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1. 发明公开

EP2575158A4 PARTICLE SOURCE AND MANUFACTURING METHOD THEREFOR 有权
标题翻译：粒子源及其制造方法
公开(公告)号：EP2575158A4
公开(公告)日：2013-06-26
申请号：EP12798587
申请日：2012-06-13
申请人： 38TH RES INST CHINA ELECTRONICS TECHNOLOGY GROUP CORP
发明人： LIU HUARONG
IPC分类号： H01J9/02 , H01J1/304
CPC分类号： C23F4/02 , B82Y99/00 , H01J1/00 , H01J1/3044 , H01J9/025 , H01J27/26 , H01J37/04 , H01J37/06 , H01J37/073 , H01J37/08 , H01J2201/30415 , H01J2237/0807

2. 发明公开

EP2617049A1 CANON À ÉLECTRONS ÉMETTANT SOUS HAUTE TENSION, DESTINÉ NOTAMMENT À LA MICROSCOPIE ÉLECTRONIQUE 有权
标题翻译： ELEKTRONENPISOLENEMISSION UNTER HOHER SPANNUNG，IM BESONDERENFÜRELEKTRONENMIKROSKOPIE
公开(公告)号：EP2617049A1
公开(公告)日：2013-07-24
申请号：EP11773106.7
申请日：2011-09-16
申请人： Centre National de la Recherche Scientifique CNRS
发明人： MONTHIOUX, Marc , HOUDELLIER, Florent
IPC分类号： H01J37/073 , H01J37/28 , H01J1/304
CPC分类号： H01J29/485 , B82Y20/00 , H01J1/3044 , H01J3/022 , H01J9/025 , H01J37/073 , H01J37/28 , H01J2201/30411 , H01J2201/30415 , H01J2201/30426 , H01J2201/30434 , H01J2201/30469 , H01J2237/06316 , H01J2237/06341 , H01J2237/26
摘要： The invention relates to a field-emission electron gun comprising an electron emission tip, an extractor anode, as well as a means for creating an electric-potential difference between the emission tip and the extractor anode. The emission tip comprises a metal tip and an end cone produced by chemical vapour deposition on a nanofilament, the cone being aligned and welded onto the metal tip. The invention can be used for a transmission electron microscope.
摘要翻译：包括电子发射尖端，提取器阳极和在发射尖端和提取器阳极之间产生电位差的机构的场致发射电子枪。发射尖端包括通过化学气相沉积在纳米丝上产生的金属尖端和端锥，锥体对准并焊接到金属尖端上。电子枪可用于透射电子显微镜。

3. 发明公开

EP2242084A4 MANUFACTURING METHOD OF ELECTRON SOURCE 有权转让
标题翻译：电子源过程
公开(公告)号：EP2242084A4
公开(公告)日：2011-03-23
申请号：EP08722768
申请日：2008-03-25
申请人： DENKI KAGAKU KOGYO KK
发明人： NAKAHARA FUMIHIRO , NONOGAKI RYOZO , TERUI YOSHINORI
IPC分类号： H01J1/16 , H01J1/304 , H01J9/02 , H01J9/04 , H01J37/073
CPC分类号： H01J9/025 , H01J1/16 , H01J1/3044 , H01J9/042 , H01J37/073 , H01J37/3056 , H01J2201/30415 , H01J2237/06316 , H01J2237/06341 , H01J2237/3174 , H01J2237/31749

4. 发明公开

EP2144274A1 Method of preparing an ultra sharp tip, apparatus for preparing an ultra sharp tip, and use of an apparatus 有权
标题翻译：一种用于生产设备用于此目的的非常尖锐的尖端和使用方法
公开(公告)号：EP2144274A1
公开(公告)日：2010-01-13
申请号：EP08159924.3
申请日：2008-07-08
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Winkler, Dieter , Weigel, Udo , Grimm, Stefan
IPC分类号： H01J37/073 , H01J37/08 , H01J1/304 , H01J9/02 , H01J27/26
CPC分类号： C25D5/48 , B81C1/00111 , B82Y15/00 , C25D7/00 , H01J1/3044 , H01J9/025 , H01J27/26 , H01J37/073 , H01J37/08 , H01J2201/30411 , H01J2201/30415 , H01J2209/0226 , H01J2237/06341 , H01J2237/0807
摘要： A method of preparing an ultra sharp tip, in particular a single atom tip, is provided, comprising providing a tip (11) having a shank (15), an apex (16), and a coating (14,17,18) covering the shank and the apex; locally removing the coating (14) from the apex (16) by field evaporation; and partially or fully restoring the coating at the apex (16).
摘要翻译：在超锋利尖端制备的方法，特别是单原子尖端，提供方法，包括提供一个尖端（11）具有杆部（15）到顶点（16）和涂层（14,17,18），其覆盖柄和顶点; 局部地去除从顶点（16）由场蒸发所述涂层（14）; 和在顶点（16）部分或完全恢复涂层。

5. 发明授权

EP2575158B1 Method for manufacturing a particle source 有权
标题翻译：一种用于制造粒子的方法
公开(公告)号：EP2575158B1
公开(公告)日：2015-04-22
申请号：EP12798587.7
申请日：2012-06-13
申请人： 38th Research Institute, China Electronics Technology Group Corporation
发明人： LIU, Huarong
IPC分类号： H01J9/02 , H01J1/304 , H01J37/04 , H01J37/06 , H01J37/08
CPC分类号： C23F4/02 , B82Y99/00 , H01J1/00 , H01J1/3044 , H01J9/025 , H01J27/26 , H01J37/04 , H01J37/06 , H01J37/073 , H01J37/08 , H01J2201/30415 , H01J2237/0807

6. 发明公开

EP2242084A1 MANUFACTURING METHOD OF ELECTRON SOURCE 有权转让
标题翻译： HERSTELLUNGSVERFAHREN EINER ELEKTRONENQUELLE
公开(公告)号：EP2242084A1
公开(公告)日：2010-10-20
申请号：EP08722768.2
申请日：2008-03-25
申请人： Denki Kagaku Kogyo Kabushiki Kaisha
发明人： NAKAHARA, Fumihiro , NONOGAKI, Ryozo , TERUI, Yoshinori
IPC分类号： H01J9/02 , H01J37/073
CPC分类号： H01J9/025 , H01J1/16 , H01J1/3044 , H01J9/042 , H01J37/073 , H01J37/3056 , H01J2201/30415 , H01J2237/06316 , H01J2237/06341 , H01J2237/3174 , H01J2237/31749
摘要： An electron gun with a truncated-cone-shaped cathode with uniform emission current density is efficiently manufactured. A manufacturing method of a cathode electron gun equipped with a supply source for diffusing oxide of a metal element on a single crystal needle of tungsten or molybdenum includes steps of forming a truncated-cone-shape having a flat plane at a single crystal edge serving as the cathode by machining beforehand, thereafter thinning and removing a front layer of the flat plane by a focused gallium ion beam, and re-flattening it.
摘要翻译：具有均匀发射电流密度的具有截头圆锥形阴极的电子枪被有效地制造。配备有用于在钨或钼的单晶针上扩散金属元素的氧化物的供给源的阴极电子枪的制造方法包括在单晶边缘处形成具有平面的截头圆锥形的步骤，阴极，然后通过聚焦的镓离子束稀释并去除平面的前层，并使其平坦化。

8. 发明授权

EP2242084B1 METHOD OF MANUFACTURING AN ELECTRON SOURCE 有权转让
标题翻译：方法电子源
公开(公告)号：EP2242084B1
公开(公告)日：2015-10-07
申请号：EP08722768.2
申请日：2008-03-25
申请人： Denki Kagaku Kogyo Kabushiki Kaisha
发明人： NAKAHARA, Fumihiro , NONOGAKI, Ryozo , TERUI, Yoshinori
IPC分类号： H01J1/16 , H01J1/304 , H01J9/02 , H01J9/04 , H01J37/073
CPC分类号： H01J9/025 , H01J1/16 , H01J1/3044 , H01J9/042 , H01J37/073 , H01J37/3056 , H01J2201/30415 , H01J2237/06316 , H01J2237/06341 , H01J2237/3174 , H01J2237/31749

9. 发明公开

EP2575158A1 PARTICLE SOURCE AND MANUFACTURING METHOD THEREFOR 有权
标题翻译： Verfahren zum Herstellen einer Teilchenquelle
公开(公告)号：EP2575158A1
公开(公告)日：2013-04-03
申请号：EP12798587.7
申请日：2012-06-13
申请人： 38th Research Institute, China Electronics Technology Group Corporation
发明人： LIU, Huarong
IPC分类号： H01J37/04
CPC分类号： C23F4/02 , B82Y99/00 , H01J1/00 , H01J1/3044 , H01J9/025 , H01J27/26 , H01J37/04 , H01J37/06 , H01J37/073 , H01J37/08 , H01J2201/30415 , H01J2237/0807
摘要： The present disclosure provides a method for manufacturing a particle source, comprising: placing a metal wire in vacuum, introducing active gas and catalyst gas, adjusting a temperature of the metal wire, and applying a positive high voltage V to the metal wire to dissociate the active gas at the surface of the metal wire, in order to generate at a peripheral surface of the head of the metal wire an etching zone in which field induced chemical etching (FICE) is performed; increasing by the FICE a surface electric field at the apex of the metal wire head to be greater than the evaporation field of the material for the metal wire, so that metal atoms at the wire apex are evaporated off; after the field evaporation is activated by the FICE, causing mutual adjustment between the FICE and the field evaporation, until the head of the metal wire has a shape of combination of a base and a tip on the base, wherein the FICE occurs at the lateral side of the metal wire head to form the base, and the field evaporation occurs at the apex of the metal wire head to form the tip; and stopping the FICE and the field evaporation when the head of the metal wire takes a predetermine shape.
摘要翻译：本公开内容提供了一种制造颗粒源的方法，包括：将金属线放置在真空中，引入活性气体和催化剂气体，调节金属丝的温度，以及向金属丝施加正高电压V以使在金属线的表面处的活性气体，以在金属线的头部的外周表面处产生进行场诱导化学蚀刻（FICE）的蚀刻区域; 通过FICE增加金属丝头顶点处的表面电场，使其大于金属线材料的蒸发场，使金属丝顶端的金属原子蒸发掉; 在通过FICE激活场蒸发之后，引起FICE和场蒸发之间的相互调节，直到金属丝的头部具有基部和底部的尖端的组合的形状，其中FICE出现在侧面金属丝头的一侧形成基部，并且在金属丝头的顶点处发生场蒸发以形成尖端; 并且当金属丝的头部具有预定的形状时，停止FICE和场蒸发。

10. 发明授权

EP2144274B1 Method of preparing an ultra sharp tip and use of an apparatus therefor 有权
标题翻译：一种用于生产设备用于此目的的非常尖锐的尖端和使用方法
公开(公告)号：EP2144274B1
公开(公告)日：2012-09-12
申请号：EP08159924.3
申请日：2008-07-08
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Winkler, Dieter , Weigel, Udo , Grimm, Stefan
IPC分类号： H01J37/073 , H01J37/08 , H01J1/304 , H01J9/02 , H01J27/26 , C25D5/48 , C25D7/00 , G01Q70/16 , B81C1/00 , B82Y15/00
CPC分类号： C25D5/48 , B81C1/00111 , B82Y15/00 , C25D7/00 , H01J1/3044 , H01J9/025 , H01J27/26 , H01J37/073 , H01J37/08 , H01J2201/30411 , H01J2201/30415 , H01J2209/0226 , H01J2237/06341 , H01J2237/0807

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