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    • 7. 发明公开
    • X-ray analysis apparatus with an X-ray generator
    • Röntgenstrahlenanalysevorrichtungmit einemRöntgengenerator
    • EP1273906A2
    • 2003-01-08
    • EP02014738.5
    • 2002-07-03
    • Rigaku Corporation
    • Hayashi, SeiichiHarada, JimpeiTakahashi, SadayukiKuribayashi, Masaru
    • G01N23/00
    • G01N23/00
    • Apparatus for X-ray analysis has a combination of a rotating target X-ray tube (10) and a composite monochromator (22). The composite monochromator (22) has a first and a second elliptic monochromators (26, 28) joined with each other side by side. Each of the elliptic monochromators (26, 28) has a first focal point (F1) at which an X-ray focal spot (24) on a target (12) of the X-ray tube (10) is disposed. Each of the elliptic monochromators (26, 28) has a synthetic multilayered thin film whose d-spacing varies continuously along an elliptic-arc. The shortest distance (L1) between the X-ray focal spot (24) and the composite monochromator (22) is set to 40 to 100 mm. Under the shortest distance condition, the effective focal spot size (t) on the target (12) is set to 40 to 100 micrometers to obtain the maximum X-ray intensity on a sample to be analyzed.
    • 用于X射线分析的装置具有旋转靶X射线管(10)和复合单色仪(22)的组合。 复合单色仪(22)具有彼此并排连接的第一和第二椭圆形单色仪(26,28)。 每个椭圆形单色仪(26,28)具有设置在X射线管(10)的靶(12)上的X射线焦点(24)的第一焦点(F1)。 每个椭圆形单色仪(26,28)具有合成的多层薄膜,其d-间距沿椭圆弧连续变化。 X射线焦斑(24)和复合单色仪(22)之间的最短距离(L1)设定为40〜100mm。 在最短距离条件下,目标(12)上的有效焦点尺寸(t)设定为40〜100微米,以获得待分析样品上的最大X射线强度。