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    • 43. 发明公开
    • EXIT WINDOW FOR X-RAY LITHOGRAPHY BEAMLINE
    • 欧洲传感器FÜRRÖNTGENSTRAHLUNGSLITHOGRAPHIE
    • EP0797830A4
    • 1997-11-19
    • EP95943093
    • 1995-12-08
    • GRUMMAN AEROSPACE CORP
    • KOVACS STEPHEN
    • G21K5/00G03F7/20G21K5/02H01J5/18H01L21/027H05H7/00G21K1/00
    • G03F7/70808G03F7/70841H01J5/18H05H7/00
    • An exit window (14) for an X-ray lithography beamline having a shape and thickness such that the exit window (14) can withstand a pressure differential of at least 14.8 psi and allows an X-ray beam (16) as passed through the window to have X-rays above and below a desired energy band substantially attenuated. The exit window (14) includes a thin material (22) having a window section disposed within an opening of a frame (28) and a peripheral section (41) which is integral with the window section (24) extends within the frame (28). The window section (24) has a shape that is substantially concave along its width, substantially linear along its length and tapers to a flat surface (42) near the periphery of the opening. A method of scanning the X-ray beam through a stationary exit window and onto an exposure field on a wafer is also disclosed.
    • 用于具有形状和厚度的X射线光刻束线的出射窗,使得出射窗能够承受至少14.7psi的压差,并允许通过窗口的X射线束具有上方和下方的X射线 所需的能带基本上衰减。 出口窗口包括具有设置在框架的开口内的窗口部分的薄材料和与窗口部分整体并在框架内延伸的周边部分。 窗口部分具有沿其宽度基本上为凹形的形状,沿其长度基本上线性并且在靠近开口周边的平坦表面逐渐变细。 还公开了通过固定出射窗将X射线束扫描到晶片上的曝光场上的方法。
    • 49. 发明公开
    • TRANSONIC WING DESIGN PROCEDURE.
    • 翼速度,加速度附近的噪声限值的设计过程。
    • EP0271561A4
    • 1989-10-27
    • EP87904423
    • 1987-05-29
    • GRUMMAN AEROSPACE CORP
    • BOPPE CHARLES W
    • B64C3/10B64C3/00
    • B64C3/00
    • The conventional steps of defining performance requirements of an aircraft wing and conducting general sizing of the wing are followed by the new steps of determining the aerodynamic sweep angle of the wing with respect to an actual location of a shock wave on the wing. A two dimensional Mach number for the wing airfoil is calculated by multiplying the three dimensional Mach number by the cosine of the aerodynamic sweep angle. A two dimensional lift coefficient for the wing airfoil is calculated by dividing the three dimensional lift coefficient by the square of the cosine of the aerodynamic sweep angle. Airfoil shape in two dimensions is determined on the basis of the two dimensions is determined on the basis of the two dimensional Mach number and the two dimensional lift coefficient. The shape of the wing in three dimensions is then defined by placing the airfoil in the wing along an arc constructed by skewed chord lines perpendicular to local sweep lines of the wing at a series of locations along a chord of the wing.