the first inert gas container (40) base plate (42) on the top. The bond stage (60) is movable for receiving the substrate (26) to be processed and below the first inert gas container (40). The bond stage walls (62) may comprise a plurality of inert gas outlets (64, 68, 69) for expelling inert gas towards the first inert gas container (40) to form an air curtain to restrict ambient air from entering the third inert gas container (80).
    • 芯片接合装置(10)包括具有第一惰性气体浓度的第一惰性气体容器(40)和封闭在第一惰性气体容器(40)内的第二惰性气体浓度的第二惰性气体容器(50)。 第二惰性气体浓度高于第一惰性气体浓度。 芯片接合装置(10)还包括位于第二惰性气体容器(50)中的用于接收用于接合的模具(24)的接合头(52)和具有惰性气体环境的第三惰性气体容器(80) 与第一和第二惰性气体容器(40,50)分离,并且其中基板(26)可定位用于管芯接合。 接合头(52)可操作以使模具(24)在第二惰性气体容器(50)内的第一位置和第三惰性气体容器(80)内的第二位置之间移动,以将模具(24)接合到 基板(26)位于第三惰性气体容器(80)中。 第三惰性气体容器(80)可以包括由侧壁上的壁(62)包围的结合台(60)的一部分,底部上的结合台基座(66)和第一惰性气体容器(40) )底板(42)。 接合台(60)可移动以接收待处理的基板(26)并在第一惰性气体容器(40)的下方。 结合阶段壁(62)可以包括多个惰性气体出口(64,68,69),用于朝向第一惰性气体容器(40)排出惰性气体,以形成空气幕,以限制环境空气进入第三惰性气体 容器(80)。