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    • 15. 发明公开
    • Hetero-junction bipolar transistor
    • 双极晶体管mitHeteroübergang。
    • EP0387010A2
    • 1990-09-12
    • EP90302391.9
    • 1990-03-06
    • MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
    • Inada, MasanoriRyoji, Akira
    • H01L29/73H01L29/62
    • H01L29/66318H01L21/28H01L29/7371
    • An object of the present invention is to suppress the surface recombination over the whole area of the external base of a hetero-junction bipolar transistor (HBT), to keep the current gain large, and to reduce the base contact resistance. The HBT of the invention has, as a surface protective film layer, a p-type semiconductor layer which has the higher portential of the energy conduction band than the base layer on an external base outside the junction between the mesa of the n-type emitter layer and the p-type base layer, and a base electrode thereon. Preferably, it has as a base contact layer a p-type semiconductor layer which shows reduced contact resistance with the base electrode on the surface protective layer comprising a p-type semiconductor layer. More preferabiy, it has a structure wherein a base electrode is formed on the base contact layer in contact with the projection part of the emitter electrode to the base contact layers A method of producing this HBT comprises at least the steps of forming an emitter mask on the portion to be an emitter on a multi-layer structure material having an n-type semiconductor layer for forming a collector, a p-type semiconductor layer or forming a base, and an n-type semiconductor layer for forming an emitter in this order from the substrate, and etching by using the emitter mask to form an emitter mesa and to expose a base layer; epitaxially forming as a surface protective film layer a p-type semiconductor layer which show the higher potential of the energy conduction band than the base layer on the external base outside the junction part between the emitter mesa and the base layer by using the emitter mask; and epitaxially forming a base electrode on the p-type surface protective film layer.
    • 本发明的目的是抑制异质结双极晶体管(HBT)的外部基极的整个区域的表面复合,以保持电流增益较大,并降低基极接触电阻。 本发明的HBT具有作为表面保护膜层的p型半导体层,该p型半导体层在n型发射极的台面之间的结外部的外部基底上具有比基底层更高的能量导带的突出率 层和p型基层,以及基极。 优选地,其具有作为基极接触层的p型半导体层,其在包括p型半导体层的表面保护层上显示出与基底电极的接触电阻降低。 更优选地,其具有这样的结构,其中在与基极接触层的发射极的突出部分接触的基底接触层上形成基极。制造该HBT的方法至少包括以下步骤:在 在具有用于形成集电体的n型半导体层,p型半导体层或形成基极的多层结构材料上的发射极部分和用于以此顺序形成发射极的n型半导体层 并且通过使用发射极掩模进行蚀刻以形成发射极台面并露出基底层; 通过使用发射体掩模,在发射极台面和基底层外部的外部基底外表面上形成表现出保护膜层的p型半导体层,该p型半导体层表现出比基底层更高的能量导电电位; 并在p型表面保护膜层上外延形成基极。
    • 16. 发明公开
    • Bipolar transistor and method of producing the same
    • 双极晶体管及其制造方法
    • EP0240307A3
    • 1989-12-27
    • EP87302784.1
    • 1987-03-31
    • MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
    • Inada, MasanoriEda, KazuoOta, YoritoNakagawa, AtsushiYanagihara, Manabu
    • H01L29/08H01L29/73
    • H01L29/66318H01L29/0804H01L29/41708H01L29/7371Y10S148/01Y10S148/072
    • A dummy emitter (a dummy collector, in inverted type) is formed in the portion corresponding to an emitter (a collector, in inverted type) region, on a multiplayer struc­tural material comprising layers for forming emitter, base and collector, and using it as mask, an external base region is exposed by etching, and a projection of emitter (collec­tor, in inverted type) region is formed, while the dummy emitter (the dummy collector, in inverted type) is inverted into an emitter (a collector, in inverted type) electrode, thereby forming an emitter (a collector, in inverted type) electrode metal layer to cover the whole upper surface of the emitter (the collector, in inverted type). Using thus formed emitter (collector, in inverted type) electrode metal layer, a base electrode metal layer is formed, by self-­alignment, adjacently to the emitter (the collector, in inverted type). In other method, on a multilayer structural material, impurities are introduced outside the portion corresponding to the base region of a bipolar transistor in order to insulate, at least, the layer to form the emitter, the layer to form the base, or at most, these layers and the layer to form the collector, and an extension type dummy emitter (dummy collector, in inverted type) extending from the emitter (collector, in inverted type) portion to the insulating region formed by transforming from the semicon­ductor material to form the emitter (the collector, in in­verted type), and using it as mask, the external base region is exposed to form a projection coupling the emitter region and insulating region, and the dummy emitter (the dummy collector, in inverted type) is inverted to transform into an emitter (a collector, in inverted type) electrode metal layer to cover the whole upper surface of the projection.