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    • 1. 发明公开
    • PRESSURE SENSOR
    • 压力传感器
    • EP3267169A1
    • 2018-01-10
    • EP17180256.4
    • 2017-07-07
    • Azbil Corporation
    • SETO, YukiISHIKURA, YoshiyukiOGASAWARA, Rina
    • G01L9/00
    • G01L9/0055G01L9/0051G01L9/0052G01L13/025G01L19/147
    • To suppress variations in the shift amount of the zero point of a sensor output when a pipe is connected to a pressure sensor via a clamp.
      A pressure sensor 100 according to the invention includes a diaphragm 3 having a first principal surface and a second principal surface, a semiconductor chip 1 in which resistors R1 to R4 constituting a strain gauge are formed, a first structural body 2a having one end coupled to a center 30 of a second principal surface of the diaphragm and the other end coupled to the other surface of the semiconductor chip, and at least two second structural bodies 2b to 2e disposed in two straight lines 21 and 22, orthogonal to each other, that pass through the center 30 of the diaphragm 3 in plan view so as to be disposed separately from the first structural body, and having one ends coupled to the second principal surface and the other ends coupled to the other surface of the semiconductor chip, in which the resistors R1 to R4 are formed in regions between the first structural body and the second structural bodies in plan view in the semiconductor chip.
    • 当通过夹具将管道连接到压力传感器时,抑制传感器输出零点偏移量的变化。 根据本发明的压力传感器100包括:具有第一主表面和第二主表面的膜片3;形成有构成应变仪的电阻器R1到R4的半导体芯片1;第一结构体2a,其一端耦合到 隔膜的第二主面的中心30,另一端与半导体芯片的另一面连接,并且至少两个第二结构体2b至2e以彼此正交的两条直线21和22布置, 在平面图中穿过隔膜3的中心30以便与第一结构体分开设置,并且一端连接到第二主表面而另一端连接到半导体芯片的另一表面,其中 在半导体芯片中,在平面图中,电阻器R1至R4形成在第一结构体和第二结构体之间的区域中。
    • 3. 发明公开
    • DRUCKWANDLER UND VERFAHREN ZUM BETREIBEN EINES SOLCHEN
    • EP3237866A1
    • 2017-11-01
    • EP15795190.6
    • 2015-11-18
    • Endress+Hauser GmbH+Co. KG
    • THAM, Anh Tuan
    • G01L9/00
    • G01L9/0072G01L9/0051
    • Pressure transducer for determining a pressure variable, comprising at least a pressure sensor with a measuring membrane and resistance elements integrated in the measuring membrane, wherein the pressure sensor is arranged between a first and a second mating body, such that a pressure chamber forms between the measuring membrane and the first mating body, which pressure chamber can be subjected to a first pressure, wherein the side of the measuring membrane facing towards the second mating body can be subjected to a second pressure and an excursion of the measuring membrane is adapted depending on the first and second pressure, wherein the pressure-dependent excursion of the measuring membrane can be detected by the resistance elements and, via a bridge voltage of a bridge circuit formed with the resistance elements, a pressure variable can be determined, wherein the measuring membrane has a membrane electrode and the second mating body has at least one mating body electrode on the side facing towards the measuring membrane, such that the membrane electrode and the mating body electrode form a capacitance, where at least one additional piece of information can be determined and/or at least one additional function of the pressure transducer can be performed on the basis of the capacitance.
    • 用于确定压力变量的压力传感器,其至少包括具有测量膜和集成在测量膜中的电阻元件的压力传感器,其中压力传感器布置在第一和第二配合体之间,使得压力室形成在 测量膜片和第一配合体,该压力室可以承受第一压力,其中测量膜片的朝向第二配合体的一侧可以经受第二压力,并且测量膜片的偏移取决于 第一和第二压力,其中测量膜的与压力相关的偏移可以由电阻元件检测,并且通过由电阻元件形成的电桥电路的电桥电压可以确定压力变量,其中测量膜 具有膜电极,并且第二配合体在该sid上具有至少一个配合体电极 e朝向所述测量膜,使得所述膜电极和所述配合体电极形成电容,其中可以确定至少一个附加信息片段和/或可以在所述基础上执行所述压力换能器的至少一个附加功能 的电容。
    • 4. 发明公开
    • METHOD OF MANUFACTURING A PRESSURE SENSOR
    • 制造压力传感器的方法
    • EP3236226A1
    • 2017-10-25
    • EP16166285.3
    • 2016-04-20
    • Sensata Technologies, Inc.
    • ZWIJZE, Albert FerdinandKLEISSEN, Werner John PeterJACOBS, Frank HendriWIERSMA, Dedde Hedzer
    • G01L9/00G01L1/22G01L9/04
    • G01L9/04G01L1/22G01L9/0051G01L9/0055
    • Disclosed is method of manufacturing a pressure sensor for measuring a fluid pressure in a device. The pressure sensor comprises a port element with a sealing structure and a membrane. Four strain gages will be attached to the membrane. The gages are used in a Wheatstone bridge to sense the fluid pressure. A first finite element action determines a first contour (C1) around the membrane central axis with equal compressive strain and a second contour (C2) around the membrane central axis with equal tensile strain wherein when fluid pressure is applied to the membrane strain on the first contour is opposite strain on the second contour. A second finite element action determines the four positions of the strain gages on the first and second contour such that the difference between the highest error signal and the lowest error signal at the output of the Wheatstone bridge is minimal under influence of parasitic forces acting on the pressure sensor.
    • 公开了一种制造用于测量装置中的流体压力的压力传感器的方法。 压力传感器包括具有密封结构和膜的端口元件。 四个应变计将连接到膜上。 这些量具用于惠斯通电桥以检测流体压力。 第一有限元动作确定具有相同压缩应变的膜中心轴周围的第一轮廓(C1)和具有相同拉伸应变的膜中心轴周围的第二轮廓(C2),其中当流体压力施加到第一膜上的膜应变时 轮廓在第二轮廓上相反。 第二有限元动作确定第一和第二轮廓上的应变计的四个位置,使得惠斯通电桥输出处的最高误差信号和最低误差信号之间的差异在作用于第一和第二轮廓上的寄生力的影响下最小 压力传感器。
    • 6. 发明公开
    • GLOW PLUG WITH COMBUSTION PRESSURE SENSOR
    • 发光插头与燃烧压力传感器
    • EP3045817A1
    • 2016-07-20
    • EP15202522.7
    • 2015-05-13
    • NGK Spark Plug Co., Ltd.
    • SASSA, AkimitsuYAMAMOTO, YoshihiroHARADA, Hiroshi
    • F23Q7/00
    • H05B3/0042F23Q7/001F23Q2007/002G01L9/0051H05B3/0014
    • [Objective] To provide a glow plug with a combustion pressure sensor which senses combustion pressure on the basis of an axial movement of a ceramic heater and in which deterioration in the combustion pressure sensing performance is prevented as a result of prevention of impairment in easiness of deformation of a displacement member and easiness of displacement of the heater, which could otherwise result from adhesion and accumulation of soot on the displacement member, etc., the displacement member axially blocking a space between the inner circumferential surface of a forward end portion of the housing and the outer circumferential surface of the ceramic heater.
      [Means for Solution] A heater 200 has a rear heat-generating element 260 formed of a resistance heat-generating element, adapted to generate heat through application of electricity, and provided in an axial region thereof between a forward end 136 of a housing and a rear end 315 of a displacement member 300 located rearward of the forward end 136, separately from a forward heat-generating element 205 provided at a forward end portion of the heater for accelerating ignition. Since the rear heat-generating element 260 removes the above-mentioned soot through burning, impairment in easiness of deformation of the displacement member 300 and easiness of displacement of the heater can be prevented accordingly, thereby preventing deterioration in sensing accuracy.
    • [目的]提供一种具有燃烧压力传感器的电热塞,该燃烧压力传感器基于陶瓷加热器的轴向移动来检测燃烧压力,并且其中防止了燃烧压力传感性能的劣化 位移构件的变形和加热器的容易移位,否则可能由于烟灰在位移构件上的粘附和积聚等而导致位移构件轴向地阻塞位于构件的前端部分的内周表面之间的空间 外壳和陶瓷加热器的外圆周表面。 [用于解决方案的手段]加热器200具有由电阻发热元件形成的后发热元件260,后发热元件260适于通过通电产生热量,并且在其轴向区域中设置在壳体的前端136和 位于前端136后方的位移部件300的后端315与设置在加热器的前端部处的用于加速点火的前端发热元件205分开。 由于后发热元件260通过燃烧去除上述烟灰,因此可以相应地防止位移构件300容易损坏变形容易和加热器容易移位,从而防止感测精度的恶化。
    • 7. 发明公开
    • GLOW PLUG WITH COMBUSTION PRESSURE SENSOR
    • 与燃烧压力传感器火花塞
    • EP2944878A3
    • 2016-03-09
    • EP15167460.3
    • 2015-05-13
    • NGK Spark Plug Co., Ltd.
    • Sassa, AkimitsuYamamoto, YoshihiroHarada, Hiroshi
    • F23Q7/00
    • H05B3/0042F23Q7/001F23Q2007/002G01L9/0051H05B3/0014
    • [Objective] To provide a glow plug with a combustion pressure sensor which senses combustion pressure on the basis of an axial movement of a ceramic heater and in which deterioration in the combustion pressure sensing performance is prevented as a result of prevention of impairment in easiness of deformation of a displacement member and easiness of displacement of the heater, which could otherwise result from adhesion and accumulation of soot on the displacement member, etc., the displacement member axially blocking a space between the inner circumferential surface of a forward end portion of the housing and the outer circumferential surface of the ceramic heater.
      [Means for Solution] A heater 200 has a rear heat-generating element 260 formed of a resistance heat-generating element, adapted to generate heat through application of electricity, and provided in an axial region thereof between a forward end 136 of a housing and a rear end 315 of a displacement member 300 located rearward of the forward end 136, separately from a forward heat-generating element 205 provided at a forward end portion of the heater for accelerating ignition. Since the rear heat-generating element 260 removes the above-mentioned soot through burning, impairment in easiness of deformation of the displacement member 300 and easiness of displacement of the heater can be prevented accordingly, thereby preventing deterioration in sensing accuracy.