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1. 发明公开

EP3396844A1 ROTATION DEVICE, OPTICAL SCANNING DEVICE, AND IMAGE DISPLAY DEVICE 审中-公开
公开(公告)号：EP3396844A1
公开(公告)日：2018-10-31
申请号：EP16878583.0
申请日：2016-12-16
申请人： Ricoh Company, Ltd.
发明人： SHINKAWA, Mizuki , HASHIGUCHI, Tsuyoshi
IPC分类号： H02N2/12 , B81B3/00 , G02B26/08 , G02B26/10 , G02B27/01 , H01L41/09 , H02N2/14
CPC分类号： B81B3/0018 , B81B3/00 , G02B26/0858 , G02B26/10 , G02B26/101 , G02B27/01 , G02B27/0101 , H01L41/09 , H02N2/12 , H02N2/14
摘要： A rotating apparatus includes a folded back elastically deformable portion including a first piezoelectric element 20 for deforming a first elastically deformable portion 12 and a second piezoelectric element 21 for deforming a second elastically deformable portion 13, and the rotating apparatus rotates a movable portion around a predetermined rotation axis, by respectively applying a first driving voltage signal Va and a second driving voltage signal Vb that are different from each other to the first piezoelectric element and the second piezoelectric element, to deform the first elastically deformable portion and the second elastically deformable portion; wherein a connection position 113 and a connection position 116 have a relationship of being relatively the same positions or a relationship of being symmetrical positions across all of the folded back structures, the connection position 113 being a position where a signal line 111 of the first driving voltage signal Va and the first piezoelectric element are connected in the first piezoelectric element, and the connection position 116 being a position where a signal line 115 of the second driving voltage signal Vb and the second piezoelectric element are connected in the second piezoelectric element.

2. 发明公开

EP3362798A1 INTEGRATED MEASUREMENT AND MICROMECHANICAL POSITIONING APPARATUS FOR REAL-TIME TEST CONTROL 审中-公开
公开(公告)号：EP3362798A1
公开(公告)日：2018-08-22
申请号：EP15906189.4
申请日：2015-10-13
申请人： Sensapex Oy
发明人： VÄHÄSÖYRINKI, Mikko
IPC分类号： G01Q20/00 , B25J7/00 , G01Q10/06 , B82Y35/00 , B81B3/00
CPC分类号： B25J7/00 , B25J13/085 , B25J13/087 , B25J19/023 , B81B3/00 , G01N33/48728 , G01Q10/06 , G01Q10/065 , G01Q30/14 , G01Q60/44 , G01Q70/06
摘要： The invention relates to a measurement device (120), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a sensor (150) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the having an input coupled to the sensor (150) for receiving a sensor signal from the sensor (150) to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the sensor signal. The measurement device (120) may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said sensor signal and said positioning control instructions (300).

3. 发明公开

EP3168512A1 VALVE, FLUID DEVICE, METHOD FOR CONTROLLING FLUID, AND METHOD FOR MANUFACTURING VALVE 有权
标题翻译：阀，贮液装置，一种用于控制流体及其制造方法的阀门
公开(公告)号：EP3168512A1
公开(公告)日：2017-05-17
申请号：EP15818513.2
申请日：2015-07-07
申请人： The University of Tokyo , Nikon Corporation
发明人： ICHIKI Takanori , TERANE Shoutarou , SUZUKI Kuno
IPC分类号： F16K7/17 , B81B3/00 , B81C1/00
CPC分类号： B81B3/00 , B81C1/00 , F16K7/17
摘要： A valve is provided with a tubular structure having an outer tube and an inner tube, and a diaphragm member having a thin film disposed to cover one end of the inner tube and an anchor part which encircles a peripheral edge of the thin film and comes into close contact with an inner wall of the outer tube and an outer wall of the inner tube.
摘要翻译：阀设置有具有外管和上内管的管状结构，和具有薄膜布置成覆盖内管的一端，并且环绕所述薄膜的周缘并进入锚定部分的隔膜构件与所述外管的内壁和所述内管的外壁紧密接触。

4. 发明公开

EP1670898A2 MICROFLUIDIC ROTARY FLOW REACTOR MATRIX 审中-公开
标题翻译：微流体回路动力核MATRIX
公开(公告)号：EP1670898A2
公开(公告)日：2006-06-21
申请号：EP04809458.5
申请日：2004-06-21
申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY
发明人： LIU, Jian , HANSEN, Carl, L. , QUAKE, Stephen, R.
IPC分类号： C12N1/00
CPC分类号： B81B3/00 , B01J19/0093 , B01J2219/00783 , B01J2219/00828 , B01J2219/00833 , B01J2219/00891 , B01J2219/0095 , B01L3/5025 , B01L3/502707 , B01L3/502715 , B01L3/50273 , B01L3/502738 , B01L7/52 , B01L2200/10 , B01L2300/0816 , B01L2300/0819 , B01L2300/0861 , B01L2300/088 , B01L2300/123 , B01L2300/1827 , B01L2400/0481 , B01L2400/0655 , C12Q1/68 , F04B43/043 , G01N2035/00158
摘要： A microfluidic device comprises a matrix (6000) of rotary flow reactors (6002). The microfluidic matrix device offers a solution to the 'world-to-chip' interface problem by accomplishing two important goals simultaneously: an economy of scale in reagent consumption is achieved, while simultaneously minimizing pipetting steps. N2 independent assays can be performed with only 2N+1 pipetting steps, using a single aliquot of enzyme amortized over all reactors. The chip reduces labor relative to conventional fluid handling techniques by using an order of magnitude less pipetting steps, and reduces cost by consuming two to three orders of magnitude less reagents per reaction. A PCR format has immediate applications in medical diagnosis and gene testing. Beyond PCR, the microfluidic matrix chip provides a universal and flexible platform for biological and chemical assays requiring parsimonious use of precious reagents and highly automated processing.

5. 发明公开

EP1535066A2 RECIRCULATING FLUIDIC NETWORK AND METHODS FOR USING THE SAME 审中-公开
标题翻译： REZIRKULATIONSFLUIDNETZ UND VERWENDUNGSVERFAHRENDAFÜR
公开(公告)号：EP1535066A2
公开(公告)日：2005-06-01
申请号：EP03742152.6
申请日：2003-06-23
申请人： Fluidigm Corporation
发明人： MANGER, Ian, D. , BARCO, Joseph, W. , NASSEF, Hany, R.
IPC分类号： G01N33/53
CPC分类号： B81B3/00 , B01L3/5025 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0636 , B01L2300/0645 , B01L2300/0816 , B01L2300/0861 , B01L2300/088 , B01L2300/0887 , B01L2400/0415 , B01L2400/0481 , B01L2400/0655 , F04B19/006 , F04B43/02 , F16K99/0001 , F16K99/0003 , F16K99/0026 , F16K99/0036 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , G01N33/5304 , G01N33/54366 , Y10T436/2575
摘要： The present invention provides microfluidic devices comprising elastomeric components and solid substrate component for attaching ligands and methods for conducting a variety of assays and high throughput screening. The elastomeric components comprise a plurality of first and second flow channels forming a plurality of intersecting areas, further capable of forming looped flow channels, and in fluid communication with the solid substrate surface, a plurality of control channels, a plurality of first and second control valves, and a plurality of loop forming control valves.
摘要翻译：本发明提供了微流体装置及其使用方法。特别地，本发明的微流体装置可用于进行各种测定和高通量筛选。本发明的微流体装置包括用于在其表面上附着配体的弹性体组分和固体底物组分。弹性体层包括（a）多个第一流动通道; （b）多个第二流动通道，每个第二流动通道与每个所述第一流动通道相交并交叉，从而提供在所述第一流动通道和所述第二流动通道之间的交叉处形成的多个相交区域，其中所述多个第一流动通道和所述多个第二流动通道适于允许溶液流过其中，并且其中所述固体基底表面与所述多个第一流动通道和所述多个第二流动通道中的至少所述交叉区域流体连通，并且其中所述多个第二流动通道的第一流动通道和/或所述多个第二流动通道能够形成多个环形流动通道; （c）多个控制通道; （d）多个第一控制阀，每个第一控制阀相对于每个所述第一流动通道操作地设置以调节溶液通过所述第一流动通道的流动，其中每个所述第一控制阀包括第一控制通道和弹性体段，当所述第一流动通道响应于施加到所述第一控制通道的致动力而操作所述第一流动通道时所述第一流动通道可偏转进入或从所述第一流动通道缩回，所述弹性体段在定位在所述第一流动通道中时限制溶液流过其中; （e）多个第二控制阀，每个第二控制阀相对于每个所述第二流动通道操作地设置，以调节溶液通过所述第二流动通道的流动，其中每个所述第二控制阀包括第二控制通道和弹性体段，当所述第二流动通道响应于施加到所述第二控制通道的致动力而操作所述第二流动通道时，所述弹性体段被定位在所述第二流动通道中，所述第二流动通道限制溶液流过其中; （f）多个回路形成控制阀，每个操作地相对于每个所述第一和/或所述第二流动通道设置，以形成所述多个环形流动通道，其中每个所述回路成形控制阀包括回路成形控制通道以及弹性体段，其可偏转到所述第一和/或所述第二流动通道中或从所述第二流动通道中缩回，所述环形成控制阀响应于施加到所述环形成控制通道的致动力而操作，所述弹性体段定位在所述第一和和/或所述第二流动通道限制溶液流过其中，从而形成所述环形流动通道; 和（g）多个循环泵，并且其中每个循环泵相对于所述环形流动通道中的一个可操作地设置，使得通过每个所述环形流动通道的溶液的循环可以由所述循环泵之一调节。

6. 发明公开

EP4439010A1 MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPER MECHANISM 审中-公开
公开(公告)号：EP4439010A1
公开(公告)日：2024-10-02
申请号：EP24162903.9
申请日：2024-03-12
申请人： STMicroelectronics International N.V.
发明人： CARULLI, Paola , FEDELI, Patrick , FALORNI, Luca Giuseppe , MORELLI, Federico
IPC分类号： G01C19/5719 , B81B3/00 , B81B7/00 , G01C19/5733 , G01C19/5755 , G01P15/097
CPC分类号： G01P15/097 , G01C19/5755 , G01C19/5719 , G01C19/5733 , B81B3/00 , B81B7/00
摘要： Microelectromechanical device (1) comprising a supporting body (2), containing semiconductor material and a movable mass (3), constrained to the supporting body with a relative degree of freedom with respect to at least one motion direction (D), within a range (I) of admissible positions. The device also comprises stopper elements (7), operable by the movable mass due to movements along the at least one motion direction and configured to apply stop forces (FC) to opposite sides of the movable mass, transversely to the at least one motion direction, when the movable mass reaches a respective endpoint (I1, I2) of the range of admissible positions, so as to prevent the movable mass from exceeding the respective endpoint.

7. 发明授权

EP2546188B1 Procédé de réalisation d'une structure à membrane suspendue et à électrode enterrée 有权
公开(公告)号：EP2546188B1
公开(公告)日：2018-08-08
申请号：EP12175751.2
申请日：2012-07-10
申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
发明人： Giroud, Sophie , Berthelot, Audrey , Larrey, Vincent , Polizzi, Jean-Philippe , Vaudaine, Marie-Hélène
IPC分类号： B81C1/00
CPC分类号： B81B3/00 , B81B2203/04 , B81B2207/07 , B81C1/00015 , B81C1/00095 , B81C1/00166

8. 发明公开

EP3340325A1 PIEZOELECTRIC ELEMENT, METHOD FOR PRODUCING SAME AND PIEZOELECTRIC ACTUATOR 无效
公开(公告)号：EP3340325A1
公开(公告)日：2018-06-27
申请号：EP16848469.9
申请日：2016-09-01
申请人： Mitsumi Electric Co., Ltd.
发明人： AKIYAMA, Noriyuki , NAKAMURA, Akira
IPC分类号： H01L41/09 , B81B3/00 , B81C1/00 , G02B26/08 , G02B26/10 , H01L41/047 , H01L41/053 , H01L41/23 , H01L41/29 , H01L41/332 , G02B27/48
CPC分类号： H01L41/0973 , B81B3/00 , B81C1/00 , G02B26/08 , G02B26/0858 , G02B26/10 , G02B26/101 , G02B27/48 , H01L41/0478 , H01L41/0533 , H01L41/0805 , H01L41/0953 , H01L41/1876 , H01L41/23 , H01L41/29 , H01L41/332
摘要： A piezo-electric element includes a substrate; a lower electrode formed on the substrate; a piezo-electric film formed on the lower electrode; and an upper electrode formed on the piezo-electric film, wherein the upper electrode is formed on a surface on which a planarization process is performed.

9. 发明公开

EP3282301A1 OPTICAL SCANNING DEVICE, METHOD FOR MANUFACTURING SAME, AND OPTICAL SCANNING CONTROL DEVICE 审中-公开
标题翻译：光学扫描装置，制造该装置的方法以及光学扫描控制装置
公开(公告)号：EP3282301A1
公开(公告)日：2018-02-14
申请号：EP16802951.0
申请日：2016-04-22
申请人： Mitsumi Electric Co., Ltd.
发明人： YOSHIDA, Yukihiro , TAKENAKA, Koji , AGA, Hisanori
IPC分类号： G02B26/10 , B81B3/00 , G02B26/08
CPC分类号： G02B26/129 , B81B3/00 , G02B26/08 , G02B26/0858 , G02B26/10 , G02B26/101
摘要： An optical scanning device that scans incident light by causing a mirror to oscillate is provided. The optical scanning device includes a displacement sensor for detecting a swing angle of the mirror and a temperature sensor used for temperature compensation of the displacement sensor. The displacement sensor is a piezoelectric sensor that has a structure in which a lower electrode, a piezoelectric film, and an upper electrode are layered in this order. The temperature sensor is a resistance type temperature measuring body that has a same layer structure as the lower electrode.
摘要翻译：提供了一种通过使镜子振动来扫描入射光的光学扫描装置。光学扫描装置包括用于检测反射镜的摆动角的位移传感器和用于位移传感器的温度补偿的温度传感器。位移传感器是具有下电极，压电膜和上电极按此顺序层叠的结构的压电传感器。温度传感器是与下部电极具有相同层结构的电阻型温度测量体。

10. 发明公开

EP3231507A1 FLUID HANDLING DEVICE AND METHOD FOR MANUFACTURING FLUID HANDLING DEVICE 审中-公开
标题翻译：流体处理装置和用于制造流体处理装置的方法
公开(公告)号：EP3231507A1
公开(公告)日：2017-10-18
申请号：EP15866983.8
申请日：2015-10-29
申请人： Enplas Corporation
发明人： SUNAGA, Nobuya , MURAKI, Koji
IPC分类号： B01J19/00 , B29C65/02 , B81B3/00 , G01N35/08 , G01N37/00
CPC分类号： B01L3/502707 , B01J19/0093 , B01J2219/00783 , B01J2219/00804 , B01J2219/00833 , B01J2219/0086 , B01J2219/00894 , B01L2200/12 , B01L2300/0816 , B01L2300/0887 , B01L2300/123 , B29C65/02 , B29C65/4815 , B29C66/45 , B29C66/54 , B29L2031/756 , B32B37/04 , B81B3/00 , B81C1/00071 , G01N35/08 , G01N37/00
摘要： In the present invention, a fluid handling device has: a first substrate made of resin whereon a channel is formed in a first surface; a first film made of resin and joined to the first surface of the first substrate; a second film made of resin a first surface of which is joined to a second surface of the first substrate; and a second substrate made of resin and joined to a second surface of the second film. A recessed part overlapping the channel in a plane view is formed on the surface of the second substrate joined to the second film. The glass transition temperature Tg 1s of the first substrate, the glass transition temperature Tg 1f of the first film, the glass transition temperature Tg 2s of the second substrate, and the glass transition temperature Tg 2f of the second film satisfy Tg 1s , Tg 2s > Tg 1f , Tg 2f .
摘要翻译：在本发明中，流体处理装置具有：树脂制的第一基板，在第一表面形成有流路; 由树脂制成并接合到第一基板的第一表面的第一膜; 由树脂制成的第二膜，其第一表面接合到第一基板的第二表面; 和由树脂制成并连接到第二膜的第二表面的第二基板。在连接到第二膜的第二基板的表面上形成平面图中与沟道重叠的凹部。第一基材的玻璃化转变温度Tg1s，第一膜的玻璃化转变温度Tg1f，第二基材的玻璃化转变温度Tg2s和第二膜的玻璃化转变温度Tg2f满足Tg1s，Tg2s> Tg1f，Tg2f。

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