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    • 9. 发明公开
    • RUTHENIUM-ALLOY SPUTTERING TARGET
    • SPUTTERTARGET AUS RUTHENIUMLEGIERUNG
    • EP1892315A4
    • 2008-07-23
    • EP06746412
    • 2006-05-16
    • NIPPON MINING CO
    • ODA KUNIHIRO
    • C23C14/34B22F3/00H01L21/285
    • C23C14/3414B22F3/10C22C5/04
    • Provided is a ruthenium alloy sputtering target as a ruthenium alloy sintered compact target obtained by sintering mixed powder of ruthenium powder and metal powder capable of creating oxides easier than ruthenium, wherein purity of the target excluding gas components is 99.95wt% or higher, said target contains 5at% to 60at% of metal capable of creating oxides easier than ruthenium, relative density is 99% or higher, and oxygen content as impurities is 1000ppm or less. This ruthenium alloy sputtering target is capable of reducing its oxygen content, reducing the generation of arcing and particles during sputtering, increasing the target strength by improving the sintered density, and improving the deposition quality by strictly restricting the amount of B and P impurities in the target in order to prevent the compositional variability of B and P added in minute amounts to the Si semiconductor.
    • 一种钌合金溅射靶,其是通过烧结钌粉末和具有比钌更高的氧化能力的金属粉末的粉末混合物而获得的钌合金烧结靶。 其特征在于,排除所有气体成分的靶具有99.95重量%或更高的纯度,更易形成氧化物的金属含量为5-60原子%,相对密度为99 %或更高,并且作为杂质的氧含量为1,000ppm或更低。 由于钌合金溅射靶中的氧含量降低,所以溅射期间的电弧或颗粒产生受到抑制。 由于烧结密度提高,目标的强度提高。 为了防止微量添加到硅半导体中的有关硼和磷的成分波动,严格限制靶中硼和磷杂质的量。 因此,钌合金溅射靶可以提供质量提高的沉积物。