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1. 发明公开

EP1138631A1 MOISTURE GENERATING/SUPPLYING DEVICE AND MOISTURE GENERATING REACTOR 审中-公开
标题翻译： FEUCHTIGKEITSGENERIERENDE / LIEFERNDE VORRICHTUNG UND FEUCHTIGKEITSERZEUGENDER REAKTOR
公开(公告)号：EP1138631A1
公开(公告)日：2001-10-04
申请号：EP00946457.9
申请日：2000-07-21
申请人： Fujikin Incorporated , Ohmi, Tadahiro
发明人： OHMI, Tadahiro , IKEDA, Nobukazu , MINAMI, Yukio , KAWADA, Kouji , KOMEHANA, Katunori , HONIDEN, Teruo , HIRAI, Touru , MORIMOTO, Akihiro , NARIAI, Toshirou , HIRAO, Keiji , TAGUCHI, Masaharu , NAKAMURA, Osamu
IPC分类号： C01B5/00
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.
摘要翻译：一种用于从氢气和氧气产生水蒸气并将高纯度水分提供给诸如半导体生产等过程的安全，减压装置。该装置通过保持催化反应器的内部压力以在较低水平下产生水分而消除气体点燃的可能性，同时在减压下从反应器中提供湿气。散热反应器的改进通过有效冷却反应器经氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

2. 发明公开

EP1267156A1 GAS DETECTION SENSOR 审中-公开
标题翻译： GASDETEKTIONSSENSOR
公开(公告)号：EP1267156A1
公开(公告)日：2002-12-18
申请号：EP00931706.6
申请日：2000-06-05
申请人： Fujikin Incorporated , Ohmi, Tadahiro
发明人： KAWADA, Kouji , IKEDA, Nobukazu , MORIMOTO, Akihiro , MINAMI, Yukio , KOMEHANA, Katunori , HONIDEN, Teruo
IPC分类号： G01N25/32
CPC分类号： G01N25/32 , G01N33/0013
摘要： A gas detection sensor of simplified construction that permits precise measurement of the concentration of flammable gas in the detection gas or subject gas and the concentration of oxygen gas in the detection gas containing flammable gases. The gas detection sensor according to the present invention in which the heating of the sensor by the contact catalytic reaction of flammable gas gives off the detection signal of the flammable gas, and which comprises a first detection sensor which includes a diaphragm having a platinum coat on the side with which the flowing detection gas comes in contact and a thermocouple having the one ends of two different kinds of metals placed close to each other and fixed on the reverse side of the diaphragm not coming in contact with the flowing detection gas and which is heated by the contact catalytic reaction of flammable gas, and a second detection sensor which includes a diaphragm having a surface coming in contact with the flowing detection gas and a thermocouple having the one ends of two different kinds of metals placed close to each other and fixed on the reverse side of the diaphragm not coming in contact with the flowing detection gas and which detects the temperature of the flowing detection gas.
摘要翻译：一种简化结构的气体检测传感器，其允许精确测量检测气体或主体气体中的可燃气体的浓度以及含有易燃气体的检测气体中的氧气浓度。根据本发明的气体检测传感器，其中通过易燃气体的接触催化反应对传感器进行加热，发出可燃气体的检测信号，其包括第一检测传感器，其包括具有铂涂层的隔膜流动的检测气体接触的一侧和具有两个不同种类的金属的一端的热电偶彼此靠近放置并固定在不与流动的检测气体接触的隔膜的反面上，通过可燃性气体的接触催化反应进行加热，以及第二检测传感器，其包括具有与流动检测气体接触的表面的隔膜和具有彼此靠近放置的两种不同种类金属的一端的热电偶，并且固定在隔膜的相反侧不与流动的检测气体接触并检测流量的温度 g检测气体。

3. 发明公开

EP1707858A1 VACUUM HEAT INSULATION VALVE 审中-公开
标题翻译：真空隔热阀
公开(公告)号：EP1707858A1
公开(公告)日：2006-10-04
申请号：EP05703504.0
申请日：2005-01-13
申请人： FUJIKIN INCORPORATED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , MINAMI, Yukio , TUBOTA, Kenji , SHINOHARA, Tsutomu , YAMAJI, Michio , IKEDA, Nobukazu , MORIMOTO, Akihiro , KAWADA, Koji , NARIAI, Toshiro
IPC分类号： F16K51/00
CPC分类号： F16K51/02 , Y10T137/6606 , Y10T137/7043 , Y10T137/7062
摘要： Summary
The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance.
With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S 5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S 4 , which is hermetically fitted to the lower vacuum jacket S 5 and with its lower face made open.
摘要翻译：发明内容本发明提供一种真空热绝缘阀，其可以在气体供应系统或排气系统中在高温下使用，并且由于其优异的绝热性能，其尺寸可以做得基本上小而紧凑。上述真空保温箱S由具有配备有阀体和致动器的阀以及容纳该阀的真空保温箱的真空保温箱S由方形的下部真空保护套S5形成，一侧为圆柱形的真空保温管接收部分J，其上表面敞开;以及方形的上部真空套S4，其密封地装配在下部真空套S5上并且其下表面敞开。

4. 发明公开

EP1691340A1 THIN FILM TRANSISTOR INTEGRATED CIRCUIT DEVICE, ACTIVE MATRIX DISPLAY DEVICE, AND MANUFACTURING METHOD OF THE SAME 审中-公开
标题翻译： INTEGRIERTEDÜNNFILMTRANSISTOR-SCHALTUNGSEINRICHTUNG，AKTIVMATRIX-DISPLAY-EINRICHTUNG UND HERSTELLUNGSVERFAHRENDAFÜR
公开(公告)号：EP1691340A1
公开(公告)日：2006-08-16
申请号：EP04820127.1
申请日：2004-11-26
申请人： OHMI, Tadahiro , ZEON CORPORATION
发明人： OHMI, Tadahiro , MORIMOTO, Akihiro , SUZUKI, Teruhiko, Zeon Corporation , KATO, Takeyoshi, Zeon Corporation
IPC分类号： G09F9/30 , G02F1/1368 , H01L29/786 , H01L21/3205 , H05B33/14
CPC分类号： G02F1/1368 , G02F2001/133357 , H01L27/12 , H01L27/124 , H01L27/1248 , H01L27/1285 , H01L27/1292 , H01L29/41733 , H01L29/66742 , H01L29/78636
摘要： There is provided an active matrix display device including a flattening layer formed so as to surround a source electrode wiring, a drain electrode wiring, and a signal line, so that the source electrode wiring, the drain electrode wiring, and the signal line form substantially the same surface with the flattening layer.
摘要翻译：提供了一种有源矩阵显示装置，包括形成为围绕源极电极布线，漏极布线和信号线的平坦化层，使得源极电极布线，漏极布线和信号线基本形成与平整层相同的表面。

5. 发明公开

EP1651018A1 SUBSTRATE AND PROCESS FOR PRODUCING THE SAME 审中-公开
标题翻译： SUBSTRAT UND PROZESS ZU SEINER HERSTELLUNG
公开(公告)号：EP1651018A1
公开(公告)日：2006-04-26
申请号：EP04735653.0
申请日：2004-06-01
申请人： OHMI, Tadahiro , ZEON CORPORATION
发明人： OHMI, Tadahiro , MORIMOTO, Akihiro , SUZUKI, Teruhiko, c/o Zeon Corporation , KATO, Takeyoshi, c/o Zeon Corporation
IPC分类号： H05K3/10 , G09F9/30
CPC分类号： H05K3/107 , H05K3/0023 , H05K3/143 , H05K2201/0108
摘要： A photosensitive transparent resin film, provided selectively with a groove reaching a transparent substrate is formed on the transparent substrate, and a wiring portion is provided in the groove substantially in flush with the photosensitive transparent resin film. The wiring portion can be formed quickly while controlling the thickness easily by preprocessing the surface of the photosensitive transparent resin film or the bottom face of the groove before the wiring portion is set in the groove.
摘要翻译：选择性地设置到达透明基板的槽的光敏透明树脂膜形成在透明基板上，并且布线部分设置在基本上与感光透明树脂膜齐平的槽中。在将布线部分设置在槽中之前，可以通过预处理感光性透明树脂膜的表面或槽的底面来容易地控制厚度，同时可以快速形成布线部分。

6. 发明公开

EP0922667A1 METHOD FOR GENERATING WATER FOR SEMICONDUCTOR PRODUCTION 失效
标题翻译： VERFAHREN ZUR ERZEUGUNG VON WASSERFÜRDIE HALBLEITERHERSTELLUNG
公开(公告)号：EP0922667A1
公开(公告)日：1999-06-16
申请号：EP98924654.1
申请日：1998-06-12
申请人： FUJIKIN Inc. , OHMI, Tadahiro
发明人： OHMI, Tadahiro , MINAMI, Yukio , KAWADA, Koji , TANABE, Yoshikazu , IKEDA, Nobukazu , MORIMOTO, Akihiro
IPC分类号： C01B5/00
CPC分类号： C01B5/00
摘要： Process for generating moisture for use in semiconductor manufacturing, the process comprising feeding hydrogen and oxygen into a reactor provided with a platinum-coated catalyst layer on an interior wall, thus enhancing the reactivity between hydrogen and oxygen by catalytic action and instantaneously reacting the reactivity-enhanced hydrogen and oxygen at a temperature below the ignition point to produce moisture without undergoing combustion at a high temperature, wherein the amount of unreacted hydrogen occurring in the generated moisture in starting up or terminating the moisture generating reaction is minimized and wherein undesired reactions such as undesired silicon oxide film coating are avoided. When the generation of moisture is started up by feeding hydrogen and oxygen into the reactor provided with a platinum-coated catalyst layer on the inside wall thereof, oxygen first starts to be fed and, some time after that, the supply of hydrogen is begun. In terminating the moisture generating operation by cutting off the supply of hydrogen and oxygen into the reactor, the feeding of hydrogen is first stopped and, some time after that, the supply of oxygen is shut off.
摘要翻译：用于产生用于半导体制造中的湿气的方法，该方法包括将氢和氧进料到在内壁上设置有铂涂覆的催化剂层的反应器中，从而通过催化作用增强氢和氧之间的反应性，并使反应性 - 在低于点火点的温度下增强氢气和氧气，以产生水分，而不会在高温下经历燃烧，其中在产生水分的反应中启动或终止发生的水分中发生的未反应的氢气的量最小化，并且其中不期望的反应如避免了不需要的氧化硅膜涂层。当通过在其内壁上提供有铂包覆的催化剂层的反应器中加入氢气和氧气来启动水分的产生时，首先开始供给氧气，然后一段时间开始供应氢气。在通过切断氢气和氧气进入反应器来终止湿气产生操作时，首先停止氢的供给，一段时间后，关闭氧气供应。

7. 发明公开

EP1603190A1 ANTENNA FOR PORTABLE TERMINAL AND PORTABLE TERMINAL USING SAME 审中-公开
标题翻译：天线FÜREIN TRAGBARESENDGERÄTUND TRAGBARESENDGERÄTDAMIT
公开(公告)号：EP1603190A1
公开(公告)日：2005-12-07
申请号：EP04711696.7
申请日：2004-02-17
申请人： OHMI, Tadahiro
发明人： OHMI, Tadahiro , MORIMOTO, Akihiro , NAKAMURA, Fumiaki
IPC分类号： H01Q1/38
CPC分类号： H01Q9/0485
摘要： A dielectric resonator antenna which emits an electric wave by having a dielectric body resonate is disclosed. A magnetic material is contained in the electric body, thereby increasing the relative permeability to more than 1 and lowering the relative permittivity. Consequently, the Q-value of the resonance can be lowered while maintaining the rate of wavelength shortening. With this technique, a broadband dielectric resonator antenna can be realized.
摘要翻译：公开了一种通过使电介质体谐振而发射电波的介质谐振器天线。磁性材料被包含在电体中，从而将相对磁导率提高到大于1并降低相对介电常数。因此，可以在保持波长缩短率的同时降低谐振的Q值。利用这种技术，可以实现宽带介质谐振器天线。

8. 发明公开

EP0878443A1 METHOD FOR GENERATING MOISTURE, REACTOR FOR GENERATING MOISTURE, METHOD FOR CONTROLLING TEMPERATURE OF REACTOR FOR GENERATING MOISTURE, AND METHOD FOR FORMING PLATINUM-COATED CATALYST LAYER 失效
标题翻译：用于生产防潮，反应器水分生产，一种用于控制反应器的水分发生和方法的温度用于生产具有铂催化剂层的涂布
公开(公告)号：EP0878443A1
公开(公告)日：1998-11-18
申请号：EP97901265.5
申请日：1997-01-27
申请人： FUJIKIN Inc. , Hitachi, Ltd. , OHMI, Tadahiro
发明人： OHMI, Tadahiro , KAWADA, Koji , TANABE, Yoshikazu, Kabushiki-Kaisha Hitachi , NITTA, Takahisa, Kabushiki-Kaisha Hitachi , IKEDA, Nobukazu , MORIMOTO, Akihiro , HIRAO, Keiji , MOROKOSHI, Hiroshi , MINAMI, Yukio
IPC分类号： C01B5/00
CPC分类号： C01B5/00
摘要： The invention further reduces a size and cost of a reactor for generating water from oxygen and hydrogen, provides high-purity water in an amount necessary for practical use safely, stably and continuously, and allows a platinum-coated catalyst layer formed on an inner wall of a reactor body to maintain high catalytic activity over a long period of time. Specifically, the reactor comprises a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, has a gas-diffusing member provided in an internal space of the body, and has a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed from the inlet is diffused by the gas-diffusing member and then comes into contact with the platinum coating to enhance reactivity, thereby producing water from hydrogen and oxygen. A temperature of the reactor for generating moisture, wherein hydrogen is reacted with oxygen at a high temperature to generate moisture, is held to be below an ignition temperature of hydrogen or a hydrogen-containing gas so that hydrogen is reacted with oxygen while preventing explosive combustion of hydrogen and oxygen. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or nitride on the wall surface, and forming the platinum coating on the barrier coating.
摘要翻译：本发明进一步减小了尺寸和用于产生由氧气和氢气水的反应器的成本，提供了高纯度的水到所需量实际使用安全，稳定地和连续地，并允许形成在到内壁上的镀铂催化剂层反应器主体的在一段长时间内保持高的催化活性。具体地，该反应器包括一个由耐热材料制成，并在入口和出口，用于水/水分气体具有主体，具有气体扩散构件在所述主体的内部空间中设置于，并且具有铂在内部涂覆上主体的壁面上。氢气和氧气从所述入口供给由气体扩散构件扩散，然后与铂涂层接触，以提高反应性，从而由氢气和氧气产生水。该反应器用于产生湿气，worin氢的温度在高温下与氧反应生成的水分，被保持为低于氢或含氢气体，从而也氢进行反应与氧气的燃点温度，同时防止爆炸燃烧的氢气和氧气。在反应器主体的内壁涂覆铂的催化剂层通过处理所述体的内壁的表面上，清洗处理过的表面，在壁表面上形成的氧化物或氮化物的非金属材料构成的阻挡涂布形成，以及形成在该阻挡涂层的铂涂层。

9. 发明授权

EP0922667B1 METHOD FOR GENERATING WATER FOR SEMICONDUCTOR PRODUCTION 失效
标题翻译：用于生产水半导体制造
公开(公告)号：EP0922667B1
公开(公告)日：2004-08-25
申请号：EP98924654.1
申请日：1998-06-12
申请人： FUJIKIN Inc. , Ohmi, Tadahiro
发明人： OHMI, Tadahiro , MINAMI, Yukio , KAWADA, Koji , TANABE, Yoshikazu , IKEDA, Nobukazu , MORIMOTO, Akihiro
IPC分类号： C01B5/00
CPC分类号： C01B5/00
摘要： A method of generating water for use in semiconductor production which comprises feeding hydrogen and oxygen into a reactor body whose inner wall surface has a platinum coating to heighten the reactivity of the hydrogen and oxygen by the catalytic action of the platinum and instantaneously react the resultant hydrogen and oxygen with each other at a temperature lower than the ignition temperature of the hydrogen-containing mixed gas to thereby generate water without conducting high-temperature combustion, wherein the amount of unreacted hydrogen remaining in the generated water when the reactor for water generation is started and stopped is reduced to thereby enhance the safety of the apparatus for semiconductor production and prevent the inhibition of, e.g., silicon oxide film deposition by the water oxidation method. Specifically, in generating water by feeding hydrogen and oxygen into a reactor body whose inner wall surface has a platinum coating, the feeding of oxygen is initiated first and hydrogen feeding is initiated slightly thereafter. In stopping the water generation by stopping the feeding of hydrogen and oxygen into the reactor body, the feeding of hydrogen is stopped first and oxygen feeding is stopped slightly thereafter.

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