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    • 1. 发明授权
    • Method for etching insulating film and method for manufacturing semiconductor optical device
    • 绝缘膜的蚀刻方法及半导体光学元件的制造方法
    • US08652862B2
    • 2014-02-18
    • US13223586
    • 2011-09-01
    • Yukihiro Tsuji
    • Yukihiro Tsuji
    • H01L21/00
    • H01S5/12H01S5/2086H01S5/2222H01S5/2275
    • A method for etching an insulating film includes the steps of forming an insulating film; forming a first resin layer composed of a non-silicon-containing resin on the insulating film; forming a pattern including projections and recesses in the first resin layer; forming a second resin layer composed of a silicon-containing resin to cover the projections and the recesses of the pattern in the first resin layer; etching the second resin layer by reactive ion etching with etching gas containing CF4 gas and oxygen gas until the projections of the first resin layer are exposed, a Si component of the second resin layer being oxidized in etching the second resin layer; selectively etching the first resin layer until the insulating film is exposed using as a mask the second resin layer buried in the recesses of the first resin layer to form a resin layer mask; and etching the insulating film using the resin layer mask. Further, in the step of etching the second resin layer, the reactive ion etching is performed under applying a self-bias voltage so that a Si product is removed, the Si product being provided from the Si component remaining in the second resin layer without being oxidized.
    • 蚀刻绝缘膜的方法包括形成绝缘膜的步骤; 在绝缘膜上形成由非含硅树脂构成的第一树脂层; 在第一树脂层中形成包括凸起和凹陷的图案; 形成由含硅树脂构成的第二树脂层,以覆盖第一树脂层中的图案的突起和凹部; 用包含CF 4气体和氧气的蚀刻气体进行反应离子蚀刻来蚀刻第二树脂层,直到第一树脂层的突起露出,第二树脂层的Si成分在蚀刻第二树脂层时被氧化; 选择性地蚀刻第一树脂层直到绝缘膜作为掩模曝露在第一树脂层的凹陷中的第二树脂层以形成树脂层掩模; 并使用树脂层掩模蚀刻绝缘膜。 此外,在蚀刻第二树脂层的步骤中,在施加自偏压下进行反应离子蚀刻,从而除去Si产物,Si产物由残留在第二树脂层中的Si成分提供而不是 氧化
    • 3. 发明授权
    • Optical transmitter with a digitally controlled bias and modulation currents for a laser diode
    • 具有激光二极管数字控制偏置和调制电流的光发射机
    • US07426224B2
    • 2008-09-16
    • US11790073
    • 2007-04-23
    • Hiroto Ishibashi
    • Hiroto Ishibashi
    • H01S3/13H01S3/00
    • H01S5/06832H01S5/0427H01S5/0617
    • The present invention is to provide an optical transmitter that installs a laser diode and a circuit to control currents supplied to the laser diode, and reduces the size of the control circuit. The transmitter includes an LD, an LD-Driver, a monitor PD, and a control unit that outputs two data for the bias and modulation currents to the driver based on the photocurrent. The control unit provides a memory whose addresses correspond to the bias current, while a data for the modulation current is set within an address of the memory. Accordingly, the control unit adjusts the bias current so as to maintain the photocurrent constant and outputs the data for the modulation current to the driver by reading information stored in the address corresponding to the bias current.
    • 本发明提供一种光发射机,其安装激光二极管和电路来控制提供给激光二极管的电流,并减小控制电路的尺寸。 发射器包括LD,LD驱动器,监视器PD和控制单元,其基于光电流向驾驶员输出偏置和调制电流的两个数据。 控制单元提供其地址对应于偏置电流的存储器,而调制电流的数据被设置在存储器的地址内。 因此,控制单元调节偏置电流以保持光电流恒定,并通过读取存储在与偏置电流相对应的地址中的信息将调制电流的数据输出到驱动器。
    • 5. 发明申请
    • PROTECTOR AND WIRING HARNESS WITH PROTECTOR
    • 保护器和配线保护器
    • US20160156165A1
    • 2016-06-02
    • US14900333
    • 2014-06-11
    • AUTONETWORKS TECHNOLOGIES, LTD.SUMITOMO WIRING SYSTEMS, LTD.SUMITOMO ELECTRIC INDUSTRIES, LTD.
    • Shigeto KATOUAtsushi MURATA
    • H02G3/00H01B7/00
    • H02G3/26B60R16/0215H01B7/0045H02G3/0487
    • It is aimed to provide a technology capable of partially easily bending and deforming a wiring harness accommodated in a protector without introducing a hot-pressing machine for forming a shape capable of accommodating a wiring harness at a manufacturing side for wiring harnesses. To achieve this object, a protector includes an accommodating portion formed of a sheet material obtained by partially pressing a flexible sheet-like nonwoven material containing basic fibers and a binder having a lower melting point than the basic fibers from opposite sides and heating at least one surface of a pressed part, thereby having a cured partial area, and having an internal space capable of accommodating a wiring harness. The accommodating portion includes a hard portion and a soft portion softer than the hard portion along a longitudinal direction.
    • 其目的在于提供一种技术,其能够部分地容易地弯曲和变形容纳在保护器中的线束,而不引入用于形成能够容纳用于线束的制造侧的线束的形状的热压机。 为了实现该目的,保护器包括由片材制成的容纳部分,其通过从相对侧部分地压制含有碱性纤维的柔性片状非织造材料和具有比碱性纤维更低的熔点的粘合剂而获得,并加热至少一种 被加压部件的表面,从而具有固化的局部区域,并且具有能够容纳线束的内部空间。 容纳部分包括硬的部分和比纵向更硬的软部分。
    • 7. 发明授权
    • Rotary connection unit
    • 旋转连接单元
    • US6116930A
    • 2000-09-12
    • US210934
    • 1998-12-15
    • Tomoyuki Sakata
    • Tomoyuki Sakata
    • B60R16/027H01R35/02H01R35/04H02G11/02
    • H01R35/025
    • A rotary connection unit includes a fixed-side member, a rotary-side member rotatable to the fixed-side member around a central rotational axis, the rotary-side member and the fixed-side member defining an annular space, and a cable received in the space in such a manner that one end portion thereof is held by the fixed-side member, and the other end portion thereof is held by the rotary-side member. The space has a winding surface on which the cable is wound to a predetermined direction at a predetermined taper angle with respect to the central rotational axis. The cable is received in the space in such a manner that the cable is folded back midway so that the cable is wound to a direction opposite to the predetermined direction.
    • 旋转连接单元包括固定侧构件,围绕中心旋转轴线可旋转到固定侧构件的旋转侧构件,旋转侧构件和限定环形空间的固定侧构件以及容纳在其中的电缆 该空间的一端部被固定侧构件保持,另一端部被旋转侧构件保持。 该空间具有卷绕表面,电缆以相对于中心旋转轴线以预定的锥角卷绕到预定方向。 电缆以这样的方式容纳在空间中,使得电缆在中间折回,使得电缆沿与预定方向相反的方向缠绕。