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1. 发明授权

EP1593888B1 VALVE FOR VACUUM DISCHARGE SYSTEM 有权
标题翻译：阀用于真空排放系统
公开(公告)号：EP1593888B1
公开(公告)日：2007-04-11
申请号：EP04709363.8
申请日：2004-02-09
申请人： FUJIKIN INCORPORATED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , IKEDA, Nobukazu, c/o Fujikin Incorporated , YAMAJI, Michio, c/o Fujikin Incorporated , KITANO, Masafumi, c/o Fujikin Incorporated , MORIMOTO, Akihiro, c/o Fujikin Incorporated
IPC分类号： F16K7/12 , F16K27/00 , F16K51/02
CPC分类号： F16K7/14 , F16K27/003 , F16K51/02
摘要： A valve in accordance with the reduction in diameter of piping in a vacuum discharge system, the reduction realizing downsizing of apparatuses for a vacuum discharge system and resultant reduced costs and shortened time for vacuum discharge. In the valve, inside corrosion, clogging, seat leakage, etc. by accumulation of dissociated products produced by decomposition of gas can be prevented from occurring. Specifically, passive aluminum is used for piping components, such as the valve, adapted for a vacuum discharge system so as to control decomposition of gas caused by rise in temperature during baking, so that components suitable for the reduction in diameter sizes in the vacuum discharge system are provided. Corrosion, clogging, seat leakage, etc. caused by decomposition of gas are prevented from occurring.

2. 发明公开

EP1707857A1 METHOD FOR WATER HAMMER-LESS OPENING OF FLUID PASSAGE, CHEMICAL SUPPLY METHOD USING THE SAME, AND WATER HAMMER-LESS OPENING DEVICE 审中-公开
标题翻译：程序对水PUNCH免费开放供流体通过本所使用的化学电源的方法和装置与水PUNCH免费开通
公开(公告)号：EP1707857A1
公开(公告)日：2006-10-04
申请号：EP05703503.2
申请日：2005-01-13
申请人： FUJIKIN INCORPORATED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , NISHINO, Kouji , NAGASE, Masaaki , DOHI, Ryousuke , IKEDA, Nobukazu , NISHIMURA, Ryutaro
IPC分类号： F16K47/00
CPC分类号： F16K47/02 , Y10T137/0324 , Y10T137/0396 , Y10T137/7761 , Y10T137/7762 , Y10T137/7842 , Y10T137/86389 , Y10T137/86397 , Y10T137/86461
摘要： It is so made that a fluid passage can be abruptly opened with a very simple device and operations and also in a short period of time without causing a water hammer.
The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps' of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa of the step operating pressure Ps', which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.
摘要翻译：就这样制成没有流体通道可以突然在很短的时间周期非常简单的装置和操作，从而被打开，而不会引起水击。安装在流体通路的致动器操作型阀的无水击打开装置包括，向电 - 气变换装置供给的2步进致动器动作压力Pa到前述致动器动作式阀，振动传感器可移除地固定到所述在致动器操作式阀的上游侧管路，和调谐框进行由振动传感器检测到的振动检测信号Pr被输入时，通过该控制信号Sc来控制afore-的步骤操作压力Ps' 提到的两步致动器动作压力Pa的输出到电 - 气变换装置，以及与该两步骤致动器动作压力的步骤操作压力Ps'，这使得振动检测信号Pr大致为零的Pa时，在从输出通过调整控制信号Sc的电 - 气动转换。

3. 发明公开

EP1637859A1 AUTOMATIC ZERO POINT-CORRECTING DEVICE FOR PRESSURE SENSOR, PRESSURE CONTROLLER, AND PRESSURE-TYPE FLOW RATE CONTROLLER 审中-公开
标题翻译：自动零点校正装置用于压力传感器，压力控制和流量控制压式
公开(公告)号：EP1637859A1
公开(公告)日：2006-03-22
申请号：EP04745748.6
申请日：2004-06-10
申请人： FUJIKIN INCORPORATED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , SUGIYAMA, Kazuhiko c/o Tokyo Electron Ltd. , HINO, Shoichi c/o Tokyo Electron Ltd. , TAKAHASHI, Eiji c/o Tokyo Electron Ltd. , SAEGUSA, Makoto c/o Tokyo Electron Ltd. , IKEDA, Nobukazu c/o Fujikin Incorporated , NISHINO, Kouji c/o Fujikin Incorporated , DOHI, Ryousuke c/o Fujikin Incorporated , UENOYAMA, Toyomi c/o Fujikin Incorporated , SUGITA, Katsuyuki c/o Fujikin Incorporated
IPC分类号： G01L19/02 , G01L19/04
CPC分类号： G01L19/02 , G01L9/065 , G01L19/0023 , G05D7/0635
摘要： The present invention is to provide a pressure sensor to make it possible to detect pressure accurately regardless of its service period by automatically correcting the time-varying zero drift of the pressure sensor, and also a pressure control device and a flow rate control device wherein the pressure sensor is employed.
Concretely, with the pressure sensor, for which a semiconductor pressure sensitive element is used, to measure fluid pressure, the output voltage from the pressure sensor is outputted to the outside through the amplifier, the afore-mentioned sensor output voltage is inputted to the time-varying zero point drift correction means through the D/A converter, a judgment is made to determine if the afore-mentioned sensor output voltage is larger than the set value at the sensor output judgment means of the said time-varying zero point drift correction means, and further the operating conditions of the pressure sensor are judged at the operating condition judgment means of the afore-mentioned time-varying zero point drift correction means, and the time-varying zero point drift of the pressure sensor is cancelled by inputting the voltage for the zero point correction, which is identical to the afore-mentioned sensor output voltage and with reversed polarity, to the offset terminal of the afore-mentioned amplifier through the D/A converter when it is found that the afore-mentioned sensor output voltage is larger than the set value and the operating conditions of the pressure sensor are under the operating conditions previously set.
摘要翻译：本发明是提供一种压力传感器，以使得能够检测压力精确地自动校正压力传感器的随时间变化的零点漂移设置无论其服务周期的，并且因此，压力控制装置和worin的一个流量控制装置压力传感器被使用。具体地，与压力传感器，用于将半导体压力敏感元件使用，来测量流体压力，从压力传感器的输出电压的经放大器输出到外部，前述传感器的输出电压被输入到时间 -varying零点漂移校正通过D / A转换器装置中，判断到确定性矿制成如果前述传感器的输出电压低于在传感器输出判定所述时间变化的零点漂移校正的装置中的设定值大装置，以及进一步的压力传感器的操作条件在的操作条件判断装置被判断前述随时间变化的零点漂移校正装置，和压力传感器的随时间变化的零点漂移通过输入取消电压为零点修正，所有其等同于前述传感器的输出电压，并用相反极性，以前述的偏移终端通过D / A转换器当发现-mentioned放大器，DASS死前述传感器的输出电压低于所述设定值和所述压力传感器的操作条件预先设定的操作条件下大。

4. 发明授权

EP1026566B1 VERSATILE FLOW RATE CONTROLLER 有权
标题翻译：柔性流动调节器
公开(公告)号：EP1026566B1
公开(公告)日：2005-10-26
申请号：EP99935121.6
申请日：1999-08-09
申请人： FUJIKIN INCORPORATED , TOKYO ELECTRON LIMITED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. , HIROSE, Jun, Tokyo Electron Yamanashi Ltd. , NISHINO, Kouji, Fujikin Incorporated
IPC分类号： G05D7/06
CPC分类号： G05D7/0658 , G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A versatile flow rate controller comprises an orifice (8) exchangeable depending on the required opening for a different fluid and a different flow rate range, a control valve (2) on the upstream side, a pressure detector (6) between the control valve (2) and the orifice (8), an arithmetic circuit (14) for calculating a flow rate as Qc=KP1 (K is a constant) from an upstream pressure P1 detected by the detector (6); an output circuit (16) for providing a flow-setting signal Qe, a converter circuit (18) for producing a flow rate signal Qf (Qf=kQc) by multiplying the calculated flow rate signal Qc by a factor k to change the full-scale flow rate, and a control circuit (20) for supplying a driver section (4) of the control valve (2) with a control signal Qy corresponding to the difference between the Qf and Qe.

5. 发明公开

EP1126260A1 PRESSURE DETECTOR MOUNTING STRUCTURE 审中-公开
标题翻译： BEFESTIGUNGSANORDNUNG EINES DRUCKSENSOR
公开(公告)号：EP1126260A1
公开(公告)日：2001-08-22
申请号：EP00949991.4
申请日：2000-08-03
申请人： Fujikin Incorporated , TOKYO ELECTRON LIMITED , Ohmi, Tadahiro
发明人： OHMI, Tadahiro , HIROSE, Takashi, Fujikin Incorporated , IDETA, Eiji, Fujikin Incorporated , IKEDA, Nobukazu, Fujikin Incorporated , DOHI, Ryousuke, Fujikin Incorporated , NISHINO, Kouji, Fujikin Incorporated , YOSHIKAWA, Kazuhiro, Fujikin Incorporated , KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. , HIROSE, Jun, Tokyo Electron Yamanashi Ltd. , FUKASAWA, Kazuo, Tokyo Electron Yamanashi Ltd. , KOIZUMI, Hiroshi, Tokyo Electron Yamanashi Ltd. , NAGAOKA, Hideki, Tokyo Electron Yamanashi Ltd.
IPC分类号： G01L19/00 , G01L7/08
CPC分类号： G01L19/0023 , G01L19/0645 , G01L19/145 , G01L19/147
摘要： A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics of the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is airtightly pressed and fastened by a presser member inserted from above in the mounting hole. The presser member is brought in contact with a block upper surface of the diaphragm base, and the gasket is also brought in contact with the block lower surface of the diaphragm base. A shallow groove is defined in the form of a ring on the lower surface of the block at a place inward of the portion contacting the metal gasket so that the shallow groove absorbs strain caused by the presser member.
摘要翻译：用于安装压力检测器的结构防止了检测器膜片被施加到压力检测器上的应力而被应变，因为检测器安装在设置在管线等中的夹具主体中，从而保持了输出特性和温度特性检测器在安装前后有很大差异。压力检测器通过将具有隔膜的隔膜基座和具有传感器元件的传感器基座组合并紧固在一起而构成，该传感器基座通过隔膜基座的位移而被激活。压力检测器，其上放置有垫圈，设置在安装在管道中的固定器主体的安装孔中。压力检测器通过从安装孔中从上方插入的压紧构件气密地按压并紧固。压板构件与隔膜基座的块上表面接触，并且垫圈也与隔膜基座的块下表面接触。在与金属垫片接触的部分的内侧的位置处，在块的下表面上以环的形式形成浅槽，使得浅槽吸收由压紧构件引起的应变。

6. 发明公开

EP1026566A1 VERSATILE FLOW RATE CONTROLLER 有权
标题翻译：柔性纤维素
公开(公告)号：EP1026566A1
公开(公告)日：2000-08-09
申请号：EP99935121.6
申请日：1999-08-09
申请人： Fujikin Incorporated , TOKYO ELECTRON LIMITED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. , HIROSE, Jun, Tokyo Electron Yamanashi Ltd. , NISHINO, Kouji, Fujikin Incorporated
IPC分类号： G05D7/06
CPC分类号： G05D7/0658 , G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A fluid-switchable flow rate control system that permits free changing of the full scale flow rate and which can control a plurality of kinds of fluids with high precision.
The fluid-switchable flow rate control system controls the flow rate of fluid with the pressure P 1 on the upstream side of the orifice member held about twice or more higher than the downstream pressure P 2 , the fluid-switchable flow rate control system comprising an orifice member 8 replaceable with another to provide a suitable orifice diameter according to the kind of fluid and the flow rate range, a control valve 2 provided on the upstream side thereof, a pressure detector 6 provided between the control valve 2 and the orifice member 8, and a flow rate calculation circuit 14 where, from the pressure P 1 detected by the pressure detector, the flow rate Qc is calculated by the equation Qc = KP 1 (K: constant), a flow rate-setting circuit 16 for outputting flow rate setting signal Qe, a flow rate conversion circuit 18 for multiplying the calculated flow rate signal Qc by the flow rate conversion rate k into switch-over calculated flow rate signal Qf ( Qf = kQc ) to change the full scale flow rate, and a calculation control circuit 20 to output the difference between the switch-over calculation flow rate signal Qf and the flow rate setting signal Qe as control signal Qy to the drive 4 of the control valve 2, thereby opening or closing the control valve to bring the control signal Qy to zero, thus controlling the flow rate on the downstream side of the orifice member.
摘要翻译：一种可流体切换的流量控制系统，其允许满量程流量的自由变化并且可以高精度地控制多种流体。流体切换流量控制系统控制流体的流量，其中孔口部件的上游侧的压力P1保持在比下游压力P2大约两倍或更多的高度，流体可切换流量控制系统包括孔口部件 8可替换为另一个，以根据流体种类和流量范围提供合适的孔径，设置在其上游侧的控制阀2，设置在控制阀2和孔口构件8之间的压力检测器6，以及流量计算电路14，其中根据由压力检测器检测到的压力P1通过公式Qc = KP1（K：常数）计算流量Qc;流量设定电路16，用于输出流量设定信号Qe ，用于将计算出的流量信号Qc乘以流量转换率k的流量转换电路18转换为切换计算流量信号Qf（Qf = kQc），以改变满量程fl 以及将切换计算流量信号Qf和流量设定信号Qe之间的差作为控制信号Qy输出到控制阀2的驱动器4的计算控制电路20，由此打开或关闭控制使控制信号Qy为零，从而控制孔构件下游侧的流量。

7. 发明授权

EP1486714B1 FLUID COUPLING 有权
标题翻译：流量离合器
公开(公告)号：EP1486714B1
公开(公告)日：2008-08-27
申请号：EP02705285.1
申请日：2002-03-18
申请人： Fujikin Incorporated , Ohmi, Tadahiro
发明人： OHMI, Tadahiro , YAMAJI, Michio Fujikin Incorporated , NOJIMA, Shinya Fujikin Incorporated , KATSUMI, Yukito Fujikin Incorporated , SHINOHARA, Tsutomu Fujikin Incorporated
IPC分类号： F16L19/00 , F16J15/10
CPC分类号： F16J15/02 , F16J15/062 , F16J15/104 , F16L19/00 , F16L19/0212 , F16L19/0218 , F16L25/0018 , F16L27/082 , F16L27/0828 , Y10S277/925 , Y10S285/917
摘要： At the abutting end faces of coupling members (1, 2), annular recesses (3, 4) having annular protrusions (5, 6) on the bottom face are provided while surrounding fluid channels (1a, 2a). A gasket (10) comprises a seal part (11) interposed between the protrusions (5, 6) of the coupling members (1, 2) while having an outside diameter smaller than the diameter of the annular recesses (3, 4), and a guide part (12) disposed on the outside of the seal part (11) while having an outside diameter being fitted in the annular recesses (3, 4). When the coupling members (1, 2) are fastened properly, the end faces thereof abut each other. An annular groove (14) is made in the outer circumference of the seal part (11) and a snap ring (13) fitted in the annular groove (14) couples the seal part (11) and the guide part (12).

8. 发明授权

EP1126347B1 METHOD FOR DETECTING ABNORMAL FLOW RATE FOR PRESSURE FLOW RATE CONTROLLER 有权
标题翻译：检测方法的异常流量在流量控制的加压流体
公开(公告)号：EP1126347B1
公开(公告)日：2007-09-12
申请号：EP00948265.4
申请日：2000-07-27
申请人： TOKYO ELECTRON LIMITED , FUJIKIN INCORPORATED , Ohmi, Tadahiro , Iida, Seiichi
发明人： OHMI, Tadahiro , IIDA, Seiichi , KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. , HIROSE, Jun, Tokyo Electron Yamanashi Ltd. , FUKASAWA, Kazuo, Tokyo Electron Yamanashi Ltd. , KOIZUMI, Hiroshi, Tokyo Electron Yamanashi Ltd. , NAGAOKA, Hideki, Tokyo Electron Yamanashi Ltd. , UNO, Tomio, Fujikin Incorporated , NISHINO, Kouji, Fujikin Incorporated , IKEDA, Nobukazu, Fujikin Incorporated , DOHI, Ryousuke, Fujikin Incorporated , IDETA, Eiji, Fujikin Incorporated
IPC分类号： G05B23/02 , F16K17/22 , G05D7/06 , G01D21/00
CPC分类号： G05B23/0235 , G05B23/0256 , G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/8326
摘要： A method for detecting abnormal flow rate by easily detecting an obstruction of an orifice while a fluid pressure flow rate controller using an orifice is controlling the flow rate. The method uses a flow rate controller (FCS) so as to calculate the flow rate Qc on the downstream side when the upstream-side pressure P1 is maintained at a value about twice or more the downstream-side pressure P2 from Qc=KP1 (K: constant) and to control the operation of a control valve (CV) according to a signal Qy representing the difference between the calculated flow rate Qc and a preset flow rate Qs. A testing circuit or flow rate setting circuit provided separately outputs a testing signal ΔQs having a testing amplitude V0 to the control valve (CV). The pressure amplitude V of a pressure variation ΔP1 of the upstream-side pressure P1 occurring in response to the opening/closing of the control valve (CV) is measured. When the pressure amplitude V decreases below a limit amplitude Vt, the obstruction of the orifice is announced, thus implementing the method. If the testing signal ΔQs is superimposed on a steady-state preset flow rate signal Qs0 and outputted together from the testing circuit or the flow rate setting circuit to the control valve (CV), an abnormal flow rate can be detected while controlling the flow rate by using the steady-state preset flow rate signal Qs0.

9. 发明公开

EP1707858A1 VACUUM HEAT INSULATION VALVE 审中-公开
标题翻译：真空隔热阀
公开(公告)号：EP1707858A1
公开(公告)日：2006-10-04
申请号：EP05703504.0
申请日：2005-01-13
申请人： FUJIKIN INCORPORATED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , MINAMI, Yukio , TUBOTA, Kenji , SHINOHARA, Tsutomu , YAMAJI, Michio , IKEDA, Nobukazu , MORIMOTO, Akihiro , KAWADA, Koji , NARIAI, Toshiro
IPC分类号： F16K51/00
CPC分类号： F16K51/02 , Y10T137/6606 , Y10T137/7043 , Y10T137/7062
摘要： Summary
The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance.
With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S 5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S 4 , which is hermetically fitted to the lower vacuum jacket S 5 and with its lower face made open.
摘要翻译：发明内容本发明提供一种真空热绝缘阀，其可以在气体供应系统或排气系统中在高温下使用，并且由于其优异的绝热性能，其尺寸可以做得基本上小而紧凑。上述真空保温箱S由具有配备有阀体和致动器的阀以及容纳该阀的真空保温箱的真空保温箱S由方形的下部真空保护套S5形成，一侧为圆柱形的真空保温管接收部分J，其上表面敞开;以及方形的上部真空套S4，其密封地装配在下部真空套S5上并且其下表面敞开。

10. 发明授权

EP1300619B1 ORIFICE-BUILT-IN VALVE 有权
标题翻译：阀，内置集成开幕
公开(公告)号：EP1300619B1
公开(公告)日：2006-08-02
申请号：EP00935552.0
申请日：2000-06-05
申请人： FUJIKIN INCORPORATED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , NISHINO, Kouji Fujikin Incorporated , IKEDA, Nobukazu Fujikin Incorporated , YAMAJI, Michio Fujikin Incorporated , DOHI, Ryousuke Fujikin Incorporated , IDETA, Eiji Fujikin Incorporated , HIROSE, Takashi Fujikin Incorporated
IPC分类号： F16K47/08
CPC分类号： F16K25/005 , F16K7/14 , F16K7/16 , F16K27/00 , H04W4/90 , H04W48/12 , H04W74/006 , H04W74/0833 , H04W76/50
摘要： It is an object of the present invention to provide at low costs a valve with an integral orifice for use in a gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. To realize the objects of the present invention, the main part of the valve with an integral orifice comprises a valve main body made of heat-resisting materials having a gas inflow passage in communication with a valve chamber with an upper open end and a gas outflow passage, a synthetic resin made valve seat body formed in the valve chamber and having a gas outflow passage in communication with the gas outflow passage of the aforementioned valve main body and a valve seat, an orifice disc made of heat-resisting materials removably installed in the gas outflow passage of the valve seat body, and an orifice formed in the orifice disc to reduce the gas outflow passage of the valve seat body; wherein the orifice is formed in the stainless steel made orifice disc in advance and the metal made orifice disc with the orifice formed by a separate processing and the synthetic resin made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via the metal inner disc.

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