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    • 2. 发明公开
      EP1750085A3 Laser tracking interferometer 有权
    • Laser tracking interferometer
    • 装置，用于追踪激光干涉仪
    • EP1750085A3
    • 2012-04-18
    • EP06013532.4
    • 2006-06-29
    • Mitutoyo Corporation
    • Yanaka, Shinichirou , Abe, Makoto , Hara, Shinichi , Taketomi, Naoyuki
    • G01B9/02 , G01B11/03 , G01S17/66
    • G01S17/36 , G01B11/03 , G01S7/4812 , G01S7/497 , G01S17/42 , G01S17/66
    • A laser tracking interferometer directs a laser beam to a retroreflector serving as an object to be measured to sense a displacement of the retroreflector using interference with a laser beam back reflected from the retroreflector as well as to track the retroreflector using a change in position of the optical axis of the laser beam. The laser tracking interferometer includes: a reference sphere disposed at a fixed location; a carriage configured to rotate about a center of the reference sphere; a laser interferometer for providing a displacement signal corresponding to a displacement of the retroreflector, and a displacement gage for providing a displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage, the laser interferometer and the displacement gage being disposed on the carriage; a data processing apparatus for computing a displacement of the retroreflector with respect to the reference sphere in accordance with the displacement signal provided by the displacement gage and the displacement signal provided by the laser interferometer; a position sensitive detector for providing a position signal corresponding to the amount of deviation of a laser beam when the laser beam is reflected off the retroreflector back into the laser interferometer and deviated in a direction orthogonal to its optical axis; and a controller for controlling rotation of the carriage based on the position signal from the position detector so that the amount of deviation becomes zero. This makes the laser tracking interferometer is robust to the runout of the rotational mechanism. The laser tracking interferometer is less susceptible to flaws and dust particles on the surface of the reference sphere, and is capable of employing a relatively inexpensive reference sphere.
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Global Dossier Espacenet 法律信息 同族专利 专利引用
    • 3. 发明公开
      EP1750085A2 Laser tracking interferometer 有权
    • Laser tracking interferometer
    • Einrichtung zumNachführeneines Laserstrahl-Interferometers
    • EP1750085A2
    • 2007-02-07
    • EP06013532.4
    • 2006-06-29
    • MITUTOYO CORPORATION
    • Yanaka, Shinichirou , Abe, Makoto , Hara, Shinichi , Taketomi, Naoyuki
    • G01B9/02
    • G01S17/36 , G01B11/03 , G01S7/4812 , G01S7/497 , G01S17/42 , G01S17/66
    • A laser tracking interferometer directs a laser beam to a retroreflector serving as an object to be measured to sense a displacement of the retroreflector using interference with a laser beam back reflected from the retroreflector as well as to track the retroreflector using a change in position of the optical axis of the laser beam. The laser tracking interferometer includes: a reference sphere disposed at a fixed location; a carriage configured to rotate about a center of the reference sphere; a laser interferometer for providing a displacement signal corresponding to a displacement of the retroreflector, and a displacement gage for providing a displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage, the laser interferometer and the displacement gage being disposed on the carriage; a data processing apparatus for computing a displacement of the retroreflector with respect to the reference sphere in accordance with the displacement signal provided by the displacement gage and the displacement signal provided by the laser interferometer; a position sensitive detector for providing a position signal corresponding to the amount of deviation of a laser beam when the laser beam is reflected off the retroreflector back into the laser interferometer and deviated in a direction orthogonal to its optical axis; and a controller for controlling rotation of the carriage based on the position signal from the position detector so that the amount of deviation becomes zero. This makes the laser tracking interferometer is robust to the runout of the rotational mechanism. The laser tracking interferometer is less susceptible to flaws and dust particles on the surface of the reference sphere, and is capable of employing a relatively inexpensive reference sphere.
    • 激光跟踪干涉仪将激光束引导到用作被测量对象的后向反射器，以使用与从后向反射器反射的反射的激光束的干涉来感测回射器的位移，以及使用位于所述后向反射器 激光束的光轴。 激光跟踪干涉仪包括：设置在固定位置处的参考球; 托架，被构造成围绕参考球的中心旋转; 用于提供对应于后向反射器的位移的位移信号的激光干涉仪，以及用于提供对应于参考球和位移计之间的相对位移的位移信号的位移计，激光干涉仪和位移计设置在 运输; 数据处理装置，用于根据由位移计提供的位移信号和由激光干涉仪提供的位移信号计算回射器相对于参考球的位移; 位置敏感检测器，用于当激光束从后向反射器反射回激光干涉仪并在与其光轴正交的方向上偏离时，提供与激光束的偏离量相对应的位置信号; 以及控制器，用于基于来自位置检测器的位置信号来控制滑架的旋转，使得偏差量变为零。 这使得激光跟踪干涉仪对于旋转机构的跳动是坚固的。 激光跟踪干涉仪对参考球体表面的瑕疵和灰尘颗粒较不敏感，并且能够采用相对便宜的参比球。
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Global Dossier Espacenet 法律信息 同族专利 专利引用
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