发明公开
EP2921836A1 Capteur de mesure de pression différentielle microélectromécanique et/ou nanoélectromécanique
审中-公开
基本信息:
- 专利标题： Capteur de mesure de pression différentielle microélectromécanique et/ou nanoélectromécanique
- 专利标题（英）：Sensor for measuring microelectromechanical and/or nanoelectromechanical differential pressure
- 专利标题（中）：传感器，用于测量所述微机电和/或纳机电差压
- 申请号：EP15159675.6 申请日：2015-03-18
- 公开(公告)号：EP2921836A1 公开(公告)日：2015-09-23
- 发明人： Robert, Philippe , Diem, Bernard , Jourdan, Guillaume
- 申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 申请人地址： 25, rue Leblanc Bâtiment "le Ponant D" 75015 Paris FR
- 专利权人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人地址： 25, rue Leblanc Bâtiment "le Ponant D" 75015 Paris FR
- 代理机构： Brevalex
- 优先权： FR1452288 20140319
- 主分类号： G01L9/00
- IPC分类号： G01L9/00 ; G01L13/02
differential pressure sensor MEMS and / or NEMS comprising at least a first membrane (4) and at least a second membrane (6), each (4, 6) suspended from a substrate (2), the first diaphragm (4) having a face (4.1) subjected to a reference pressure and a second face (4.2) subjected to a first pressure to be detected, the second membrane (6) having a first face (6.1) subjected to the reference pressure and a second side (6.2) subjected to a second pressure to be detected, a rigid beam (8) of longitudinal axis (X) articulated relative to the substrate by a pivot connection about an axis (Y), said beam (8) being secured by a first zone to the first diaphragm (4) and a second area to the second diaphragm (6) so that the pivot link is between the first area and the second area of the beam (8), means for measuring the displacement of the beam (8) about the axis (Y), said measuring means being disposed at least partly on the substrate.