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    • 6. 发明公开
    • Pulsed microfocused ion beams
    • Gepulste mikrofokussierte Ionenstrahlen。
    • EP0304525A1
    • 1989-03-01
    • EP87307672.3
    • 1987-08-28
    • FISONS plc
    • Waugh, Allen Robert
    • H01J27/02H01J49/10H01J49/40
    • H01J49/061H01J27/02H01J49/40
    • An ion gun (42) for producing a pulsed microfocused beam of ions comprises an ion source (1) arranged to produce a continuous ion beam along a z-axis toward a collector (13) having an aperture (14) on the axis. A deflector (7) is arranged to maintain the beam substantially stationary and incident on the aperture for a pulse time, to deflect the beam away from the aperture to the collector and subsequently to return the beam to be incident at the aperture. A focussing lens (15) focusses the beam from the deflection point (at 7) to a final image point, and a condensing lens (2) focusses the beam at the deflection point. A mass filter (6) selects a single ion species, and a second deflector (10) deflects the beam orthogonally to the deflector (7) so that the returning path of the beam on the collector (13) does not cross the aperture (14). A stigmator (60,61) and a beam scanner (19) are also provided.
    • 用于产生脉冲的聚焦离子束的离子枪(42)包括离子源(1),该离子源(1)被布置成沿z轴朝向在轴上具有孔(14)的收集器(13)产生连续的离子束。 偏转器(7)被布置成保持光束基本静止并入射到孔上一段脉冲时间,以使光束远离光圈偏转到收集器,并且随后使光束返回到入射到光圈处。 聚焦透镜(15)将来自偏转点(在7处)的光束聚焦到最终图像点,并且聚光透镜(2)将光束聚焦在偏转点处。 质量过滤器(6)选择单个离子种类,而第二偏转器(10)将光束垂直偏转到偏转器(7),使得收集器(13)上的光束的返回路径不穿过光圈(14) )。 还提供了一个标示器(60,61)和一个光束扫描器(19)。