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    • 35. 发明公开
    • Radiation hardened semiconductor memory
    • StrahlungsgeschützterHalbleiterspeicher
    • EP1083604A2
    • 2001-03-14
    • EP00307507.4
    • 2000-08-31
    • STMicroelectronics, Inc.
    • Chan, Tsiu C.Zamanian, Mehdi
    • H01L27/11H01L27/02H01L21/8244
    • H01L27/1104
    • A radiation hardened memory device having static random access memory cells includes active gate isolation structures placed in series with oxide isolation regions between the active regions of a memory cell array. The active gate isolation structure includes a gate oxide and polycrystalline silicon gate layer electrically coupled to a supply terminal resulting in an active gate isolation structure that prevents a conductive channel extending from adjacent active regions from forming. The gate oxide of the active gate isolation structures is relatively thin compared to the conventional oxide isolation regions and thus, will be less susceptible to any adverse influence from trapped charges caused by radiation exposure.
    • 具有静态随机存取存储器单元的辐射硬化存储器件包括与存储器单元阵列的有源区之间的氧化物隔离区域串联放置的有源栅极隔离结构。 有源栅极隔离结构包括电耦合到电源端的栅极氧化物和多晶硅栅极层,导致有源栅极隔离结构,其防止从相邻有源区域延伸的导电沟道形成。 与常规的氧化物隔离区域相比,有源栅极隔离结构的栅极氧化物相对较薄,因此不太容易受到由辐射暴露引起的俘获电荷的任何不利影响。
    • 39. 发明公开
    • Soft error immune CMOS static RAM cell
    • Gegen weiche FehlerbroadstandsfähigeCMOS-statische RAM-Speicherzelle。
    • EP0623932A2
    • 1994-11-09
    • EP94480022.6
    • 1994-03-08
    • International Business Machines Corporation
    • Wang, Wen-YuanKlaasen, William Alan
    • G11C11/412
    • H01L27/1104Y10S257/903
    • Soft error immunity of a storage cell is greatly increased by division of a storage node into at least two portions and location of those portions on opposite sides of an isolation structure, such as a well of a conductivity type opposite to that of the substrate in which transistors of the memory cell may also be formed. The isolation structure thus limits collection of charge to only one of the portions of the storage node and reduces charge collection efficiency to a level where a critical amount of charge cannot be collected in all but a statistically negligible number of cases when such charge is engendered by impingement by ionizing radiation, such as energetic alpha particles. The layout of the memory cell having this feature also advantageously provides a simplified topology for the formation of additional ports comprising word line access transistors and bit lines.
    • 存储节点被分成至少两个部分并且位于隔离结构的相对侧上,例如与其中也可形成存储器单元的晶体管的衬底相反的导电类型的阱。 隔离结构将电荷收集限制在存储节点的仅一个部分,并且将电荷收集效率降低到一个水平,其中在通过冲击产生这种电荷的情况下,除了统计上可忽略的数量之外,不能收集临界电荷量 通过电离辐射,例如能量α粒子。 具有该特征的存储单元的布局也有利地提供了用于形成包括字线访问晶体管和位线的附加端口的简化拓扑。