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1. 发明授权

EP4008998B1 PIEZOELECTRIC FREQUENCY-MODULATED GYROSCOPE 有权
公开(公告)号：EP4008998B1
公开(公告)日：2024-07-31
申请号：EP21209833.9
申请日：2021-11-23
IPC分类号： G01C19/5733
CPC分类号： G01C19/5733

2. 发明公开

EP4379320A1 MICROELECTROMECHANICAL DEVICE WITH TEST STRUCTURE, TEST EQUIPMENT FOR TESTING MICROELECTROMECHANICAL DEVICES AND METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL DEVICE 审中-公开
公开(公告)号：EP4379320A1
公开(公告)日：2024-06-05
申请号：EP23211935.4
申请日：2023-11-24
申请人： STMicroelectronics S.r.l.
发明人： GUERINONI, Luca , FEDELI, Patrick , FALORNI, Luca Giuseppe
IPC分类号： G01C19/5719 , G01C19/5733
CPC分类号： G01C19/5719 , G01C19/5733
摘要： A microelectromechanical device includes: a support body (8, 10-13); at least one movable mass (15) of semiconductor material, elastically constrained to the support body (8, 10-13) so as to be able to oscillate; fixed detection electrodes (22, 23) rigidly connected to the support body (8, 10-13) and capacitively coupled to the at least one movable mass (15); and at least one test structure (17) of semiconductor material, rigidly connected to the support body (8, 10-13) and distinct from the fixed detection electrodes (22, 23). The test structure (17) is capacitively coupled to the at least one movable mass (15) and is configured to apply electrostatic forces (FX, FY, FZ) to the at least one movable mass (15) in response to a voltage between the test structure (17) and the at least one movable mass (15).

3. 发明授权

EP3242109B1 MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM 有权
公开(公告)号：EP3242109B1
公开(公告)日：2020-05-27
申请号：EP17174612.6
申请日：2012-09-10
申请人： InvenSense, Inc.
发明人： SEEGER, Joseph , ANAC, Ozan
IPC分类号： G01C19/574 , G01C19/5733 , G01C19/5755 , G01C19/5712 , G01C19/5747

4. 发明公开

EP3615944A1 HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER 有权转让
公开(公告)号：EP3615944A1
公开(公告)日：2020-03-04
申请号：EP18722147.8
申请日：2018-04-24
申请人： Cambridge Enterprise Ltd.
发明人： ZOU, Xudong , SESHIA, Ashwin Arunkumar
IPC分类号： G01P15/097 , G01C19/5733

5. 发明公开

EP3457082A1 SENSOR DEVICE 有权
公开(公告)号：EP3457082A1
公开(公告)日：2019-03-20
申请号：EP18158580.3
申请日：2018-02-26
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： GANDO, Ryunosuke , IKEHASHI, Tamio , TOMIZAWA, Yasushi , OGAWA, Etsuji , MAEDA, Shunta
IPC分类号： G01C19/5733 , G01C19/5769 , B81B3/00
摘要： According to one arrangement, a sensor device includes a movable body (11) capable of vibrating, and a catch-and-release mechanism (14) capable of catching the vibrating movable body and capable of releasing the caught movable body. The catch-and-release mechanism includes a stopper portion (14b) capable of stopping vibration of the movable body when the movable body contacts the stopper portion, and an elastic member (14c) configured to reduce a force acting between the movable body and the stopper portion.

6. 发明授权

EP2884229B1 Micromachined gyroscope including a guided mass system 有权
公开(公告)号：EP2884229B1
公开(公告)日：2018-09-19
申请号：EP14182956.4
申请日：2014-08-29
申请人： InvenSense, Inc.
发明人： Anac, Ozan , Seeger, Joseph
IPC分类号： G01C19/5712 , G01C19/5733 , G01C19/574
CPC分类号： G01C19/5712 , G01C19/5733 , G01C19/574
摘要： A gyroscope (150) comprises a substrate (101) and a guided mass system. The guided mass system comprises proof masses (102a, 651) and guiding arms (104a, 104b) disposed in a plane parallel to the substrate (101). The proof masses are coupled to the guiding arm by springs (103a, 103b). The guiding arm is coupled to the substrate by springs (108a,108b). At least one of the proof-masses (651) is directly coupled to the substrate (101) by at least one anchor via a spring system (710a,710b). The gyroscope also comprises an actuator (109a, 109b) for vibrating one of the proof-masses (102a) in the first direction, which causes another proof mass to rotate in the plane. Finally, the gyroscope also includes transducers (660a, 660b) for sensing motion of the guided mass system in response to angular velocities about a single axis or multiple input axes.

7. 发明授权

EP2743639B1 STRUCTURE OF DISPLACEMENT MONITORING ELECTRODE 失效
公开(公告)号：EP2743639B1
公开(公告)日：2018-09-19
申请号：EP11870767.8
申请日：2011-08-09
申请人： Toyota Jidosha Kabushiki Kaisha
发明人： NARITA, Katsutoshi
IPC分类号： G01C19/56 , G01B7/00 , B81B3/00 , G01C19/5733
CPC分类号： G01B7/14 , B81B3/0086 , B81B2201/033 , G01C19/5733
摘要： The displacement amount monitoring electrode structure according to the present invention is for maintaining the amplitude of the detection mass at a constant target amplitude even when the relative relationship between a fixed electrode and a movable electrode changes, and includes a fixed electrode and a movable electrode each having a comb-teeth shape including a base part and electrode fingers extending from the base part in a predetermined axis direction parallel to a substrate, the fixed electrode and the movable electrode facing each other such that the electrode fingers of the fixed electrode and the electrode fingers of the movable electrode are meshed together, the fixed electrode being fixed to the substrate and the movable electrode being able to be displaced in the predetermined axis direction, wherein the displacement amount monitoring electrode structure monitors a displacement amount of a detection mass to be driven at a target amplitude based on a change amount of a capacitance between the fixed electrode and the movable electrode, wherein a change sensitivity of the change amount of the capacitance with respect to a displacement amount of the movable electrode in the predetermined axis direction, becomes larger after the displacement of the movable electrode in the predetermined axis direction reaches a target displacement amount corresponding to the target amplitude of the detection mass, compared to before the displacement of the movable electrode reaches the target displacement amount.

8. 发明公开

EP3106833A3 INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION 审中-公开
标题翻译：具有共模抑制的共模抑制惯性传感器
公开(公告)号：EP3106833A3
公开(公告)日：2017-05-03
申请号：EP16174422.2
申请日：2016-06-14
申请人： NXP USA, Inc.
发明人： Singer, Stefan , Gerster, Jochen , Herrmann, Stephan , Neff, Albrecht
IPC分类号： G01C19/574 , G01P1/00 , G01C19/5733
CPC分类号： G01C19/5621 , G01C19/5614 , G01C19/5733
摘要： A MEMS device includes a two spring systems coupling a pair of movable masses. Each of the spring systems includes a constrained stiff beam and a pair of flexures, where one flexure is directly coupled to one end of the stiff beam and to one of the movable masses and the other flexure is directly coupled to the opposing end of the stiff beam and to the other movable mass. In response to drive movement of the movable masses, the flexures enable pivotal movement the constrained stiff beams such that the stiff beams pivot in opposing directions about their center hinge points. This pivotal movement enables anti-phase linear oscillatory motion of the drive masses while substantially suppressing or otherwise rejecting in-phase motion of the movable masses.
摘要翻译： MEMS器件包括耦合一对可移动质量的两个弹簧系统。每个弹簧系统包括约束刚性梁和一对挠曲件，其中一个挠曲件直接联接到刚性梁的一端并且联接到一个可运动质量块，并且另一个挠曲件直接联接到刚性件的相对端梁和另一个可移动的质量。响应于可动质量块的驱动运动，挠曲件能够使受约束的刚性梁枢转运动，使得刚性梁围绕其中心铰接点在相反方向上枢转。这种枢转运动使得驱动质量块的反相线性振荡运动成为可能，同时基本上抑制或以其他方式拒绝可动质量块的同相运动。

9. 发明公开

EP3158292A1 MIKROMECHANISCHES SENSORBAUTEIL FÜR EINEN DREHRATENSENSOR 有权
标题翻译：艾滋病感染者感染者
公开(公告)号：EP3158292A1
公开(公告)日：2017-04-26
申请号：EP15721229.1
申请日：2015-05-07
申请人： Robert Bosch GmbH
发明人： OHMS, Torsten , MAUL, Robert , HATTASS, Mirko , HOEPPNER, Christian , SCHMIDT, Benjamin , SCHEBEN, Rolf
IPC分类号： G01C19/5733 , G01C19/5747
CPC分类号： G01C19/5747 , G01C19/5733
摘要： The invention relates to a micromechanical sensor component for a rotation rate sensor, comprising a first, second, third, and fourth seismic mass (12a to 12d) which are arranged on a mounting (10) in a movable manner about an intermediate space such that the first seismic mass (12a) and the second seismic mass (12b) can be moved at least along one first pivot axis (14), and the third seismic mass (12c) and the fourth seismic mass (12d) can be moved at least along one second pivot axis (16). A first rocker structure (26a) is connected to the first seismic mass (12a) via a first rocker coupling element (28a) and to the second seismic mass (12b) via a second rocker coupling element (28b) and is arranged on the mounting (10) adjacently to an outer face (30a) of the third seismic mass (12c) such that the first rocker structure (26a) can be set into a first rocker movement about a specified first pivot axis (32a) with respect to the mounting (10).
摘要翻译：本发明涉及一种用于旋转速率传感器的微机械传感器部件，其包括第一，第二，第三和第四震动块（12a至12d），其围绕中间空间以可移动的方式布置在安装件（10）上，使得可以至少沿着一个第一枢转轴线（14）移动第一地震块（12a）和第二地震块（12b），并且可以至少移动第三地震块（12c）和第四地震块（12d）沿着一个第二枢转轴线（16）。第一摇臂结构（26a）经由第一摇臂联接元件（28a）与第一震动块（12a）经由第二摇臂联接元件（28b）连接到第二震动块（12b），并且布置在安装件（10）相邻地邻近所述第三抗震块（12c）的外表面（30a），使得所述第一摇臂结构（26a）能够相对于所述安装件被设置为围绕指定的第一枢转轴线（32a）的第一摇摆运动（10）。

10. 发明公开

EP3106833A2 INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION 审中-公开
标题翻译：传感器麻省理工学院FÜRGLEICHTAKTUNTERDRÜCKUNG
公开(公告)号：EP3106833A2
公开(公告)日：2016-12-21
申请号：EP16174422.2
申请日：2016-06-14
申请人： NXP USA, Inc.
发明人： Singer, Stefan , Gerster, Jochen , Herrmann, Stephan , Neff, Albrecht
IPC分类号： G01C19/574 , G01P1/00 , G01C19/5733
CPC分类号： G01C19/5621 , G01C19/5614 , G01C19/5733
摘要： A MEMS device includes a two spring systems coupling a pair of movable masses. Each of the spring systems includes a constrained stiff beam and a pair of flexures, where one flexure is directly coupled to one end of the stiff beam and to one of the movable masses and the other flexure is directly coupled to the opposing end of the stiff beam and to the other movable mass. In response to drive movement of the movable masses, the flexures enable pivotal movement the constrained stiff beams such that the stiff beams pivot in opposing directions about their center hinge points. This pivotal movement enables anti-phase linear oscillatory motion of the drive masses while substantially suppressing or otherwise rejecting in-phase motion of the movable masses.
摘要翻译： MEMS装置包括耦合一对可移动质量块的两个弹簧系统。每个弹簧系统包括受约束的刚性梁和一对挠曲，其中一个挠曲件直接联接到刚性梁的一端和一个可移动质量块，另一个挠曲件直接联接到刚性梁的相对端梁和另一个移动块。响应于可移动质量块的驱动运动，挠曲能够使约束的刚性梁枢转运动，使得刚性梁在相对的方向绕其中心铰链点枢转。该枢转运动使得驱动质量的反相线性振荡运动能够基本上抑制或以其他方式拒绝可移动质量块的同相运动。

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