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51. 发明公开

EP1831974A4 LINE NARROWING MODULE 有权转让
标题翻译： LINIENVERSCHMÄLERUNGSMODUL
公开(公告)号：EP1831974A4
公开(公告)日：2010-11-24
申请号：EP05826233
申请日：2005-11-28
申请人： CYMER INC
发明人： ALGOTS MARTIN J , BERGSTEDT ROBERT A , GILLESPIE WALTER D , KULGEYKO VLADIMIR A , PARTLO WILLIAM N , RYLOV GERMAN E , SANDSTROM RICHARD L , STRATE BRIAN D , DYER TIMOTHY S
IPC分类号： H01S3/22
CPC分类号： H01S3/1055 , G03F7/70025 , G03F7/70041 , H01S3/005 , H01S3/036 , H01S3/08 , H01S3/08004 , H01S3/08059 , H01S3/097 , H01S3/106 , H01S3/2251

52. 发明公开

EP1861903A4 LPP EUV DRIVE LASER 审中-公开
标题翻译： LPP EUV CONTROL LASER
公开(公告)号：EP1861903A4
公开(公告)日：2010-07-07
申请号：EP06736026
申请日：2006-02-22
申请人： CYMER INC
发明人： BROWN DANIEL J W , ERSHOV ALEXANDER I , FLEUROV VLADIMIR B , FOMENKOV IGOR V , PARTLO WILLIAM N
IPC分类号： H01S3/22 , H01S3/223
CPC分类号： H01S3/225 , H01S3/094 , H01S3/10015 , H01S3/10023 , H01S3/109 , H01S3/1611 , H01S3/1653 , H01S3/2255 , H01S3/2308 , H01S3/2333 , H01S3/2366 , H01S3/2375 , H01S3/2383 , H05G2/003 , H05G2/005 , H05G2/008

53. 发明授权

EP1218986B1 NARROW BAND LASER WITH FINE WAVELENGTH CONTROL 有权
标题翻译：用细调谐波长SCHMALLBANDIGER LASER
公开(公告)号：EP1218986B1
公开(公告)日：2008-10-08
申请号：EP00963314.0
申请日：2000-08-31
申请人： Cymer, Inc.
发明人： ALGOTS, John, M. , MARCHI, Christopher, A. , ERIE, Fredrick, G. , BUCK, Jesse, D. , ERSHOV, Alexander, I. , DAS, Palash, P. , FOMENKOV, Igor, V.
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G02B5/1828 , G03F7/70483 , G03F7/70575 , H01S3/02 , H01S3/03 , H01S3/08009 , H01S3/08059 , H01S3/08081 , H01S3/0812 , H01S3/086 , H01S3/10 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/1392 , H01S3/225 , H01S3/2256
摘要： A smart laser having automatic computer control (24A) of pulse energy, wavelength, and bandwidth using feedback signals from a wavemeter (22). Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an Rmax mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the Rmax tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber (3) within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the Rmax mirror. In other embodiments a separate laser beam reflected off the Rmax mirror on to a photodiode array is used to position the mirror.

54. 发明公开

EP1867014A2 GAS DISCHARGE LASER OUTPUT LIGHT BEAM PARAMETER CONTROL 有权
标题翻译：控制在所述主梁的气体放电激光器的参数
公开(公告)号：EP1867014A2
公开(公告)日：2007-12-19
申请号：EP06748813.0
申请日：2006-03-27
申请人： Cymer, Inc.
发明人： BESAUCELE, Herve, A. , FOMENKOV, Igor, V. , PARTLO, William, N. , TRINTICHOUK, Fedor , TON-THAT, Hao
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/038 , H01S3/097 , H01S3/09702 , H01S3/134
摘要： A line narrowed gas discharge laser system and method of operation are disclosed which may comprise: an oscillator cavity; a laser chamber comprising a chamber housing containing a lasing medium gas; at least one peaking capacitor electrically connected to the chamber housing and to a first one of a pair of electrodes; a second one of the pair of electrodes connected to an opposite terminal of the at least one peaking capacitor; a current return path connected to the chamber housing; the one terminal, the first one of the electrodes, the lasing medium gas, the second one of the electrodes, the current return path and the second terminal forming a head current inductive loop having an inductance unique to the particular head current inductive loop; a spectral quality tuning mechanism comprising a mechanism for changing the particular head current inductive loop inductance value for the particular head current inductance loop.

55. 发明公开

EP1310022A4 LASER WAVELENGTH CONTROL UNIT WITH PIEZOELECTRIC DRIVER 有权
标题翻译：带压电驱动器激光波长控制单元
公开(公告)号：EP1310022A4
公开(公告)日：2007-07-04
申请号：EP01954584
申请日：2001-04-30
申请人： CYMER INC
发明人： SPANGLER RONALD L , JACQUES ROBERT N , EVERAGE GEORGE J , ANDERSON STUART L , PALENSCHAT FREDERICK A , FOMENKOV IGOR V , SANDSTROM RICHARD L , PARTLO WILLIAM N , ALGOTS JOHN M , BROWN DANIEL J W
IPC分类号： H01S3/137 , G03F7/20 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/131 , H01S3/134 , H01S3/22 , H01S3/225
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/1312 , H01S3/134 , H01S3/137 , H01S3/22 , H01S3/2207 , H01S3/225
摘要： Fast wavelenght correction equipment for an electric discharge laser includes at least one piezoelectic drive (80) and a fast wavelength measurement system and a fast feedback response time. In a preferred embodiment equipment is provided to control wavelength on a slow, intermediate amd fast time scales, which vary in range from several milliseconds to a few microseconds respectively. Techniques include a combination of a relatively slow stepper motor (82) and a very fast piezoelectric drive (80) for tuning the laser wavelength using a tuning mirror (14).

56. 发明公开

EP1754291A2 GAS DISCHARGE LASER CHAMBER IMPROVEMENTS 有权转让
标题翻译：气体放电激光器室的改进
公开(公告)号：EP1754291A2
公开(公告)日：2007-02-21
申请号：EP05733083.9
申请日：2005-03-03
申请人： Cymer, Inc.
发明人： PARTLO, William, N. , AMADA, Yoshiho , CARMICHAEL, James, A. , DYER, Timothy, S. , GILLESPIE, Walter, D. , MOOSMAN, Bryan, G. , RETTIG, Curtis, L. , STRATE, Brian, D. , STEIGER, Thomas, D. , TRINTCHOUK, Fedor, B. , UJAZDOWSKI, Richard, C.
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/0384 , H01S3/041 , H01S3/0971 , H01S3/225
摘要： A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial fitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

57. 发明公开

EP1620928A4 WAVEGUIDE LASER 审中-公开
标题翻译： WELLENLEITERLASER
公开(公告)号：EP1620928A4
公开(公告)日：2006-10-11
申请号：EP04760610
申请日：2004-04-29
申请人： LITELASER L L C
发明人： MONTY NATHAN PAUL
IPC分类号： H01S3/22 , G05B19/18 , H01S20060101 , H01S3/03 , H01S3/038 , H01S3/063 , H01S3/0975 , H01S3/223
CPC分类号： H01S3/0385 , H01S3/0315 , H01S3/063 , H01S3/0632 , H01S3/0975 , H01S3/22
摘要： A laser waveguide (1), where the laser waveguide (1) can be formed by electrodes (2 and 4) and at least one sidewall (3a-d) in a manner allowing a more compact structure than previously provided. Protrusions in the electrodes (2 and 4) allow easier laser starts, and sectional sidewall(s) allow easier fabrication of sidewall(s), decreasing manufacturing costs.
摘要翻译：一种激光波导（1），其中激光波导（1）可以由电极（2和4）和至少一个侧壁（3a-d）形成，其方式允许比先前提供的更紧凑的结构。电极（2和4）中的突起允许更容易的激光启动，并且部分侧壁允许更容易制造侧壁，从而降低制造成本。

58. 发明公开

EP1706697A1 PHASE-CHANGE HEAT EXCHANGER 审中-公开
标题翻译：相变换热
公开(公告)号：EP1706697A1
公开(公告)日：2006-10-04
申请号：EP04813111.4
申请日：2004-12-07
申请人： The Boeing Company
发明人： DELGADO, Adon, Jr. , LEONARD, Randall, G. , ULLMAN, Alan, Z.
IPC分类号： F28D20/02 , H01S3/22
CPC分类号： H01S3/036 , F28D20/023 , H01S3/095 , Y02E60/145 , Y10T428/249954
摘要： A phase-change heat exchanger (22) is provided for thermally conditioning a fluid. The phase-change heat exchanger includes, but is not limited to, conduits (60) configured to convey the fluid through the phase-change heat exchanger (22) and a foam structure (66) in thermal contact with at least one of the conduits (60). The foam structure (66) has ligaments (84) interconnected to form a three-dimensional reticulated structure of open cells (86). A phase-change material (88) is contained within the open cells (86) and the phase-change material (88) is configured to receive thermal energy of the fluid from the ligaments (84) of the foam structure (66).

59. 发明公开

EP1386376A4 LASER SPECTRAL ENGINEERING FOR LITHOGRAPHIC PROCESS 有权
标题翻译： LASERSPEKTRALTECHNIK用于光刻工艺
公开(公告)号：EP1386376A4
公开(公告)日：2006-06-28
申请号：EP02731433
申请日：2002-04-19
申请人： CYMER INC
发明人： KROYAN ARMEN , LALOVIC IVAN , FOMENKOV IGOR , DAS PALASH P , SANDSTROM RICHARD L , ALGOTS JOHN M , AHMED KHURSHID
IPC分类号： G03F7/207 , G03F7/20 , H01L21/027 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/10
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2308
摘要： An integrated circuit lithograohy technique (pectral engineering) for bandwidth control of an electric discharge laser. A computer models lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism (104) adjusts the center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks to produce improved pattern resolution in photo resits film. Line narrowing equipment (106) is provided having at least one piezoelectric drive and a fast banwidth detection control system having a time response of less than about 2.0 millisecond. A wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser.

60. 发明公开

EP1649567A2 PASSIVE GAS FLOW MANAGEMENT AND FILTRATION DEVICE FOR USE IN AN EXCIMER OR TRANSVERSE DISCHARGE LASER 失效转让
标题翻译：被动式气体流量管理和过滤装置用于激发或横向放电激光器
公开(公告)号：EP1649567A2
公开(公告)日：2006-04-26
申请号：EP04776754.6
申请日：2004-06-17
申请人： Visx, Incorporated
发明人： BLIVEN, Brian , TURNQUIST, David
IPC分类号： H01S3/22 , H01S3/223
CPC分类号： H01S3/036
摘要： The present invention provides systems and methods for filtering particles and assisting gas flow management within laser systems. In one embodiment, a laser apparatus (100) includes an elongate laser chamber defining a chamber cavity (130) and an electrode structure (140) disposed therein. The electrode structure includes an anode (148) spaced apart from a cathode (146). The laser includes an elongate baffle (174) disposed in the laser chamber. The baffle is adapted to arrest a plurality of particles generated within the chamber. In this manner, the baffle operates as a passive filtration system to help filter particles generated within the chamber during laser operation, and may further provide gas flow management capabilities.
摘要翻译：本发明提供了用于过滤颗粒并辅助激光系统内的气流管理的系统和方法。在一个实施例中，激光装置（100）包括限定腔室腔（130）和设置在其中的电极结构（140）的细长激光腔室。电极结构包括与阴极（146）隔开的阳极（148）。激光器包括设置在激光室中的细长挡板（174）。挡板适于阻止在腔室内产生的多个颗粒。以这种方式，挡板作为无源过滤系统工作以帮助在激光操作期间过滤在腔室内产生的颗粒，并且可以进一步提供气体流动管理能力。

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