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    • 14. 发明公开
    • GROUP III NITRIDE SEMICONDUCTOR LASER ELEMENT, AND METHOD OF MANUFACTURING GROUP III NITRIDE SEMICONDUCTOR LASER ELEMENT
    • 葡萄糖酸三钠 - 硝酸盐 - 柠檬酸钠
    • EP2581996A1
    • 2013-04-17
    • EP10852927.2
    • 2010-12-27
    • Sumitomo Electric Industries, Ltd.
    • TAKAGI ShimpeiYOSHIZUMI YusukeKATAYAMA KojiUENO MasakiIKEGAMI Takatoshi
    • H01S5/343
    • H01S5/1085B82Y20/00H01L33/0045H01L33/16H01L33/32H01S5/0202H01S5/0208H01S5/2201H01S5/3202H01S5/3404H01S5/34333
    • Provided is a the method of fabricating the III-nitride semiconductor laser, which can improve the flatness of the cavity mirrors in the III-nitride semiconductor laser device and which can reduce the threshold current. The substrate product SP is positioned with respect to the edge 71b of the support device 71 such that the orientation of the scribed groove 65a of the substrate product SP1 is aligned with the direction in which the edge 71 b of the support device 71 extends. The substrate product SP is divided into a first region 70a and a second region 70b with respect to the reference line (X-coordinate A1) that extends along the edge 71b. The breakup of the substrate product SP by the press on the second region 70b is implemented while supporting the first region 70a by the support device 71, thereby forming the other substrate product SP1 and the laser bar LB 1. The direction of the edge 69a of the breaking device 69 is aligned with the direction that the edge 71b extends, and the edge 69a of the breaking device 69 is pressed on the substrate product SP from a direction intersecting with the second surface 63b.
    • 提供了一种制造III族氮化物半导体激光器的方法,其可以提高III族氮化物半导体激光器件中的腔镜的平坦度,并且可以降低阈值电流。 衬底产品SP相对于支撑装置71的边缘71b定位,使得衬底产品SP1的划线槽65a的取向与支撑装置71的边缘71b延伸的方向对准。 基板产品SP相对于沿着边缘71b延伸的基准线(X坐标A1)分为第一区域70a和第二区域70b。 在支撑装置71支撑第一区域70a的同时,通过压力机在第二区域70b上分解衬底产品SP,从而形成另一个衬底产品SP1和激光棒LB 1.边缘69a的方向 断开装置69与边缘71b延伸的方向对准,并且断开装置69的边缘69a从与第二表面63b相交的方向按压在基板产品SP上。