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    • 2. 发明公开
    • A process for the production of silicon gate CMOS transistors, and resultant product
    • Silicium Gate CMOS-Transistore und Verfahren zu ihrer Herstellung
    • EP0844661A1
    • 1998-05-27
    • EP96830590.4
    • 1996-11-20
    • SGS-THOMSON MICROELECTRONICS s.r.l.
    • Depetro, RiccardoAndreini, Antonio
    • H01L21/8238
    • H01L21/823814
    • A process is described for the production of silicon gate CMOS transistors in which, after formation of strips (14n, 14p) of polycrystalline silicon for the gate electrodes on the active areas intended for the n-channel and p-channel transistors, an implantation mask (15) is formed which leaves exposed the active areas for the n-channel transistors and the associated strips (14n) of polycrystalline silicon up to the zones (14z) where these are intended to be contacted by respective metal electrodes, in such a way as to dope with n-type impurities not only the source and drain regions but also the polycrystalline silicon strips (14n). A similar operation allows both the source and drain regions of the p-channel transistors and the associated strips (14p) of polycrystalline silicon for the gate electrodes up to the respective contact zones for the metal electrodes to be doped with p-type impurities. In this way p-channel transistors having lower threshold voltages than those obtainable with the usual processes are obtained without additional operations.
    • 描述了用于生产硅栅极CMOS晶体管的工艺,其中在用于n沟道和p沟道晶体管的有源区上形成用于栅电极的多晶硅的条(14n,14p),注入掩模 (15)形成,其暴露了用于n沟道晶体管的有源区域和相关联的多晶硅条(14n)直到这些将被各个金属电极接触的区域(14z),以这种方式 为了掺杂n型杂质不仅源区和漏区,而且多晶硅条(14n)。 类似的操作允许p沟道晶体管的源极和漏极区域以及用于栅电极的相关联的多晶硅条(14p)直到金属电极的相应接触区域掺杂有p型杂质。 以这种方式,获得具有比通常处理可获得的阈值电压低的阈值电压的p沟道晶体管,而无需额外的操作。