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21. 发明公开

EP4341980A1 ABERRATION CORRECTOR AND METHOD OF ALIGNING ABERRATION CORRECTOR 审中-实审
公开(公告)号：EP4341980A1
公开(公告)日：2024-03-27
申请号：EP22727327.3
申请日：2022-05-05
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： FIRNKES, Matthias , LAMPERSBERGER, Florian , BREUER, John , KEMEN, Thomas , PRAZOT OFENBURG, Shem Yehoyda
IPC分类号： H01J37/15 , H01J37/153

22. 发明公开

EP3703099A3 ION SOURCE AND CLEANING METHOD THEREOF 有权转让
公开(公告)号：EP3703099A3
公开(公告)日：2020-11-11
申请号：EP20157440.7
申请日：2020-02-14
申请人： Nissin Ion Equipment Co. Ltd.
发明人： ADACHI, Masakazu , HIRAI, Yuya , TANIGUCHI, Tomoya
IPC分类号： H01J37/08 , H01J37/09 , H01J37/15 , H01J37/317 , H01J37/304 , C23C14/48 , H01J27/02 , H01J37/32
摘要： An ion source includes a plasma chamber, and a suppression electrode disposed downstream of the plasma chamber, and is operable to irradiate the suppression electrode with an ion beam produced from a cleaning gas to clean the suppression electrode. Prior to cleaning, the ion source moves the suppression electrode or the plasma chamber in a first direction to increase a distance between the plasma chamber and the suppression electrode.

23. 发明授权

EP2997591B1 HIGH-SPEED MULTI-FRAME DYNAMIC TRANSMISSION ELECTRON MICROSCOPE IMAGE ACQUISITION SYSTEM WITH ARBITRARY TIMING 有权
公开(公告)号：EP2997591B1
公开(公告)日：2019-12-11
申请号：EP14731528.7
申请日：2014-02-14
申请人： Lawrence Livermore National Security, LLC
发明人： REED, Bryan W. , DEHOPE, William J. , HUETE, Glenn , LAGRANGE, Thomas B. , SHUTTLESWORTH, Richard M.
IPC分类号： H01J37/073 , H01J37/22 , H01J37/26 , H01J37/28 , H01J37/147 , H01J37/15

24. 发明授权

EP2757571B1 High-voltage insulation device for charged-particle optical apparatus 有权转让
标题翻译：用于带电粒子光学设备的高压绝缘装置
公开(公告)号：EP2757571B1
公开(公告)日：2017-09-20
申请号：EP14150119.7
申请日：2014-01-03
申请人： IMS Nanofabrication AG
发明人： Platzgummer, Elmar , Chylik, Andreas , Kratzert, Gerald , Oberleitner, Roman
IPC分类号： H01J37/02 , H01J37/04 , H01J37/15 , H01J37/317 , H01J37/147
CPC分类号： H01B17/14 , B82Y10/00 , B82Y40/00 , H01J37/023 , H01J37/04 , H01J37/147 , H01J37/15 , H01J37/3177 , H01J2237/036 , H01J2237/038 , H01J2237/1502

25. 发明公开

EP2997591A4 HIGH-SPEED MULTI-FRAME DYNAMIC TRANSMISSION ELECTRON MICROSCOPE IMAGE ACQUISITION SYSTEM WITH ARBITRARY TIMING 有权
标题翻译：具有多个框架和任意时间快，动态传输电子图像拍摄系统
公开(公告)号：EP2997591A4
公开(公告)日：2016-12-07
申请号：EP14731528
申请日：2014-02-14
申请人： L LIVERMORE NAT SECURITY LLC
发明人： REED BRYAN W , DEHOPE WILLIAM J , HUETE GLENN , LAGRANGE THOMAS B , SHUTTLESWORTH RICHARD M
IPC分类号： H01J37/073 , H01J37/147 , H01J37/15 , H01J37/22 , H01J37/26 , H01J37/28
CPC分类号： H01J37/073 , H01J37/10 , H01J37/147 , H01J37/21 , H01J37/22 , H01J37/265 , H01J37/28 , H01J2237/06333 , H01J2237/10 , H01J2237/15 , H01J2237/2626 , H01J2237/2802
摘要： An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses each being of a programmable pulse duration, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has a plurality of plates. A control system having a digital sequencer controls the laser and a plurality of switching components, synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to enable programmable pulse durations and programmable inter-pulse spacings.
摘要翻译：电子显微镜是游离缺失盘哪个具有激光驱动光电阴极和到任意波形发生器（AWG）激光系统（“激光”）。该激光器产生的可编程脉冲持续时间的每一个在时间上形激光脉冲序列，并ausrichtet激光脉冲的激光驱动光电阴极产生电子脉冲列。一种图像传感器，与偏转器子系统中使用沿。偏转器子系统被布置在所述靶的下游但图像传感器的上游，并且具有板的复数。具有数字定序器的控制系统控制激光和开关元件的复数，与激光同步，以unabhängig偏转板中的每一个的控制激励。这允许每个电子脉冲被引导到图像传感器的不同部分，以及使可编程的脉冲持续时间和可编程的脉冲间间隔。

26. 发明公开

EP2278607A3 Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät 有权转让
标题翻译：与屏幕单元和方法，用于在一个粒子束调整射束电流粒子束装置
公开(公告)号：EP2278607A3
公开(公告)日：2012-10-24
申请号：EP10170421.1
申请日：2010-07-22
申请人： Carl Zeiss NTS GmbH
发明人： Preikszas, Dirk , Albiez, Michael
IPC分类号： H01J37/09 , H01J37/28 , H01J37/15
CPC分类号： H01J37/09 , H01J37/15 , H01J37/265 , H01J37/28 , H01J2237/0455 , H01J2237/0492 , H01J2237/14 , H01J2237/2002 , H01J2237/26 , H01J2237/31749
摘要： Die Erfindung betrifft ein Teilchenstrahlgerät (1) mit einer ersten Blendeneinheit (8) mit verstellbarer Blendenöffnung. Ferner betrifft die Erfindung eine Blendeneinheit (8) für ein Teilchenstrahlgerät (1). Darüber hinaus betrifft die Erfindung ein Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät (1). Das Teilchenstrahlgerät (1) weist eine erste Kondensorlinse (6) mit einem ersten Pölschuh (6a) und einem zweiten Polschuh (6b) auf. Sowohl der erste Polschuh (6a) als auch der zweite Polschuh (6b) sind unabhängig voneinander relativ zu einer zweiten Blendeneinheit (9) justierbar. Die zweite Blendeneinheit (9) ist als eine Druckstufenblende ausgebildet, die einen ersten Bereich, in welchem ein Vakuum mit einem ersten Druck herrscht, und einen zweiten Bereich, in welchem ein Vakuum mit einem zweiten Druck herrscht, voneinander trennt. Das erfindungsgemäße Verfahren betrifft die Einstellung des Strahlstroms in diesem Teilchenstrahlgerät (1).

27. 发明授权

EP1178517B1 An ion beam apparatus 失效
标题翻译： Ionenstrahlgerät
公开(公告)号：EP1178517B1
公开(公告)日：2008-11-26
申请号：EP01203085.4
申请日：1996-07-19
申请人： APPLIED MATERIALS, INC.
发明人： Burgin, David Richard , Povall, Simon , Loome, David
IPC分类号： H01J37/15 , H01J37/08 , H01J27/02
CPC分类号： H01J27/022 , H01J27/08 , H01J37/08 , H01J37/15 , H01J2237/31701

28. 发明公开

EP1557866A1 Beam optical component having a charged particle lens 有权
标题翻译： Strahlenoptische Komponente mit einer teilchenoptischen Linse
公开(公告)号：EP1557866A1
公开(公告)日：2005-07-27
申请号：EP04001222.1
申请日：2004-01-21
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Frosien, Jürgen, Dr.
IPC分类号： H01J37/15 , H01J37/10 , H01J37/14
CPC分类号： H01J37/14 , H01J37/12 , H01J37/15 , H01J2237/1501
摘要： The present invention relates to a beam optical component including a charged particle lens (1; 1000) for focusing a charged particle beam (3), the charged particle lens (1; 1000) comprising a first element (5; 1005) having a first opening (7) for focusing the charged particle beam (3); a second element (9; 1009) having a second opening (11) for focusing the charged particle beam (3); and first driving means (13) connected with at least one of the first element (5; 1005) and the second element (9; 1009) for aligning the first opening (7) with respect to the second opening (11). With the first driving means, the first opening (7) and the second opening (11) can be aligned with respect to each other during beam operation to provide a superior alignment of the beam optical component for a better beam focussing. The present invention also relates to a charged particle beam device that uses said beam optical component for focussing the charged particle beam (3), and a method to align first opening (7) and second opening (11) with respect to each other.
摘要翻译：本发明涉及一种束光学部件，其包括用于聚焦带电粒子束（3）的带电粒子透镜（1; 1000），所述带电粒子透镜（1; 1000）包括具有第一元件（5; 1005）的第一元件用于聚焦带电粒子束（3）的开口（7）; 具有用于聚焦带电粒子束（3）的第二开口（11）的第二元件（9; 1009）; 以及与所述第一元件（5; 1005）和所述第二元件（9; 1009）中的至少一个连接的用于使所述第一开口（7）相对于所述第二开口（11）对准的第一驱动装置（13）。利用第一驱动装置，在光束操作期间，第一开口（7）和第二开口（11）可以相对于彼此对准，以提供光束光学部件的优良对准以实现更好的光束聚焦。本发明还涉及使用所述光束光学部件来聚焦带电粒子束（3）的带电粒子束装置，以及使第一开口（7）和第二开口（11）相对于彼此对准的方法。

29. 发明公开

EP1224682A1 WIDE PARAMETER RANGE ION BEAM SCANNERS 审中-公开
标题翻译：大面积参数ION RAY网格单位
公开(公告)号：EP1224682A1
公开(公告)日：2002-07-24
申请号：EP00968408.5
申请日：2000-09-26
申请人： Varian Semiconductor Equipment Associates Inc.
发明人： WALTHER, Steven, R. , WHITE, Nicholas, R.
IPC分类号： H01J37/317 , H01J37/15 , H01J37/147 , G21K1/087
CPC分类号： H01J37/1474 , G21K1/087 , H01J37/15 , H01J37/3171 , H01J2237/30483
摘要： Methods and apparatus are provided for scanning a charged particle beam. The apparatus includes scan elements and a scan signal generator for generating scan signals for scanning the charged particle beam in a scan pattern having a scan origin. In one embodiment, the apparatus includes a position controller for positioning the scan elements based on a parameter of the charged particle beam, such as energy. The scan elements may be positioned to achieve a fixed position of the scan origin for different beam energies. In another embodiment, the apparatus includes first and second sets of scan elements and a scan signal controller for controlling the scan signals supplied to the sets of scan elements based on a parameter of the charged particle beam, such as energy. The scan signal controller may control the ratio of the scan signals applied to the sets of scan elements, or may deenergize a set of scan elements, to minimize space charge forces on the charged particle beam that may reduce beam transmission through the apparatus.

30. 发明授权

EP0782763B1 AN ION BEAM APPARATUS 失效
标题翻译： IONENSTRAHLGERÄT
公开(公告)号：EP0782763B1
公开(公告)日：2002-06-26
申请号：EP96924984.6
申请日：1996-07-19
申请人： APPLIED MATERIALS, INC.
发明人： BURGIN, David, Richard , LOOME, David , POVALL, Simon
IPC分类号： H01J37/15 , H01J37/08 , H01J27/02
CPC分类号： H01J27/022 , H01J27/08 , H01J37/08 , H01J37/15 , H01J2237/31701
摘要： An ion beam apparatus comprises a source of ions (1), an evacuatable chamber (11), first and second electrodes (3, 5) disposed within the chamber for forming an ion beam from ions from the ion source, the first electrode being electrically insulated from the second electrode. At least one insulating member (31, 33), at least part of which is within the chamber provides the insulation, wherein a part of the insulating member is positioned adjacent the wall of the chamber. Alternatively, means for feeding coolant proximate the insulating member is provided to withdraw heat from the insulating member.

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