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1. 发明授权

EP1750085B1 Laser tracking interferometer 有权
标题翻译：装置，用于追踪激光干涉仪
公开(公告)号：EP1750085B1
公开(公告)日：2013-07-31
申请号：EP06013532.4
申请日：2006-06-29
申请人： Mitutoyo Corporation
发明人： Yanaka, Shinichirou , Abe, Makoto , Hara, Shinichi , Taketomi, Naoyuki
IPC分类号： G01B9/02 , G01B11/03 , G01S17/66 , G01S7/481 , G01S7/497 , G01S17/36 , G01S17/42
CPC分类号： G01S17/36 , G01B11/03 , G01S7/4812 , G01S7/497 , G01S17/42 , G01S17/66

2. 发明公开

EP1750085A3 Laser tracking interferometer 有权
标题翻译：装置，用于追踪激光干涉仪
公开(公告)号：EP1750085A3
公开(公告)日：2012-04-18
申请号：EP06013532.4
申请日：2006-06-29
申请人： Mitutoyo Corporation
发明人： Yanaka, Shinichirou , Abe, Makoto , Hara, Shinichi , Taketomi, Naoyuki
IPC分类号： G01B9/02 , G01B11/03 , G01S17/66
CPC分类号： G01S17/36 , G01B11/03 , G01S7/4812 , G01S7/497 , G01S17/42 , G01S17/66
摘要： A laser tracking interferometer directs a laser beam to a retroreflector serving as an object to be measured to sense a displacement of the retroreflector using interference with a laser beam back reflected from the retroreflector as well as to track the retroreflector using a change in position of the optical axis of the laser beam. The laser tracking interferometer includes: a reference sphere disposed at a fixed location; a carriage configured to rotate about a center of the reference sphere; a laser interferometer for providing a displacement signal corresponding to a displacement of the retroreflector, and a displacement gage for providing a displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage, the laser interferometer and the displacement gage being disposed on the carriage; a data processing apparatus for computing a displacement of the retroreflector with respect to the reference sphere in accordance with the displacement signal provided by the displacement gage and the displacement signal provided by the laser interferometer; a position sensitive detector for providing a position signal corresponding to the amount of deviation of a laser beam when the laser beam is reflected off the retroreflector back into the laser interferometer and deviated in a direction orthogonal to its optical axis; and a controller for controlling rotation of the carriage based on the position signal from the position detector so that the amount of deviation becomes zero. This makes the laser tracking interferometer is robust to the runout of the rotational mechanism. The laser tracking interferometer is less susceptible to flaws and dust particles on the surface of the reference sphere, and is capable of employing a relatively inexpensive reference sphere.

3. 发明公开

EP1750085A2 Laser tracking interferometer 有权
标题翻译： Einrichtung zumNachführeneines Laserstrahl-Interferometers
公开(公告)号：EP1750085A2
公开(公告)日：2007-02-07
申请号：EP06013532.4
申请日：2006-06-29
申请人： MITUTOYO CORPORATION
发明人： Yanaka, Shinichirou , Abe, Makoto , Hara, Shinichi , Taketomi, Naoyuki
IPC分类号： G01B9/02
CPC分类号： G01S17/36 , G01B11/03 , G01S7/4812 , G01S7/497 , G01S17/42 , G01S17/66
摘要： A laser tracking interferometer directs a laser beam to a retroreflector serving as an object to be measured to sense a displacement of the retroreflector using interference with a laser beam back reflected from the retroreflector as well as to track the retroreflector using a change in position of the optical axis of the laser beam. The laser tracking interferometer includes: a reference sphere disposed at a fixed location; a carriage configured to rotate about a center of the reference sphere; a laser interferometer for providing a displacement signal corresponding to a displacement of the retroreflector, and a displacement gage for providing a displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage, the laser interferometer and the displacement gage being disposed on the carriage; a data processing apparatus for computing a displacement of the retroreflector with respect to the reference sphere in accordance with the displacement signal provided by the displacement gage and the displacement signal provided by the laser interferometer; a position sensitive detector for providing a position signal corresponding to the amount of deviation of a laser beam when the laser beam is reflected off the retroreflector back into the laser interferometer and deviated in a direction orthogonal to its optical axis; and a controller for controlling rotation of the carriage based on the position signal from the position detector so that the amount of deviation becomes zero. This makes the laser tracking interferometer is robust to the runout of the rotational mechanism. The laser tracking interferometer is less susceptible to flaws and dust particles on the surface of the reference sphere, and is capable of employing a relatively inexpensive reference sphere.
摘要翻译：激光跟踪干涉仪将激光束引导到用作被测量对象的后向反射器，以使用与从后向反射器反射的反射的激光束的干涉来感测回射器的位移，以及使用位于所述后向反射器激光束的光轴。激光跟踪干涉仪包括：设置在固定位置处的参考球; 托架，被构造成围绕参考球的中心旋转; 用于提供对应于后向反射器的位移的位移信号的激光干涉仪，以及用于提供对应于参考球和位移计之间的相对位移的位移信号的位移计，激光干涉仪和位移计设置在运输; 数据处理装置，用于根据由位移计提供的位移信号和由激光干涉仪提供的位移信号计算回射器相对于参考球的位移; 位置敏感检测器，用于当激光束从后向反射器反射回激光干涉仪并在与其光轴正交的方向上偏离时，提供与激光束的偏离量相对应的位置信号; 以及控制器，用于基于来自位置检测器的位置信号来控制滑架的旋转，使得偏差量变为零。这使得激光跟踪干涉仪对于旋转机构的跳动是坚固的。激光跟踪干涉仪对参考球体表面的瑕疵和灰尘颗粒较不敏感，并且能够采用相对便宜的参比球。

4. 发明授权

EP1903300B1 Shape measurement method and shape measurement apparatus 有权
标题翻译：用于测量形状的方法和装置
公开(公告)号：EP1903300B1
公开(公告)日：2009-05-13
申请号：EP07018494.0
申请日：2007-09-20
申请人： Mitutoyo Corporation
发明人： Hara, Sotomitsu , Tsuchida, Yutaka , Arai, Yoshikazu , Ishii, Yasushi , Abe, Makoto , Ueshima, Yasushi
IPC分类号： G01B11/24
CPC分类号： G01B11/2408 , G01B11/2433

5. 发明公开

EP1903300A1 Shape measurement method and shape measurement apparatus 有权
标题翻译： Verfahren und Vorrichtung zur Formmessung
公开(公告)号：EP1903300A1
公开(公告)日：2008-03-26
申请号：EP07018494.0
申请日：2007-09-20
申请人： MITUTOYO CORPORATION
发明人： Hara, Sotomitsu , Tsuchida, Yutaka , Arai, Yoshikazu , Ishii, Yasushi , Abe, Makoto , Ueshima, Yasushi
IPC分类号： G01B11/24
CPC分类号： G01B11/2408 , G01B11/2433
摘要： A shape measurement method for measuring a shape of an object to be measured, which has a substantially rotating symmetric shape, includes: placing an aperture having an opening larger than an outer shape of the object to be measured and the object to be measured on an optical axis; taking an image generated by light projected to the object to be measured, by using an image pickup unit; and calculating one cross-sectional shape of the object to be measured based on a light intensity distribution of the image taken by the image pickup unit.
摘要翻译：用于测量具有大致旋转的对称形状的被测量物体的形状的形状测量方法包括：将具有大于被测量物体的外形的开口和要测量的物体的孔放置在光轴; 通过使用图像拾取单元拍摄由投射到待测量对象的光产生的图像; 并且基于由图像拾取单元拍摄的图像的光强度分布来计算待测量对象的一个横截面形状。

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