专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

41. 发明授权

EP2124244B1 Ultra high precision measurement tool with control loop 有权
标题翻译：高精度测量仪器控制电路
公开(公告)号：EP2124244B1
公开(公告)日：2011-08-03
申请号：EP08156663.0
申请日：2008-05-21
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Frosien, Juergen
IPC分类号： H01J37/08 , H01J37/304 , H01J37/26 , H01J27/26
CPC分类号： H01J37/265 , H01J37/28 , H01J37/304 , H01J37/3056 , H01J2237/0805 , H01J2237/0807 , H01J2237/244 , H01J2237/24507 , H01J2237/24535

42. 发明公开

EP2331946A2 ION BEAM STABILIZATION 有权转让
标题翻译： IONENSTRAHLSTABILISIERUNG
公开(公告)号：EP2331946A2
公开(公告)日：2011-06-15
申请号：EP09791973.2
申请日：2009-08-27
申请人： Carl Zeiss NTS, LLC.
发明人： RAHMAN, FHM-Faridur , FARKAS, Louis, S., III , NOTTE, John, A., IV
IPC分类号： G01N23/225 , H01J37/08 , H01J27/26
CPC分类号： H01J37/28 , H01J37/05 , H01J37/08 , H01J37/265 , H01J2237/057 , H01J2237/0807 , H01J2237/24514
摘要： Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
摘要翻译：公开了离子显微镜的方法和系统。通常，这些系统和方法提供了高离子束稳定性。

43. 发明公开

EP2311063A2 INCREASING CURRENT IN CHARGED PARTICLE SOURCES AND SYSTEMS 审中-公开
标题翻译：功率增加带电粒子系统的来源
公开(公告)号：EP2311063A2
公开(公告)日：2011-04-20
申请号：EP09789975.1
申请日：2009-06-29
申请人： Carl Zeiss NTS, LLC.
发明人： NOTTE, John A., IV , PERCIVAL, Randall G. , SANFORD, Colin A. , GROHOLSKI, Alexander
IPC分类号： H01J37/08 , H01J27/26
CPC分类号： H01J37/08 , H01J27/024 , H01J2237/061 , H01J2237/0805 , H01J2237/0807
摘要： Disclosed are charged particle systems that include a tip (504), at least one gas inlet (512a-f) configured to supply gas particles to the tip, and a element (506) having a curved surface (514) positioned to adsorb un-ionized gas particles (182a-d), and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.

44. 发明公开

EP2289089A2 CROSS-SECTION SYSTEMS AND METHODS 审中-公开
标题翻译：部分的系统和方法
公开(公告)号：EP2289089A2
公开(公告)日：2011-03-02
申请号：EP09767582.1
申请日：2009-06-16
申请人： Carl Zeiss NTS, LLC.
发明人： SCIPIONI, Lawrence , KNIPPELMEYER, Rainer , RIEDESEL, Christoph , MORGAN, John , MANTZ, Ulrich , WAGEMANN, Ulrich
IPC分类号： H01J37/30
CPC分类号： G01N1/286 , H01J2237/0807 , H01J2237/304 , H01J2237/31745 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A first instrument (230) is used to image a first semiconductor article having a trench (110) of defined cross-section, while a second instrument (220) is used to simultaneously prepare a second semiconductor article with a trench of defined cross-section. Furthermore, a method is disclosed to prepare a trench (110) of defined cross-section in a semiconductor article by rough milling and subsequent fine milling.

45. 发明公开

EP2288906A2 ISOTOPE ION MICROSCOPE METHODS AND SYSTEMS 有权转让
标题翻译： VERFAHREN UND SYSTEMEFÜRISOTOPENIONENMIKROSKOPIE
公开(公告)号：EP2288906A2
公开(公告)日：2011-03-02
申请号：EP09767266.1
申请日：2009-05-26
申请人： Carl Zeiss NTS, LLC.
发明人： NOTTE, John, A., IV , SIJBRANDIJ, Sybren
IPC分类号： G01N23/225 , H01J37/26
CPC分类号： H01J37/285 , G01N23/2255 , H01J37/08 , H01J37/28 , H01J37/317 , H01J2237/0807 , H01J2237/2817
摘要： Ion microscope methods and systems are disclosed. In general, the systems and methods involve relatively light isotopes, minority isotopes or both. In some embodiments, He-3 is used.
摘要翻译：公开了离子显微镜的方法和系统。通常，系统和方法涉及相对较轻的同位素，少数同位素或两者。在一些实施方案中，使用He-3。

46. 发明公开

EP2263248A1 GAS FIELD ION SOURCE WITH COATED TIP 有权
标题翻译：用涂TIP气体场离子源
公开(公告)号：EP2263248A1
公开(公告)日：2010-12-22
申请号：EP09716494.1
申请日：2009-02-13
申请人： Carl Zeiss SMT, Inc.
发明人： NOTTE IV, John V.
IPC分类号： H01J37/08 , H01J27/26 , H01J37/065 , H01J37/26 , H01J37/30
CPC分类号： H01J49/168 , H01J27/26 , H01J37/065 , H01J37/08 , H01J37/28 , H01J2237/06341 , H01J2237/0807 , H01J2237/28
摘要： Coated tips, as well as related articles, systems and methods are disclosed.

47. 发明公开

EP2068345A1 High resolution gas field ion column with reduced sample load 有权
标题翻译： einemhochauflösenden中的Ionenspalte Gasfeld mit reduzierter Probenlast
公开(公告)号：EP2068345A1
公开(公告)日：2009-06-10
申请号：EP07023587.4
申请日：2007-12-05
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Banzhof, Helmut , Frosien, Jürgen , Winkler, Dieter
IPC分类号： H01J37/28 , H01J37/26 , H01J37/08
CPC分类号： H01J37/04 , H01J37/28 , H01J2237/0473 , H01J2237/0475 , H01J2237/0492 , H01J2237/08 , H01J2237/0807
摘要： A method of operating a focused ion beam device having a gas field ion source is described. According to some embodiments, the method being adapted for high imaging resolutions below 1 nm includes emitting an ion beam from a gas field ion source, providing a final beam energy on impingement of the ion beam on the specimen of 1 keV to 4 keV, and imaging the specimen.
摘要翻译：描述了一种操作具有气体场离子源的聚焦离子束装置的方法。根据一些实施例，适用于低于1nm的高成像分辨率的方法包括从气体场离子源发射离子束，在离子束冲击1keV至4keV的样品上提供最终的束能，以及成像样本。

48. 发明公开

EP1955356A2 ION SOURCES, SYSTEMS AND METHODS 审中-公开
公开(公告)号：EP1955356A2
公开(公告)日：2008-08-13
申请号：EP06837944.5
申请日：2006-11-15
申请人： Alis Corporation
发明人： WARD, Billy W. , NOTTE, John, A., IV , FARKAS III, Louis, S. , PERCIVAL, Randall G. , HILL, Raymond
IPC分类号： H01J37/28
CPC分类号： H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).

49. 发明公开

EP1655265A3 Single-atom tip and preparation method thereof 有权
标题翻译：单原子尖端及其制造方法
公开(公告)号：EP1655265A3
公开(公告)日：2007-10-24
申请号：EP04030723.3
申请日：2004-12-23
申请人： Academia Sinica
发明人： Ing Shouh,Hwang , Hong-Shi,Kuo , Tien T.,Tsong , Tsu-Yi,Fu
IPC分类号： B82B3/00 , G12B21/02
CPC分类号： C25F1/00 , C25D3/48 , C25D3/50 , C25D5/003 , C25D5/022 , C25D5/38 , C25D5/48 , C25D5/50 , G01Q70/16 , H01J9/025 , H01J37/073 , H01J37/08 , H01J2237/06341 , H01J2237/0807 , Y10T29/49002
摘要： This invention discloses an electrochemical method for the preparation of single atom tips to replace the traditional vacuum evaporation method. The invented method for preparation of single atom tips includes the following steps: A substrate single crystal metal wire etched electrochemically to form a tip. The surface of the metal tip is cleaned. A small quantity of noble metal is plated on the apex of the tip in low concentration noble metal electrolyte. Annealing in vacuum or in inert gas ambient to diffuse the additional electroplated noble metal atoms and thus a single atom tip is formed on the surface of the substrate. The present invention also discloses the single atom tip so prepared. The single atom tip of this invention has only a very small number of atoms, usually only one atom, at its apex.

50. 发明公开

EP1585164A2 Flood gun for charge neutralization 有权转让
标题翻译： Elektronenquelle zur中和von Aufladungen
公开(公告)号：EP1585164A2
公开(公告)日：2005-10-12
申请号：EP05251191.2
申请日：2005-02-28
申请人： THERMO ELECTRON CORPORATION
发明人： Barnard, Bryan Robert , Bayly, Alan Rupert , Humpherson, Michael Hugh
IPC分类号： H01J37/02
CPC分类号： H01J37/026 , H01J2237/0044 , H01J2237/06308 , H01J2237/0807 , H01J2237/082 , H01J2237/2516
摘要： A flood gun 10 for charge neutralization of an analysis region R a of a sample S downstream of the flood gun, comprising: a first source 30 of electrons; a second source 50 of positively charged particles; and an extraction and focusing assembly 60,64, arranged to: (i) extract a first, electron beam from the first source and focus the first beam to a first flood area A e at the analysis region; and (ii) extract a second, positive particle beam from the second source and focus the second beam to a second flood area A i at the analysis region. The electron beam and the positive particle beam may both be extracted and focused simultaneously, in a single mode of operation or, alternately, in a dual mode of operation. A corresponding method of providing charge neutralisation and a spectroscopic system for secondary particle emission analysis are disclosed.
摘要翻译：用于对洪水枪下游的样品S的分析区域R a进行电荷中和的防喷枪10，包括：电子的第一源30; 带正电颗粒的第二源50; 以及提取和聚焦组件60,64，其布置成：（i）从第一源提取第一电子束，并将第一光束聚焦到分析区域处的第一洪水区域A e; 和（ii）从第二源提取第二个正的粒子束，并将第二个光束聚焦到分析区域的第二个洪水区域A i。电子束和正粒子束可以在单一操作模式中或者在双重操作模式中同时被提取和聚焦。公开了提供电荷中和的相应方法和用于二次粒子发射分析的光谱系统。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式