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    • 42. 发明公开
    • Sb-Te ALLOY SINTERING PRODUCT TARGET AND PROCESS FOR PRODUCING THE SAME
    • SB-TE-LEGIERUNGSSINTERPRODUKTTARGET UND HERSTELLUNGSVERFAHRENDAFÜR
    • EP1829985A4
    • 2008-06-04
    • EP05811469
    • 2005-11-29
    • NIPPON MINING CO
    • TAKAHASHI HIDEYUKI
    • C23C14/34C23C14/35G11B7/24G11B7/241G11B7/242G11B7/26
    • C22C12/00B22F1/0055B22F2998/10B22F2999/00C22C28/00C23C14/3414G11B7/2433G11B7/266G11B2007/24308G11B2007/2431G11B2007/24312G11B2007/24314G11B2007/24316B22F9/082B22F3/02B22F3/10B22F9/04
    • A sputtering target of Sb-Te alloy sintering product from atomized powder consisting of substantially spherical particles of an Sb-Te alloy, characterized in that the spherical atomized powder consists of particles having been flattened by crushing, and that flat particles exhibiting a ratio of minor axis to major axis (flattening degree) of ≤ 0.6 occupy ≥ 50% of the whole particles. Further, there is provided such a target of Sb-Te alloy sintering product characterized in that particles whose major axis directions align within ±45° against the direction parallel to target surface occupy ≥ 60% of the whole particles. Still further, there is provided such a target of Sb-Te alloy sintering product characterized in that the oxygen content of the target is ≤ 1500 wtppm. Thus, the structure of Sb-Te alloy sputtering target can be uniformalized and miniaturized, thereby inhibiting cracking of the sintered target and preventing arcing at the time of sputtering. Moreover, any surface ruggedness attributed to sputter erosion can be reduced, thereby enabling production of an Sb-Te alloy sputtering target of high quality.
    • 提供一种Sb-Te合金烧结体,其使用由Sb-Te合金的大致球状的粒子组成的雾化粉末,其中,所述球状雾化粉末由粉碎扁平的粒子构成,平坦化粒子的比例(平坦度比) 的短轴和长轴为0.6以下,占总粒子的50%以上。 利用该Sb-Te合金烧结体靶,在与靶表面平行的方向上排列在±45°以内的长轴取向的粒子占总体粒子的60%以上。 此外,该Sb-Te合金烧结体靶的氧浓度为1500重量ppm以下。 因此,可以使Sb-Te合金溅射靶结构均一化和细化,可以抑制烧结靶中的裂纹的产生,并且可以抑制溅射中的电弧放电。 此外,为了获得高质量的Sb-Te合金溅射靶,可以减少由溅射侵蚀引起的表面粗糙度。