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    • 1. 发明授权
    • Method for thermal spray coating and rare earth oxide powder used therefor
    • 热喷涂法和稀土氧化物粉末的使用方法
    • US06733843B2
    • 2004-05-11
    • US10423903
    • 2003-04-28
    • Toshihiko TsukataniYasushi TakaiTakao Maeda
    • Toshihiko TsukataniYasushi TakaiTakao Maeda
    • C23C410
    • C23C4/11Y10T428/25Y10T428/26Y10T428/2982
    • The invention discloses an efficient method for the formation of a highly corrosion- or etching-resistant thermal spray coating layer of a rare earth oxide or rare earth-based composite oxide by a process of plasma thermal spray method by using a unique thermal spray powder consisting of granules of the oxide. The thermal spray granules are characterized by a specified average particle diameter of 5 to 80 &mgr;m with a specified dispersion index of 0.1 to 0.7 and a specified BET specific surface area of 1 to 5 m2/g as well as a very low content of impurity iron not exceeding 5 ppm by weight as oxide. The flame spat powder used here is characterized by several other granulometric parameters including globular particle configuration, particle diameter D90, bulk density and cumulative pore volume.
    • 本发明公开了一种通过使用独特的热喷涂粉末等离子体热喷涂方法形成稀土氧化物或稀土类复合氧化物的高耐腐蚀或耐蚀刻热喷涂层的有效方法, 的氧化物颗粒。 热喷雾颗粒的特征在于指定的平均粒径为5-80μm,指定的分散指数为0.1-0.7,指定的BET比表面积为1-5m 2 / g,并且含量非常低 的杂质铁作为氧化物不超过5ppm。 这里使用的火焰喷雾粉的特征在于几种其他粒度参数,包括球状颗粒构型,粒径D90,体积密度和累积孔体积。
    • 7. 发明授权
    • System and method for coating non-planar surfaces of objects with diamond film
    • 用金刚石膜涂覆物体的非平面表面的系统和方法
    • US06499426B1
    • 2002-12-31
    • US09460337
    • 1999-12-10
    • Henry WindischmannCecil B. Shepard, Jr.Donald O. Patten, Jr.
    • Henry WindischmannCecil B. Shepard, Jr.Donald O. Patten, Jr.
    • C23C410
    • C23C16/276C23C16/45591C23C16/513Y02T50/67
    • A system and method for depositing a CVD diamond coating on a non-planar surface of an object is provided. The system includes a deflector having a deflecting surface which resists diamond coating by the diamond forming reagents produced by the system and which is adapted to withstand the relatively high deposition temperatures is provided. The deflector is positioned substantially axially with an axis of the distribution head of the CVD engine. The deflector is preferably generally wedge-shaped or conical and coupled to a motor which is adapted to rotate the deflector at a relatively high speed. A mandrel may be positioned about or to one side of the deflector. The deflector is oriented with respect to the distribution head and the mandrel such that a jet exiting the distribution head is deflected by the deflector onto a surface of an object positioned on the mandrel. The object surface may be non-planar.
    • 提供了一种用于在物体的非平面表面上沉积CVD金刚石涂层的系统和方法。 该系统包括具有偏转表面的偏转器,该偏转表面通过由系统产生的金刚石形成试剂抵抗金刚石涂层,并且适于承受相对高的沉积温度。 偏转器基本上与CVD发动机的分配头的轴线轴向地定位。 偏转器优选地大致为楔形或锥形并且联接到电动机,其适于以相对高的速度旋转偏转器。 心轴可以定位在偏转器的大约或一侧。 偏转器相对于分配头和心轴定向,使得离开分配头的射流被偏转器偏转到位于心轴上的物体的表面上。 物体表面可以是非平面的。
    • 10. 发明授权
    • Protective layer for quartz crucibles used for silicon crystallization
    • 用于硅结晶的石英坩埚保护层
    • US06479108B2
    • 2002-11-12
    • US09944790
    • 2001-08-31
    • Alleppey V. HariharanMohan ChandraMichael CostantiniYuepeng Wan
    • Alleppey V. HariharanMohan ChandraMichael CostantiniYuepeng Wan
    • C23C410
    • B29C33/58C23C4/11C23C4/134C30B11/002C30B15/10C30B35/002
    • A thermodynamically stable, protective coating layer is applied by thermal spray technique to the inner and outer surfaces of a quartz crucible used for mono or polycrystalline silicon crystallization processing, inhibiting fusion between the silicon melt and the vitreous silica of the crucible, contamination of the silicon melt by contaminants released from the crucible by devitrification, and any chemical reaction occurring between the crucible and any supporting graphite structure. A powdered form of a suitable protective coating material compatible with high temperature plasma spray techniques, such as magnesium zirconate, barium zirconate, or stabilized zirconium oxide, is fed into a high temperature and high speed plasma jet directed at the crucible. The powder particles are softened or melted in the jet and deposited on the surfaces of the quartz crucible, and allowed to cool and harden into a protective coating.
    • 通过热喷涂技术将热力学稳定的保护涂层施加到用于单晶或多晶硅结晶处理的石英坩埚的内表面和外表面,抑制硅熔体与坩埚的玻璃状二氧化硅之间的熔合,硅的污染 由于通过失透而从坩埚中释放的污染物熔化,以及在坩埚和任何支撑石墨结构之间发生的任何化学反应。 与诸如锆酸镁,锆酸锆或稳定的氧化锆的高温等离子喷涂技术相容的合适的保护涂层材料的粉末形式被供给到指向坩埚的高温和高速等离子体射流中。 粉末颗粒在射流中软化或熔化并沉积在石英坩埚的表面上,并使其冷却并硬化成保护涂层。