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    • 57. 发明公开
    • Micromechanical thermal actuator
    • Mikromechanisches thermisches Antriebselement
    • EP2168908A1
    • 2010-03-31
    • EP08305626.7
    • 2008-09-30
    • Alcatel Lucent
    • Gasparyan, ArmanSimon, Maria ElinaGates, John
    • B81B3/00
    • B81B3/0024B81B2201/031B81B2203/056B81B2203/058H01H61/04H01H2061/008
    • The present invention provides a microelectromechanical element comprising a cold beam and at least a first beam pair comprising a first beam member and a second beam member, the beam pair being coupled to said cold beam by a free end tether and configured to elongate when heated to a greater temperature than a temperature of said cold beam thereby causing the assembly to deflect in a first direction determined by a movement plane. The first beam member and the second beam member of the beam pair are arranged to determine a beam plane such that the beam plane is at an angle α from the movement plane where α≠Kπ and K is an integer. Various embodiments further relate to microelectromechanical element capable of performing unidirectional in-plane deflection, unidirectional out-of-plane deflection and bi-directional inplane deflection, as well as a latching relay using a combination of a unidirectional out-of-plane element with a bi-directional in-plane element.
    • 本发明提供一种微电子机械元件,其包括冷光束和至少一个包括第一光束部件和第二光束部件的第一光束对,所述光束对通过自由端系绳耦合到所述冷光束,并且被配置为当被加热到 比所述冷光束的温度更高的温度,从而使组件在由移动平面确定的第一方向上偏转。 梁对的第一梁构件和第二梁构件布置成确定梁平面,使得梁平面处于与运动平面成±的角度,其中±‰K和K是整数。 各种实施例还涉及能够执行单向面内偏转,单向面外偏转和双向内平面偏转的微机电元件,以及使用单向外平面元件与 双向平面内元件。