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    • 8. 发明公开
    • TRANSPORT SYSTEM
    • 运输系统
    • EP2763161A1
    • 2014-08-06
    • EP12835906.4
    • 2012-09-06
    • Kawasaki Jukogyo Kabushiki Kaisha
    • BANDO, Kenji
    • H01L21/677B65G49/06
    • B65G47/06B65G47/52B65G49/06B65G49/064B65G49/068H01L21/67706H01L21/67736H01L21/67778
    • A conveyance system (1) includes a storage case (12), a lifting/lowering apparatus (13), a handover apparatus (14), and a conveying apparatus (15). The lifting/lowering apparatus (13) lifts and lowers the storage case (12) to position each substrate (11) stored in the storage case (12) to a receiving position sequentially. The handover apparatus (14) receives the substrate (11) at the receiving position, and hand over the substrate (11) to the conveying apparatus (15) at a handover position. The conveying apparatus (15) includes a pair of belts (51, 51). The pair of belts (51, 51) is provided such that the belts are spaced apart from each other in a left-right direction. A plurality of profiles (54) associated with each other are provided on the pair of belts (51, 51), respectively. The profiles (54) associated with each other are configured to move together in a conveying direction, support outer edges of the substrate (11) handed over at the handover position, and position the substrate (11) to a prescribed position.
    • 输送系统(1)包括储存箱(12),升降设备(13),切换设备(14)和输送设备(15)。 提升/降低装置(13)提升和降低存储盒(12),以将存储在存储盒(12)中的每个基板(11)顺序地定位到接收位置。 切换装置(14)在接收位置处接收基板(11),并且在切换位置将基板(11)移交到输送装置(15)。 输送装置(15)包括一对皮带(51,51)。 一对皮带(51,51)设置成使得皮带在左右方向上彼此间隔开。 在一对带(51,51)上分别设置有多个彼此相关的轮廓(54)。 彼此相关联的轮廓(54)被配置为沿传送方向一起移动,支撑在切换位置切换的基底(11)的外边缘,并将基底(11)定位到规定位置。