专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

EP1580546B1 Methods for X-ray reflectance measurement 有权
标题翻译： X射线反射的方法
公开(公告)号：EP1580546B1
公开(公告)日：2013-09-18
申请号：EP05006099.5
申请日：2005-03-21
申请人： Rigaku Corporation
发明人： Omote, Kazuhiko
IPC分类号： G01N23/20 , G01N23/207
CPC分类号： G01N23/20

2. 发明授权

EP1371971B1 Sample analysis using propagating rays and slits for which a slit function is calculated 有权
标题翻译：样品分析是通过传播在其上sinc函数梁和柱计算
公开(公告)号：EP1371971B1
公开(公告)日：2012-10-31
申请号：EP03253641.9
申请日：2003-06-10
申请人： Rigaku Corporation
发明人： Omote, Kazuhiko , Sasaki, Akito , Ito, Yoshiyasu
IPC分类号： G01N23/083 , G21K1/02 , G01N23/201
CPC分类号： G01N23/083 , G21K1/02

3. 发明公开

EP2439589A2 X-ray image photographing method and X-ray image photographing apparatus 有权
标题翻译： Röntgenstrahlbild-Fotografierverfahren undRöntgenstrahlbild-Fotografiervorrichtung
公开(公告)号：EP2439589A2
公开(公告)日：2012-04-11
申请号：EP11184314.0
申请日：2011-10-07
申请人： Rigaku Corporation
发明人： Omote, Kazuhiko , Kambe, Makoto , Takeda, Yoshihiro
IPC分类号： G03B42/00
CPC分类号： G03B42/02 , A61B6/4035 , A61B6/484 , A61B6/588 , A61B6/589
摘要： There is provided an X-ray image photographing method and an X-ray image photographing apparatus capable of photographing a high resolution phase contrast image and a high resolution absorption contrast image in a short time according to the purpose only by finely adjusting the distance between a specimen and a detector with respect to an X-ray source.
The X-ray image photographing method enables photographing of a fine structure with a high space resolution while using an X-ray source having a finite size, and d/L is sufficiently smaller than 1, when L is a distance from an X-ray source 110 to a specimen 500 and d is a distance from the specimen 500 to a detector 130. Further, a distance between a peak position and a valley position of a phase contrast is not less than 1/3Δ and not more than 3Δ, when λ is an average wavelength of X-ray to be irradiated from the X-ray source 110 and Δ is a resolution of the detector 130.
摘要翻译：本发明提供一种能够根据目的在短时间内拍摄高分辨率相位差图像和高分辨率吸收对比图像的X射线图像拍摄方法和X射线图像摄影装置，只需通过精细地调整样品和检测器相对于X射线源。当使用具有有限尺寸的X射线源时，X射线图像拍摄方法能够以高空间分辨率拍摄精细结构，并且当L是距离X射线的距离时，d / L足够小于1 源110到样本500，d是从样本500到检测器130的距离。另外，相位对比度的峰值位置和谷点位置之间的距离不小于1/3“且不大于3” 当»是从X射线源110照射的X射线的平均波长，“是检测器130的分辨率时。

4. 发明授权

EP1724610B1 Method for measuring dead time of x-ray detector 有权
标题翻译：一种用于测量X射线检测器的死区时间的方法
公开(公告)号：EP1724610B1
公开(公告)日：2012-03-28
申请号：EP06010412.2
申请日：2006-05-19
申请人： Rigaku Corporation
发明人： Ueda, Tomoyasu , Ito, Yoshiyasu , Omote, Kazuhiko
IPC分类号： G01T1/17
CPC分类号： G01T1/171

5. 发明授权

EP1462795B1 X-Ray diffractometer for grazing incidence switchable between in-plane and out-of-plane measurements 有权
$X-Ray diffractometer for grazing incidence switchable between in-plane and out-of-plane measurements$
标题翻译： X-射线衍射仪在掠入射测量，其可以在平面内的测量和之间在平面外来回切换
公开(公告)号：EP1462795B1
公开(公告)日：2006-08-09
申请号：EP04006968.4
申请日：2004-03-23
申请人： Rigaku Corporation
发明人： Omote, Kazuhiko
IPC分类号： G01N23/207
CPC分类号： G01N23/20 , G21K1/06

6. 发明公开

EP1365230A3 Method for estimating preferred orientation of polycrystalline material 审中-公开
标题翻译：材料polykrystallinem的优选取向的评估方法
公开(公告)号：EP1365230A3
公开(公告)日：2004-12-01
申请号：EP03011139.7
申请日：2003-05-23
申请人： Rigaku Corporation
发明人： Toraya, Hideo , Omote, Kazuhiko
IPC分类号： G01N23/20 , G01N23/207
CPC分类号： G01N23/207
摘要： The method estimates quantitatively the preferred orientation of a polycrystalline material using one diffraction peak. An orientation density distribution function ρ is assumed to be axisymmetric around on the normal direction of the surface of a sample (12) made of a polycrystalline material. The function ρ may be a Gaussian function or a March-Dollase function. An X-ray (10) is incident upon the surface of the sample (12) at an incident angle α and the intensity of a diffraction X-ray (14) is measured. The change of the intensity of the diffraction X-ray (14) is measured with the incident angle α being changed to attain a measurement rocking curve. On the other hand, a theoretical diffraction X-ray intensity is calculated based on the orientation density distribution function ρ. Then the characteristic parameter (H) of the function ρ is determined so that the theoretical rocking curve approaches the measurement rocking curve as closely as possible, whereby the orientation density distribution function ρ can be determined. The degree of preferred orientation can be quantitatively estimated.

7. 发明授权

EP2439589B1 X-ray image photographing method and X-ray image photographing apparatus 有权
公开(公告)号：EP2439589B1
公开(公告)日：2018-06-20
申请号：EP11184314.0
申请日：2011-10-07
申请人： Rigaku Corporation
发明人： Omote, Kazuhiko , Kambe, Makoto , Takeda, Yoshihiro
IPC分类号： G03B42/02 , A61B6/00
CPC分类号： G03B42/02 , A61B6/4035 , A61B6/484 , A61B6/588 , A61B6/589
摘要： There is provided an X-ray image photographing method and an X-ray image photographing apparatus capable of photographing a high resolution phase contrast image and a high resolution absorption contrast image in a short time according to the purpose only by finely adjusting the distance between a specimen and a detector with respect to an X-ray source. The X-ray image photographing method enables photographing of a fine structure with a high space resolution while using an X-ray source having a finite size, and d/L is sufficiently smaller than 1, when L is a distance from an X-ray source 110 to a specimen 500 and d is a distance from the specimen 500 to a detector 130. Further, a distance between a peak position and a valley position of a phase contrast is not less than 1/3” and not more than 3”, when » is an average wavelength of X-ray to be irradiated from the X-ray source 110 and ” is a resolution of the detector 130.

8. 发明授权

EP1559993B1 Method and apparatus for film thickness measurement 有权
标题翻译：对膜厚度测量方法和装置
公开(公告)号：EP1559993B1
公开(公告)日：2009-04-01
申请号：EP05001701.1
申请日：2005-01-27
申请人： Rigaku Corporation
发明人： Omote, Kazuhiko , Himeda, Akihiro
IPC分类号： G01B15/02 , G01N23/20
CPC分类号： G01N23/20 , G01B15/02

9. 发明授权

EP0943914B1 Apparatus for X-ray analysis 有权
标题翻译： X射线分析装置
公开(公告)号：EP0943914B1
公开(公告)日：2008-04-09
申请号：EP99105004.8
申请日：1999-03-19
申请人： Rigaku Corporation
发明人： Hayashi, Seiichi , Harada, Jimpei , Omote, Kazuhiko
IPC分类号： G01N23/20 , G21K1/06
CPC分类号： G21K1/06

10. 发明公开

EP1559993A2 Method and apparatus for film thickness measurement 有权
标题翻译： Verfahren und Vorrichtung zur Filmdickenmessung
公开(公告)号：EP1559993A2
公开(公告)日：2005-08-03
申请号：EP05001701.1
申请日：2005-01-27
申请人： Rigaku Corporation
发明人： Omote, Kazuhiko , Himeda, Akihiro
IPC分类号： G01B15/02 , G01N23/20
CPC分类号： G01N23/20 , G01B15/02
摘要： The thickness of a thin film (14) can be measured based on the X-ray diffraction method. An X-ray (16) is allowed to be incident upon a surface of the thin film (14). An intensity of a diffracted X-ray (20) is measured with the incident angle α being changed to obtain a measured rocking curve. On the other hand, a theoretical rocking curve is calculated in consideration of an orientation density distribution function ρ of the thin film (14). A scale factor is predetermined for a standard sample having a known film thickness. A parameter fitting operation is carried out in a manner that the characteristic parameter of the function ρ and the film thickness t are adjusted so that the theoretical rocking curve including the scale factor can approach the measured rocking curve as closely as possible.
摘要翻译：可以基于X射线衍射法测量薄膜（14）的厚度。允许X射线（16）入射到薄膜（14）的表面上。测量衍射X射线（20）的强度，其中入射角度±改变以获得测量的摇摆曲线。另一方面，考虑到薄膜（14）的取向密度分布函数Á来计算理论摇摆曲线。对于具有已知膜厚度的标准样品，比例因子是预定的。参数拟合操作以调整功能Á的特征参数和膜厚度t的方式进行，使得包括比例因子的理论摇摆曲线可以尽可能接近测量的摇摆曲线。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式