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1. 发明授权

EP2511935B1 Aberration-corrected wien ExB mass filter with removal of neutrals from the beam 有权
标题翻译：从光束去除中性粒子的像差校正维恩ExB滤质器
公开(公告)号：EP2511935B1
公开(公告)日：2015-06-03
申请号：EP12164205.2
申请日：2012-04-16
申请人： FEI Company
发明人： Tuggle, David , Parker, N. William , Utlaut, Mark
IPC分类号： H01J37/05
CPC分类号： H01J37/05 , H01J37/317 , H01J2237/053 , H01J2237/055 , H01J2237/057 , H01J2237/31749

2. 发明授权

EP2482061B1 System and method for localization of large numbers of fluorescent markers in biological samples 有权
标题翻译：系统和方法，用于定位在生物样品中的大量荧光标记的
公开(公告)号：EP2482061B1
公开(公告)日：2016-05-11
申请号：EP12152791.5
申请日：2012-01-27
申请人： FEI Company
发明人： Parker, N. William , Utlaut, Mark
IPC分类号： G01N23/225 , H01J37/28 , H01J37/22 , G01N21/64
CPC分类号： G01N21/6428 , G01N21/6458 , G01N21/6486 , G01N23/225 , H01J37/228 , H01J37/28 , H01J37/285 , H01J2237/206 , H01J2237/2443 , H01J2237/24455 , H01J2237/2448 , H01J2237/2803 , H01J2237/2857

3. 发明公开

EP3002775A1 CHICANE BLANKER ASSEMBLIES FOR CHARGED PARTICLE BEAM SYSTEMS AND METHODS OF USING THE SAME 审中-公开
标题翻译： SCHIKANENAUSTASTERANORDNUNG货物的承载梁系统和及其使用方法
公开(公告)号：EP3002775A1
公开(公告)日：2016-04-06
申请号：EP15150310.9
申请日：2015-01-07
申请人： FEI COMPANY
发明人： Kagarice, Kevin , Otis, Charles , Parker, N. William
IPC分类号： H01J37/04 , H01J37/05
CPC分类号： H01J37/045 , H01J37/05 , H01J2237/004 , H01J2237/028 , H01J2237/057 , H01J2237/15 , H01J2237/28 , H01J2237/31745 , H01J2237/31749 , H01J2237/32
摘要： A chicane blanker assembly for a charged particle beam system includes an entrance and an exit, at least one neutrals blocking structure, a plurality of chicane deflectors, a beam blanking deflector (620), and a beam blocking structure. The entrance is configured to accept a beam of charged particles propagating along an axis. The at least one neutrals blocking structure intersects the axis. The plurality of chicane deflectors includes a first chicane deflector (610), a second chicane deflector, a third chicane deflector, and a fourth chicane deflector sequentially arranged in series between the entrance and the exit and configured to deflect the beam along a path that bypasses the neutrals blocking structure and exits the chicane blanker assembly through the exit. In embodiments, the chicane blanker assembly includes a two neutrals blocking structures. In embodiments, the beam blocking structure is arranged between the third chicane deflector and the fourth chicane deflector.
摘要翻译：用于带电粒子束系统中的急弯裸露组件包括在入口和出口处，所述至少一个中性阻挡结构，急弯偏转复数，一个光束消隐偏转器（620），和一个光束阻挡结构。入口被配置为接受沿轴传播的带电粒子的束。所述至少一个中性阻挡结构相交的轴线。急弯偏转器的多元性包括第一急弯偏转器（610），第二急弯偏转器，第三急弯偏转器，并在入口和出口之间并配置串联布置的第四急弯偏转器按顺序沿着路径做旁路到光束偏转中性粒子阻挡结构并通过出口离开弯道裸组件。在实施例中，急弯裸组件包括一个两个中性阻挡结构。在实施例中，束阻挡结构在第三急弯偏转器和所述第四急弯偏转器之间布置。

4. 发明公开

EP2975630A1 ELECTROSTATIC LENS TRANSMISSIVE FOR EMISSIONS FROM A SAMPLE 审中-公开
标题翻译： ELEKTROSTATISCHE LINSEDURCHLÄSSIGFÜRVON EINER PROBE KOMMENDE EMISSIONEN
公开(公告)号：EP2975630A1
公开(公告)日：2016-01-20
申请号：EP15174497.6
申请日：2015-06-30
申请人： FEI Company
发明人： Parker, N. William , Straw, Marcus , Filevich, Jorge
IPC分类号： H01J37/12 , H01J37/244 , H01J37/26
CPC分类号： H01J37/12 , H01J37/244 , H01J37/26 , H01J37/261 , H01J2237/12 , H01J2237/24415 , H01J2237/2445 , H01J2237/2602
摘要： A transmissive electrostatic lens in a charged particle beam column for detecting X-rays and light is provided. The final lens may include focusing elements (102) that are transmissive for X-rays for EDS imaging and analysis or elements that are transmissive for light for cathodoluminescent (CL) imaging and analysis. The final lens may be constructed and arranged to include elements that are transmissive for both X-rays and light for combined EDS and CL imaging and analysis. A detector (116, 118) is arranged to detect such radiation emanating from the sample and transmitted through the lens.
摘要翻译：提供了用于检测X射线和光的带电粒子束列中的透射型静电透镜。最终透镜可以包括对于用于EDS成像和分析的X射线透射的聚焦元件（102）或对于用于阴极发光（CL）成像和分析的光透射的元件。最终的透镜可以被构造和布置成包括用于X射线和光的透射的元件用于组合的EDS和CL成像和分析。检测器（116,118）被布置成检测从样品发射并透过透镜的这种辐射。

5. 发明授权

EP2546863B1 Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (IPC) ion source 有权
标题翻译：方法和在感应耦合Plasmaionquelle不同的工艺气体之间快速切换的结构（ICP）
公开(公告)号：EP2546863B1
公开(公告)日：2014-01-08
申请号：EP12173972.6
申请日：2012-06-28
申请人： FEI Company
发明人： Graupera, Anthony , Kellogg, Sean , Utlaut, Mark , Parker, N. William
IPC分类号： H01J37/08 , H01J37/18
CPC分类号： H01J37/3002 , H01J37/08 , H01J37/18 , H01J2237/006 , H01J2237/08 , H01J2237/0827

6. 发明公开

EP2674742A2 Lamella creation method and device using fixed-angle beam and rotating sample stage 审中-公开
标题翻译：板条利用角度稳定的支撑成形方法和装置以及旋转样品台
公开(公告)号：EP2674742A2
公开(公告)日：2013-12-18
申请号：EP13171169.9
申请日：2013-06-10
申请人： FEI COMPANY
发明人： Wells, Andrew , Parker, N. William , Chandler, Clive , Utlaut, Mark
IPC分类号： G01N1/32
CPC分类号： G01N1/32 , H01J37/3023 , H01J37/3056 , H01J2237/31745
摘要： A method and system for creating a substantially planar face in a substrate, the method including directing one or more beams at a first surface of a substrate to remove material from a first location in the substrate, the beam being offset from a normal to the first surface by a nonzero curtaining angle; sweeping the one or more beams in a plane that is perpendicular to the first surface to mill one or more initial cuts in the substrate, the initial cuts exposing a second surface that is substantially perpendicular to the first surface; rotating the substrate through a nonzero rotation angle about an axis other than an axis that is normal to the first beam or parallel to the first beam; directing the first beam at the second surface to remove additional material from the substrate without changing the first nonzero curtaining angle; and scanning the one or more beams in a pattern across the second surface to mill one or more finishing cuts in the substrate.
摘要翻译：一种用于在基片创建基本上平坦的面，所述方法包括在一衬底以从衬底的第一位置移除材料的第一表面引导一个或多个波束的方法和系统中，光束被从正常偏移到所述第一表面由一个非零垂落角; 在一个平面席卷一个或多个波束并垂直于所述第一表面到磨机中的一个或更多衬底初始切口，初始切口暴露的第二表面所做的是基本上垂直于所述第一表面上; 通过围绕轴线上以外于轴线即垂直于第一光束或平行于所述第一光束非零旋转角度旋转所述基片; 在第二表面引导所述第一光束，以除去从基板附加材料，而不改变第一个非零垂落角; 并扫描一个或多个光束在穿过所述第二表面的图案，以磨中的一个或更多衬底精加工切削。

7. 发明公开

EP3113207A1 INTEGRATED LIGHT OPTICS AND GAS DELIVERY IN A CHARGED PARTICLE LENS 审中-公开
标题翻译：加拿大富士康集团在伊朗LADUNGSTEILCHENLINSE集团
公开(公告)号：EP3113207A1
公开(公告)日：2017-01-04
申请号：EP15174195.6
申请日：2015-06-29
申请人： FEI Company
发明人： Parker, N. William , Straw, Marcus , Filevich, Jorge , Botman, Aurélien , Utlaut, Mark , Randolph, Steven , Chandler, Clive
IPC分类号： H01J37/22
CPC分类号： H01J37/228 , H01J2237/31744
摘要： A method and apparatus for directing light or gas or both to a specimen positioned within about 2 mm from the lower end of a charged particle beam column. The charged particle beam column assembly includes a platform defining a specimen holding position and has a set of electrostatic lenses each including a set of electrodes. The assembly includes a final electrostatic lens that includes a final electrode that is closest to the specimen holding position. This final electrode defines at least one internal passageway having a terminus that is proximal to and directed toward the specimen holding position.
摘要翻译：一种用于将光或气体或两者引导到位于距带电粒子束柱的下端约2mm内的样本的方法和装置。带电粒子束列组件包括限定样品保持位置的平台，并具有一组静电透镜，每组包括一组电极。组件包括最终静电透镜，其包括最靠近样品保持位置的最终电极。该最终电极限定至少一个内部通道，其具有靠近并指向试样保持位置的终端。

8. 发明授权

EP2600381B1 System for attachment of an electrode into an inductively coupled plasma source 有权
标题翻译：系统的电极固定到一个感应耦合等离子体源
公开(公告)号：EP2600381B1
公开(公告)日：2016-03-23
申请号：EP12194645.3
申请日：2012-11-28
申请人： FEI COMPANY
发明人： Kellogg, Sean , Graupera, Anthony , Parker, N. William , Wells, Andrew , Utlaut, Mark , Skoczylas, Walter , Schwind, Gregory , Zhang, Shouyin , Smith, Noel
IPC分类号： H01J37/08 , H01J37/04 , H01J27/02 , H01J27/16
CPC分类号： H01J37/32605 , H01J9/02 , H01J27/16 , H01J37/04 , H01J37/08 , H01J2237/032

9. 发明公开

EP2980223A2 FUNCTIONALIZED GRIDS FOR LOCATING AND IMAGING BIOLOGICAL SPECIMENS AND METHOD OF USING THE SAME 审中-公开
标题翻译：功能化的GRID为使用隔离和生物样本成像及其方法
公开(公告)号：EP2980223A2
公开(公告)日：2016-02-03
申请号：EP15178875.9
申请日：2015-07-29
申请人： FEI Company
发明人： Utlaut, Mark , Parker, N. William
IPC分类号： C12Q1/68 , H01J37/20 , G01N33/58
CPC分类号： C12N15/1065 , B01J2219/00605 , B01J2219/00623 , B01J2219/00722 , C12Q1/6806 , H01J37/20 , H01J2237/2004 , H01J2237/2802
摘要： A functionalized specimen support for use in charged particle microscopy is provided that includes a specimen support surface configured to support specimens (e.g. DNA strands 1051) during an interrogation of the specimens with a charged particle microscope, the specimen support surface having functionalized sites 1031, each functionalized site configured to maintain position of a portion of one of the specimens at the functionalized site by way of attachment, attraction, or a combination thereof.
摘要翻译：提供了一种用于在带电粒子显微镜使用的官能化的样品支持并包括被配置为与带电粒子显微镜试样的询问期间，支持样品（例如DNA链1051）的样品支承表面，试样支撑表面具有官能化位点1031，每个官能化位点被配置成维持所述样本中的一个的一部分的位置处通过附着，吸附，或它们的组合的方式官能化的位点。

10. 发明授权

EP2511934B1 Wide aperture Wien ExB mass filter 有权
标题翻译：具有大孔径维恩ExB滤质器
公开(公告)号：EP2511934B1
公开(公告)日：2015-11-18
申请号：EP12164204.5
申请日：2012-04-16
申请人： FEI Company
发明人： Tuggle, David , Parker, N. William
IPC分类号： H01J37/05
CPC分类号： H01J37/05 , H01J2237/31749

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