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61. 发明授权

EP0992092B1 VERY NARROW BAND LASER WITH UNSTABLE RESONANCE CAVITY 失效
标题翻译：一个很窄的波段激光器不稳定型共振
公开(公告)号：EP0992092B1
公开(公告)日：2003-04-23
申请号：EP98926365.2
申请日：1998-06-05
申请人： Cymer, Inc.
发明人： ERSHOV, Alexander I.
IPC分类号： H01S3/08 , H01S3/1055 , H01S3/225
CPC分类号： G03F7/70483 , G02B5/1828 , G03F7/70025 , G03F7/70575 , H01S3/08009 , H01S3/08081 , H01S3/1055 , H01S3/13 , H01S3/225
摘要： A very narrow band laser. The very narrow bandwidth is achieved by creating an unstable resonance cavity using a cylindrical, partially reflecting mirror (68) to provide an output coupler in combination with a line narrowing module (18) having a beam expander and a curved grating.

62. 发明授权

EP0748009B1 Output control method for excimer laser 失效
标题翻译：一种用于控制Excimerlaserausgangsstrahlung方法
公开(公告)号：EP0748009B1
公开(公告)日：2002-12-04
申请号：EP96304045.6
申请日：1996-06-04
申请人： CANON KABUSHIKI KAISHA
发明人： Hasegawa, Noriyasu , Ozawa, Kunitaka , Kurosawa, Hiroshi , Yoshimura, Keiji
IPC分类号： H01S3/225 , H01S3/134 , G03F7/20 , H01L21/30
CPC分类号： G03F7/70358 , G03F7/70041 , G03F7/70558 , H01S3/134 , H01S3/225

63. 发明授权

EP0794598B1 Excimer laser generator 失效
标题翻译： Excimerlasergenerator
公开(公告)号：EP0794598B1
公开(公告)日：2002-11-20
申请号：EP97301522.5
申请日：1997-03-06
申请人： CANON KABUSHIKI KAISHA , Ohmi, Tadahiro
发明人： Ohmi, Tadahiro , Shirai, Yasuyuki , Sano, Naoto
IPC分类号： H01S3/036 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/225

64. 发明授权

EP0783193B2 Laser having improved beam quality and reduced operating cost 失效
标题翻译：激光具有改善的光束质量和降低的操作成本
公开(公告)号：EP0783193B2
公开(公告)日：2002-08-14
申请号：EP97300007.8
申请日：1997-01-02
申请人： Cymer, Inc.
发明人： Watson, Tom A. , Fomenkov, Igor V. , Partlo, William N. , deRuyter, Anthony J. , Larson, Donald G. , Das, Palash P.
IPC分类号： H01S3/036 , H01S3/04
CPC分类号： H01S3/036 , F28D2021/0077 , H01S3/04 , H01S3/041 , H01S3/225

65. 发明公开

EP1130699A3 Adjustable mounting unit for an optical element of a gas laser 有权
标题翻译：用于在气体激光器的光学元件保持器可调
公开(公告)号：EP1130699A3
公开(公告)日：2002-05-22
申请号：EP01104173.8
申请日：2001-02-21
申请人： TuiLaser AG
发明人： Kodeda, Hans , Frowein, Helmut , Strowitzki, Claus , Hohla, Alexander
IPC分类号： H01S3/034 , H01S3/086
CPC分类号： H01S3/086 , H01S3/034 , H01S3/225
摘要： An adjustable mounting unit (103,120) for an optical element (116) of a gas laser (100) is provided. The typical gas laser for which the mounting unit will be used comprises a tube (101) having a first end wall (96) at one end and a second end wall (98) at the other end, an optical axis extending longitudinally through the tube (101), and a port (97) in the first end wall (96) through which the optical axis passes. The mounting unit includes a rigid support structure (117) having an aperture (122) therein and an optical element mounted within the aperture. In addition, at least three adjustable mounting devices are used to attach the support structure to the laser tube (101). The mounting points are preferably selected so that they are displaced in an axial direction by substantially the same amount due to dimensional changes in the laser occurring during operation of the laser. When attached to the laser, the rigid support (117) is spaced apart from the laser tube (101) to allow for the adjustment of the angular positioning of the optical element (116). Furthermore, the aperture and optical element are disposed transverse to the optical axis and are aligned with the optical axis. Adjustment of the adjustable mounting devices (103,120) changes the angular position of the optical element (116) relative to the optical axis.

66. 发明公开

EP1164667A2 Electric discharge gas laser 有权
标题翻译：气体放电激光器
公开(公告)号：EP1164667A2
公开(公告)日：2001-12-19
申请号：EP01113983.9
申请日：2001-06-08
申请人： EBARA CORPORATION
发明人： Ooyama, Atushi , Sekiguchi, Shinichi , Shinozaki, Hiroyuki , Barada, Toshimitsu , Nakazawa, Toshiharu
IPC分类号： H01S3/036
CPC分类号： F16C32/0444 , F16C32/0489 , H01S3/036 , H01S3/225
摘要： There is provided an electric discharge gas laser comprising a housing containing a laser gas; a rotating fan provided in the housing to circulate the gas in the housing; a bearing device for magnetically supporting a rotating shaft of the rotating, the bearing device being provided with a sensor device comprising a sensor for sensing the position of the rotating shaft to generate signals indicating the position of the rotating shaft, and a signal processor for receiving and processing the signals delivered from the sensor to output processed signals; and a control separated from the bearing device and functionally associated with the bearing device to receive the processed signals from the sensor device for controlling the bearing device on the basis of the processed signals.

67. 发明公开

EP1155481A1 DURABLE ETALON BASED OUTPUT COUPLER 有权
标题翻译：耐用，在基于标准具的输出耦合器
公开(公告)号：EP1155481A1
公开(公告)日：2001-11-21
申请号：EP99961808.5
申请日：1999-11-23
申请人： Cymer, Inc.
发明人： ERSHOV, Alexander, I.
IPC分类号： H01S3/22 , H01S3/223
CPC分类号： H01S3/139 , G03F7/70025 , G03F7/70041 , G03F7/70558 , G03F7/70575 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/08059 , H01S3/08081 , H01S3/0812 , H01S3/0971 , H01S3/105 , H01S3/1055 , H01S3/137 , H01S3/223 , H01S3/225 , H01S3/2251
摘要： A durable etalon based laser output coupler for ultraviolet lasers such as an ArF excimer laser or an F2 laser has two prisms (164A, 164B) aligned so that a first surface of one prism is parallel to a first surface of the other prism. The first prism has a second surface forming an angle with a beam from a laser cavity approximately equal to Brewster's angle. The second prism has a second surface forming an angle with the coupler exit beam approximately equal to Brewster's angle. For a wavelength of 193 nm, in an ArF excimer laser, Brewster's angle is about 57 degrees and each of the first and second surfaces define an apex angle of about 34 degrees. In a preferred embodiment, the device is used as an output coupler for line narrowed ArF excimer laser (63) having a diffraction grating based line narrowing module.

68. 发明公开

EP1056171A3 Discharge-pumped excimer laser device 有权
标题翻译：放电泵浦准分子激光
公开(公告)号：EP1056171A3
公开(公告)日：2001-10-31
申请号：EP00111269.7
申请日：2000-05-25
申请人： EBARA CORPORATION
发明人： Sekiguchi, Shinichi , Shinozaki, Hiroyuki , Barada, Toshimitsu , Nakazawa, Toshiharu
IPC分类号： H01S3/225 , H01S3/03
CPC分类号： F16C32/047 , H01S3/03 , H01S3/036 , H01S3/225
摘要： A discharge-pumped excimer laser device has a casing (1), a pair main discharge electrodes (2), a cross-flow fan (3) for producing a high-speed laser gas flow between the main discharge electrodes (2), the cross-flow fan (3) having a rotatable shaft (4) projecting from opposite ends thereof, magnetic bearings (8,9,10,11), the rotatable shaft (4) being rotatably supported by the bearings, protective bearings (13,14,15) for supporting the rotatable shaft (4) when the magnetic bearings are not in operation, and a motor (12) for actuating the cross-flow fan (3). The magnetic bearings include radial magnetic bearings (8,9,10) disposed on the opposite ends of the rotatable shaft (4). One of the radial magnetic bearings which is disposed closely to the motor (12) has a bearing rigidity greater than the bearing rigidity of the magnetic bearing that is disposed remotely from the motor.

69. 发明公开

EP1137132A2 Excimer or molecular fluorine laser devices 有权
标题翻译：荧光激光紫外线激发剂
公开(公告)号：EP1137132A2
公开(公告)日：2001-09-26
申请号：EP01106068.8
申请日：2001-03-12
申请人： Ushio Research Institute of Technology, Inc.
发明人： Kakizaki, Koji , Tada, Akifumi
IPC分类号： H01S3/223 , H01S3/225
CPC分类号： H01S3/225
摘要： To provide an ArF excimer laser device capable of a pulsewidth FWHM of 20 ns or more, a pulse duration time of 50 ns or more, and a spectrum line width FWHM of 0.35 pm or less, and to provide a KrF excimer laser device and a fluorine laser device with stretched pulse widths. The ArF excimer laser device connects to the output terminal of a magnetic pulse compression circuit and has a pair of laser discharge electrodes located within the laser chamber and a peaking capacitor connected in parallel with the pair of laser discharge electrodes. The output waveform of the laser pulse has a bifurcated form with a front half peak and a later half peak and, if the peak value of the front half peak is P 1 and the peak value of the later half peak is P 2 and the (proportion of the pulse later half peak) = P 2 / (P 1 + P 2 ) x 100 (%), then the (proportion of the pulse later half peak) is 50% or more.
摘要翻译：为了提供能够具有20ns以上的脉冲宽度FWHM，50ns以上的脉冲持续时间和0.35μm以下的谱线宽度FWHM的ArF准分子激光装置，并且提供KrF准分子激光装置和氟激光器件具有拉伸的脉冲宽度。 ArF准分子激光装置连接到磁脉冲压缩电路的输出端子，并且具有位于激光室内的一对激光放电电极和与该对激光放电电极并联连接的峰值电容器。激光脉冲的输出波形具有前半峰和后半峰的分叉形式，如果前半峰的峰值为P1，后半峰的峰值为P2，则（（脉冲后半峰）= P2 /（P1 + P2）×100（％），则（脉冲后半峰的比例）为50％以上。

70. 发明公开

EP1032097A3 Laser oscillating apparatus 有权
公开(公告)号：EP1032097A3
公开(公告)日：2001-09-12
申请号：EP00301496.6
申请日：2000-02-25
申请人： Ohmi, Tadahiro , CANON KABUSHIKI KAISHA
发明人： Ohmi, Tadahiro , Suzuki, Nobumasa , Shinohara, Toshikuni , Ohsawa, Hiroshi , Hirayama, Masaki , Tanaka, Nobuyoshi
IPC分类号： H01S3/0973 , H01S3/225 , H01S3/03 , H01L21/027
CPC分类号： G03F7/70025 , H01S3/0315 , H01S3/0975 , H01S3/225
摘要： In a slot array structure, electromagnetic wave emission which is uniform as a whole over the length of a laser tube is realized to allow uniform laser emission with minimum energy loss. Slots (10) are formed at a predetermined pitch in a long end face (H plane) of each waveguide (1) along a central line (m) in the longitudinal direction of the H plane to be alternately located on the left and right sides of the central line (m) and spaced apart from the central line (m) by a distance (d).

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