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1. 发明公开

EP2202559A2 Method and system for packaging a MEMS device 审中-公开
标题翻译： Methode und System zum Verpacken eines MEMS - Gerätes
公开(公告)号：EP2202559A2
公开(公告)日：2010-06-30
申请号：EP09175764.1
申请日：2005-09-14
申请人： QUALCOMM MEMS TECHNOLOGIES, INC
发明人： Palmateer, Lauren , Sampsell, Jeffrey B. , Miles, Mark W. , Arbuckle, Brian W. , Floyd, Philip D.
IPC分类号： G02B26/00 , B81B7/00
CPC分类号： B81C1/0023 , G02B26/001 , Y10T29/49002
摘要： A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate (608) and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.
摘要翻译：描述了基于MEMS的显示装置，其中干涉式调制器的阵列被配置为将光反射通过透明基板。透明基板被密封到背板（608），并且背板可以包含用于控制干涉式调制器阵列的电子电路。背板可以为设备组件（例如可用于控制显示器状态的电子组件）提供物理支持。背板也可以用作装置的主要结构支撑。在由透明基板和背板形成的空腔中设置干燥剂（1254）。

2. 发明公开

EP2202559A3 Method and system for packaging a MEMS device 审中-公开
标题翻译：方法和系统，用于封装MEMS - 装置
公开(公告)号：EP2202559A3
公开(公告)日：2012-08-01
申请号：EP09175764.1
申请日：2005-09-14
申请人： QUALCOMM MEMS TECHNOLOGIES, INC
发明人： Palmateer, Lauren , Sampsell, Jeffrey B. , Miles, Mark W. , Arbuckle, Brian W. , Floyd, Philip D.
IPC分类号： G02B26/00 , B81B7/00
CPC分类号： B81C1/0023 , G02B26/001 , Y10T29/49002
摘要： A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate (608) and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device. A desiccant (1254) is provided in the cavity formed by the transparent substrate and the backplate.

3. 发明公开

EP2515159A3 A device having a light-absorbing mask and a method for fabricating same. 审中-公开
标题翻译：具有光吸收掩模及其制造方法装置
公开(公告)号：EP2515159A3
公开(公告)日：2014-04-16
申请号：EP12160219.7
申请日：2003-06-27
申请人： Qualcomm Mems Technologies, Inc.
发明人： Miles, Mark W.
IPC分类号： G02F1/03 , G02B26/00 , G02B5/22
CPC分类号： G02B26/001 , G02B5/003 , G02B5/288 , G02B26/02 , G02B27/0018 , G03F7/0007
摘要： The invention provides a method for fabricating an optical device comprising at least one optical component formed on a transparent substrate. The method comprises determining an area of the substrate that is to be lightabsorbing; and fabricating a lightabsorbing mask on the determined area prior to fabricating the at least one optical component. The invention also provides an optical device comprising a substrate (102); and first and second optical components formed on the substrate, wherein the first optical component (104) has two modes, each mode producing a different optical response to light incident thereupon, and wherein the second optical component (108) absorbs light and is formed on the substrate before the first optical component is formed.

4. 发明公开

EP2515159A2 A device having a light-absorbing mask and a method for fabricating same. 审中-公开
标题翻译： Vorrichtung mit einer lichtabsorbierenden Maske und Herstellungsverfahrendafür
公开(公告)号：EP2515159A2
公开(公告)日：2012-10-24
申请号：EP12160219.7
申请日：2003-06-27
申请人： Qualcomm Mems Technologies, Inc.
发明人： Miles, Mark W.
IPC分类号： G02F1/03 , G02B26/00
CPC分类号： G02B26/001 , G02B5/003 , G02B5/288 , G02B26/02 , G02B27/0018 , G03F7/0007
摘要： The invention provides a method for fabricating an optical device comprising at least one optical component formed on a transparent substrate. The method comprises determining an area of the substrate that is to be lightabsorbing; and fabricating a lightabsorbing mask on the determined area prior to fabricating the at least one optical component. The invention also provides an optical device comprising a substrate (102); and first and second optical components formed on the substrate, wherein the first optical component (104) has two modes, each mode producing a different optical response to light incident thereupon, and wherein the second optical component (108) absorbs light and is formed on the substrate before the first optical component is formed.
摘要翻译：本发明提供一种制造光学器件的方法，该光学器件包括形成在透明衬底上的至少一个光学部件。该方法包括确定要吸收的衬底的面积; 以及在制造所述至少一个光学部件之前在所确定的区域上制造光吸收掩模。本发明还提供一种包括衬底（102）的光学器件; 以及形成在所述基板上的第一和第二光学部件，其中，所述第一光学部件（104）具有两种模式，每种模式对入射到其上的光产生不同的光学响应，并且其中所述第二光学部件（108）吸收光并形成在形成第一光学部件之前的基板。

5. 发明公开

EP2495212A3 Mems devices having support structures and methods of fabricating the same 审中-公开
标题翻译：与支撑结构及其制造方法的MEMS装置
公开(公告)号：EP2495212A3
公开(公告)日：2012-10-31
申请号：EP12170329.2
申请日：2006-07-20
申请人： QUALCOMM MEMS Technologies, Inc.
发明人： Chui, Clarence , Chung, Wonsuk , Ganti, Surya Prakash , Kothari, Manish , Miles, Mark W. , Sampsell, Jeffrey Brian , Sasagawa, Teruo
IPC分类号： B81B3/00 , B81C1/00 , G02B26/00 , G02B26/08
CPC分类号： G02B26/0841 , B81B3/0072 , B81B2201/047 , B81B2203/0163 , B81B2203/019 , B81B2203/0307 , B81B2203/053 , B81C1/00142 , B81C1/00666 , B81C2201/0167 , G02B26/001 , Y10S359/90
摘要： Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.

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