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    • 4. 发明公开
    • RF power sensor for measuring an RF signal power using capacitance
    • Kapazitiv arbeitender HF-Leistungssensor zur Messung eines HF-Leistungssignals
    • EP1355162A1
    • 2003-10-22
    • EP03008483.4
    • 2003-04-11
    • SAMSUNG ELECTRONICS CO. LTD.
    • Shim, Dong-haSong, In-sangKim, Young-ilPark, Sun-heeHong, Young-tackMin, Dong-ki
    • G01R21/00G01R1/067
    • G01R21/00G01R1/06772
    • An RF power sensor for measuring power for an RF signal using capacitance includes a substrate preferably formed of a semiconductor, such as silicon or of a dielectric substance, a fixture part fixed to the substrate and forming a signal line and ground lines that transmit RF signals, and a bridge connected to the ground lines and floating over the signal line, wherein the bridge is driven by an external driving force, and the external driving force induces capacitance between the bridge and the signal line. Accordingly, power for an RF signal can be measured through the capacitance between the signal line and the bridge. The RF power sensor facilitates matchings, reduces insertion loss, and can be used in a wide bandwidth because it is based on transmission lines having characteristic impedance. Further, high power can be measured depending upon bridge designs.
    • 用于测量使用电容的RF信号的功率的RF功率传感器包括优选地由诸如硅或介电物质的半导体形成的衬底,固定到衬底并形成信号线的固定部分和发射RF信号的接地线 以及连接到地线并跨越信号线的桥,其中桥由外部驱动力驱动,并且外部驱动力引起桥与信号线之间的电容。 因此,可以通过信号线和桥之间的电容来测量RF信号的功率。 RF功率传感器有利于匹配,减少插入损耗,并且可以在宽带宽中使用,因为它基于具有特征阻抗的传输线。 此外,可以根据桥梁设计来测量高功率。