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    • 2. 发明公开
    • Material evaluation method
    • Materialbewertungsmethode
    • EP0877243A1
    • 1998-11-11
    • EP98108468.4
    • 1998-05-08
    • HORIBA, LTD.Research Institute of Innovative Technology for the Earth
    • Nomura, SatoshiTakamatsu, ShujiNakao, Motoi
    • G01N27/30
    • G01N27/305
    • The present invention relates to a method for evaluating materials, which can evaluate the properties of various materials easily and quickly as well as accurately and reliably even if there exists only a small amount of the material. The method can display for example a pH change as a two-dimensional chemical image. The method for evaluating according to this invention provides a solution or gas (24) in contact with a sensor surface (7) on a semiconductor substrate (5). The material to be evaluated (23) is brought into contact with the solution or gas (24). Said semiconductor substrate (5) is scanned in x and y directions by a laser beam (3) and a resulting photocurrent is detected which represents subtle changes in distribution of substance concentration or property parameters induced in the solution or gas and a two dimensional image thereof is displayed.
    • 本发明涉及一种评价材料的方法,即使只存在少量的材料,也能够容易,快速,准确可靠地评价各种材料的性质。 该方法可以显示例如作为二维化学图像的pH变化。 根据本发明的评估方法提供了与半导体衬底(5)上的传感器表面(7)接触的溶液或气体(24)。 要评估的材料(23)与溶液或气体(24)接触。 所述半导体衬底(5)通过激光束(3)沿x和y方向扫描,并且检测到所得到的光电流,其表示在溶液或气体中诱导的物质浓度或特性参数的分布的微小变化及其二维图像 被展示。