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1. 发明授权

EP3054275B1 SENSOR MODULE AND METHOD FOR PRODUCING SENSOR MODULE 有权
公开(公告)号：EP3054275B1
公开(公告)日：2018-10-24
申请号：EP16151172.0
申请日：2016-01-14
申请人： Nagano Keiki Co., Ltd.
发明人： MIYASHITA, Kaori , TAKEDA, Eiji , NAGAI, Yuuji , MATSUMURA, Shinya
IPC分类号： G01L9/00
CPC分类号： G01L9/0058 , G01L9/0044 , G01L9/0055 , G01L9/006
摘要： A detector is provided by coating a fluid conductive material on a flat portion of a diaphragm. The detector includes: a resistor element (3); resistor element electrodes (4), which are overlapped and connected with mutually opposed parts of the resistor element (3); and a linear conductor connected with the resistor element electrodes (4). The resistor element electrodes (4) each include: a linear portion (40S) having a linear inner side facing an inner side of paired one of the resistor element electrodes (4); and peripheral portions (40E) defined at both ends of the linear portion (40S), at least one of the peripheral portions (40E) being connected with the linear conductor. All of the linear portions (40S) are arranged so that inner sides (40L) are arranged mutually in parallel. The resistor element (3) is connected with the linear portion (40S). The peripheral portions (40E) are exposed without being connected with the resistor element (3).

2. 发明公开

EP3062079A1 MICROFUSED SILICON STRAIN GAUGE (MSG) PRESSURE SENSOR PACKAGE 审中-公开
标题翻译：微晶硅应变计（MSG）-DRUCKMESSGERÄT
公开(公告)号：EP3062079A1
公开(公告)日：2016-08-31
申请号：EP16156390.3
申请日：2016-02-18
申请人： Sensata Technologies, Inc.
发明人： SCHOOT UITERKAMP, Ernie Johannus Antonius , WIERSMA, Dedde Hedzer , JACOBS, Frank Hendri
IPC分类号： G01L19/14 , G01L19/00
CPC分类号： G01L9/0051 , G01L9/006 , G01L19/0038 , G01L19/14 , G01L19/145
摘要： Methods and apparatus for a microfused silicon strain gauge pressure sensor. A pressure sensor package includes a sense element configured to be exposed to a pressure environment, the sense element including at least one strain gauge, an electronics package disposed on a carrier and electrically coupled to the sense element, the carrier disposed on a port that includes the sense element, the port enabling a decoupling feature for sealing and parasitic sealing forces and a reduction of a port length, a housing disposed about the sense element and electronics package, and a connector joined to the housing and electrically connected to the electronics package, the connector including an external interface.
摘要翻译：微型硅应变计压力传感器的方法和装置。压力传感器组件包括被配置为暴露于压力环境的感测元件，感测元件包括至少一个应变计，设置在载体上并电耦合到感测元件的电子组件，载体设置在包括所述感测元件，所述端口实现用于密封和寄生密封力的去耦特征以及端口长度的减小，围绕所述感测元件和电子封装设置的壳体，以及连接到所述壳体并电连接到所述电子封装的连接器，连接器包括外部接口。

3. 发明公开

EP2663847A1 VORRICHTUNG ZUM WANDELN EINER KRAFT ODER EINES DRUCKS IN EIN ELEKTRISCHES SIGNAL UND VERFAHREN ZUR HERSTELLUNG EINER SOLCHEN VORRICHTUNG 有权
标题翻译：装置用于转换以电信号和方法，力或压力制造这种装置
公开(公告)号：EP2663847A1
公开(公告)日：2013-11-20
申请号：EP12700309.3
申请日：2012-01-11
申请人： Hydac Electronic GmbH
发明人： BRODE, Wolfgang, Kurt , KEINER, André
IPC分类号： G01L1/22 , G01L9/00
CPC分类号： G01L1/18 , G01L1/2231 , G01L9/006 , Y10T29/49002
摘要： The invention relates to a device (1) for converting a force or a pressure into an electrical signal, the device (1) having a first deformation element (10), in particular a first membrane (12), by means of which the force or the pressure can be applied to the device (1), and a second deformation element (20), in particular a second membrane (22), by means of the deflection of which the force or the pressure can be converted into an electrical signal, wherein the first deformation element (10) has a first force transmitting means (14) and the second deformation element (20) has a second force transmitting means (24) for transmitting the force from the first deformation element (10) to the second deformation element (20). The device is characterized in that the first force transmitting means (14) is rigidly connected at the end thereof distant from the first deformation element (10) to the end of the second force transmitting means (24) distant from the second deformation element (20), and in that both compressive forces and tensile force can be transmitted from the first deformation element (10) to the second deformation element (20) by means of the first and second force transmitting means (14, 24). The invention further relates to a method for producing such a device.

4. 发明公开

EP2541222A1 Dispositif de mesure de pression a sensibilite optimisee 有权
标题翻译： Druckmessgerätmit optimierter Emfpindlichkeit
公开(公告)号：EP2541222A1
公开(公告)日：2013-01-02
申请号：EP12174451.0
申请日：2012-06-29
申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
发明人： Robert, Philippe , Jourdan, Guillaume
IPC分类号： G01L9/00
CPC分类号： G01L9/0052 , B81B2203/0127 , B81B2203/0154 , B81B2203/0307 , B81B2203/053 , G01L9/001 , G01L9/0019 , G01L9/006 , G01L9/0073
摘要： Dispositif de mesure de pression MEMS ou NEMS comportant une membrane (4) déformable suspendue sur un substrat (2), une des faces de la membrane étant destinée à être soumise à la pression à mesurer, des moyens de détection à jauges de contraintes (6) de la déformation de la membrane (4), lesdits moyens de détection (6) étant formés sur le substrat (2) et un bras (14) indéformable, transmettant la déformation de manière amplifiée de la membrane (4) au moyens de détection (6), le bras (14) étant articulé en rotation sur le substrat (2) autour d'un axe (Y) sensiblement parallèle au plan de la membrane (4) et solidaire de la membrane de sorte qu'il transmet aux moyens de détection (6) de manière amplifiée la déformation de la membrane (4).
摘要翻译：该装置具有将盘形可变形膜（4）的变形传递到可变电容式检测器（6）的不可变形的传动臂（14）。臂相对于平行于膜的平面的轴线（Y）可旋转地铰接到绝缘体上硅（SOI）基板（2）上，并且面对与经受压力（P）的面相对的膜的面，使得臂和膜在给定压力之外可彼此一体地移动，并且臂以放大的方式将变形或应力从膜的变形传递到检测器。还包括用于微机电系统（MEMS）和/或纳米机电系统（NEMS）组件的独立权利要求。

5. 发明公开

EP1754963A1 PRESSURE SENSOR MODULE AND PRESSURE DETECTING DEVICE 有权转让
标题翻译： DRUCKSENSORMODUL UND DRUCKERKENNUNGSEINRICHTUNG
公开(公告)号：EP1754963A1
公开(公告)日：2007-02-21
申请号：EP05745740.0
申请日：2005-06-01
申请人： Nagano Keiki Co., Ltd.
发明人： NAGASAWA, Kenji; c/o NAGANO KEIKI CO., LTD., , SAKAMOTO, Ayumu; c/o NAGANO KEIKI CO., LTD., , SHIMADA, Takahiro; c/o NAGANO KEIKI CO., LTD.,
IPC分类号： G01L19/06
CPC分类号： G01L9/0073 , G01L9/0044 , G01L9/006 , G01L19/0645 , G01L19/147
摘要： A pressure sensor module 2, wherein a holding space 34 is formed between a diaphragm 22 and a thin film layer 31, and a vent hole 321 communicating with the exterior of a first case is provided in the holding space 34. In the above pressure sensor module, even when a corrosive gas or chemical solution is used as a fluid to be measured and a corrosive gas component originated from the fluid to be measured permeates into the holding space 34, the permeated corrosive gas component can be discharged to the outside of the case through the vent hole 321. As a result, the corrosion of the diaphragm 22 by the fluid to be measured can be prevented, which results in the achievement of a prolonged service life of the pressure sensor module 2.
摘要翻译：压力传感器模块2，其中在隔膜22和薄膜层31之间形成有保持空间34，并且在保持空间34中设置有与第一壳体的外部连通的通气孔321。在上述压力传感器模块，即使使用腐蚀性气体或化学溶液作为待测量的流体，并且来自待测量流体的腐蚀性气体成分渗透到保持空间34中，则透过的腐蚀性气体成分可以排出到壳体通过通气孔321.结果，可以防止被测量流体对隔膜22的腐蚀，这导致压力传感器模块2的使用寿命延长。

6. 发明公开

EP0077184A1 Force transducers 有权
标题翻译： Kraftwandler。
公开(公告)号：EP0077184A1
公开(公告)日：1983-04-20
申请号：EP82305343.4
申请日：1982-10-07
申请人： THE BABCOCK & WILCOX COMPANY
发明人： White, Jack M.
IPC分类号： G01L1/22
CPC分类号： G01L9/006
摘要： In a force transducer for producing an output signal proportional to the magnitude of an input force (F), an equal and opposite force is produced by a flexure assembly (4) comprising a compound leaf-spring flexure (6) having opposed outer sections, anchored in and cantilevered from a fixed base (8) and a movable base (10), respectively, which gradually decrease in cross-sectional area to a thin middle section (26), and the movable base (10) is constrained to linear displacement from a null or neutral position by having the force applied along a line normal to and passing through the centre of the thin middle section (26) and transmitted to the movable base (10) through a rigid connection.
摘要翻译：在用于产生与输入力（F）的大小成比例的输出信号的力传感器中，由包括具有相对的外部部分的复合板簧弹簧（6）的挠曲组件（4）产生相等和相反的力，分别从固定基座（8）和可移动基座（10）悬臂固定，所述可移动基座（10）的横截面积逐渐减小到薄的中间部分（26），并且所述可移动基座（10）被限制为线性位移通过沿着垂直于并穿过薄中间部分（26）的中心的线施加力并通过刚性连接传递到可移动基座（10）的空隙或中立位置。

7. 发明公开

EP3054275A2 SENSOR MODULE AND METHOD FOR PRODUCING SENOR MODULE 有权
公开(公告)号：EP3054275A2
公开(公告)日：2016-08-10
申请号：EP16151172.0
申请日：2016-01-14
申请人： Nagano Keiki Co., Ltd.
发明人： MIYASHITA, Kaori , TAKEDA, Eiji , NAGAI, Yuuji , MATSUMURA, Shinya
IPC分类号： G01L9/00
CPC分类号： G01L9/0058 , G01L9/0044 , G01L9/0055 , G01L9/006
摘要： A detector is provided by coating a fluid conductive material on a flat portion of a diaphragm. The detector includes: a resistor element (3); resistor element electrodes (4), which are overlapped and connected with mutually opposed parts of the resistor element (3); and a linear conductor connected with the resistor element electrodes (4). The resistor element electrodes (4) each include: a linear portion (40S) having a linear inner side facing an inner side of paired one of the resistor element electrodes (4); and peripheral portions (40E) defined at both ends of the linear portion (40S), at least one of the peripheral portions (40E) being connected with the linear conductor. All of the linear portions (40S) are arranged so that inner sides (40L) are arranged mutually in parallel. The resistor element (3) is connected with the linear portion (40S). The peripheral portions (40E) are exposed without being connected with the resistor element (3).

8. 发明公开

EP2921836A1 Capteur de mesure de pression différentielle microélectromécanique et/ou nanoélectromécanique 审中-公开
标题翻译：传感器，用于测量所述微机电和/或纳机电差压
公开(公告)号：EP2921836A1
公开(公告)日：2015-09-23
申请号：EP15159675.6
申请日：2015-03-18
申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
发明人： Robert, Philippe , Diem, Bernard , Jourdan, Guillaume
IPC分类号： G01L9/00 , G01L13/02
CPC分类号： G01L9/0072 , B81B3/0021 , B81B2201/0264 , B81B2203/0127 , B81B2203/0154 , G01L9/001 , G01L9/0019 , G01L9/0052 , G01L9/006 , G01L9/0073 , G01L9/0086 , G01L13/025
摘要： Capteur de mesure de pression différentielle MEMS et/ou NEMS comportant au moins une première membrane (4) et au moins une deuxième membrane (6), chacune (4, 6) suspendue à un substrat (2), la première membrane (4) ayant une face (4.1) soumise à une pression de référence et une deuxième face (4.2) soumise à une première pression à détecter, la deuxième membrane (6) ayant une première face (6.1) soumise à la pression de référence et une deuxième face (6.2) soumise à une deuxième pression à détecter, une poutre rigide (8) d'axe longitudinal (X) articulée par rapport au substrat par une liaison pivot autour d'un axe (Y), ladite poutre (8) étant solidarisée par une première zone à la première membrane (4) et par une deuxième zone à la deuxième membrane (6) de sorte que la liaison pivot se situe entre la première zone et la deuxième zone de la poutre (8), des moyens de mesure du déplacement de la poutre (8) autour de l'axe (Y), lesdits moyens de mesure étant disposés au moins en partie sur le substrat.

9. 发明公开

EP2823273A1 PROCEDE DE FABRICATION D'UN CAPTEUR DE PRESSION ET CAPTEUR CORRESPONDANT 有权转让
标题翻译： ZERGEHRIGER传感器VERFAHREN ZUR HERSTELLUNG EINES DRUCKSENSORS
公开(公告)号：EP2823273A1
公开(公告)日：2015-01-14
申请号：EP13707416.7
申请日：2013-03-06
申请人： Auxitrol SA , Centre National de La Recherche Scientifique Laboratoire d'Analyse et d'Architecture Des Systemes
发明人： BRIDA, Sébastiano , LE NEAL, Jean-François
IPC分类号： G01L9/00 , G01L9/04 , G01L9/06 , G01L19/00 , B81C1/00
CPC分类号： B81B3/0021 , B32B38/08 , B81B7/0006 , B81B7/02 , B81B2201/0264 , B81B2203/0127 , B81B2207/07 , B81B2207/095 , B81B2207/096 , B81C1/00182 , B81C1/00341 , G01L7/08 , G01L9/0045 , G01L9/0048 , G01L9/0052 , G01L9/0054 , G01L9/0055 , G01L9/006 , G01L9/008 , G01L9/04 , G01L9/06 , G01L19/0061 , G01L19/0069 , G01L19/0076 , G01L19/147 , G01L19/148 , H01L2224/45169 , Y10T29/49888 , Y10T156/10
摘要： The invention relates to a method for producing a pressure sensor, comprising the following steps: assembling a support substrate with a deformable membrane on which strain gauges have been deposited, wherein the deformable membrane comprises a thinned area at the centre thereof, the support substrate is disposed on top of the deformable membrane, the support substrate comprises an upper surface and a lower surface in contact with the deformable membrane, and the support substrate also comprises lateral recesses arranged on top of the strain gauges and a central recess arranged on top of the thinned area of the membrane, so as to obtain a micromechanical structure; and, once the assembly has been obtained, depositing, in a single step, at least one conductive material on the upper surface of the support and in the lateral recesses of the support, said conductive material extending into the recesses in order to be in contact with the strain gauges so as to form electrical contacts in contact with the strain gauges.
摘要翻译：本发明涉及一种生产压力传感器的方法，包括以下步骤：将支撑基板与其上沉积有应变仪的可变形膜组装，其中可变形膜在其中心处包括变薄区域，支撑基板为所述支撑基板设置在所述可变形膜的顶部上，所述支撑基板包括与所述可变形膜接触的上表面和下表面，并且所述支撑基板还包括布置在所述应变计顶部的侧向凹部和布置在所述可变形膜的顶部上的中央凹部薄膜的薄区，以获得微机械结构; 并且一旦已经获得组件，在单个步骤中，在支撑件的上表面上和在支撑件的侧向凹槽中沉积至少一种导电材料，所述导电材料延伸到凹部中以便接触与应变计一起形成与应变计接触的电触点。

10. 发明授权

EP1931184B1 Leiterplatte 失效转让
公开(公告)号：EP1931184B1
公开(公告)日：2010-11-24
申请号：EP07023655.9
申请日：2007-12-06
申请人： Würth Elektronik Pforzheim GmbH & Co. KG
发明人： Dietrich, Frank
IPC分类号： H05K1/14
CPC分类号： H05K1/167 , G01K5/72 , G01L1/044 , G01L3/108 , G01L9/006 , H05K1/0268 , H05K2201/09081 , H05K2203/302

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