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    • 4. 发明授权
    • Exposure device and exposure control method
    • 曝光装置和曝光控制方法
    • US4716442A
    • 1987-12-29
    • US832436
    • 1986-02-24
    • Yoshio Yazaki
    • Yoshio Yazaki
    • G03B27/54G03B27/72G03F7/20H05K3/00
    • G03F7/70058G03B27/72H05K3/0082
    • In an exposure device, the light rays emitted from a light source and radiated at an illumination surface, the light rays directly incident to the illuminated surface, the light rays incident to the illuminated surface at greater angles of incidents and the light rays which cause the overexposure of the object to be exposed are interrupted by an optical shielding plate interposed between the light source and the illuminated surface so that the unwanted light rays can be cut-off.The illuminated surface has a specific illumination distribution pattern inherent to the light source used so that the integrated quantities of light rays each incident to each point on the surface of the object to be exposed do not become uniform. According to the present invention, the object to be exposed or reciprocated across the illuminated surface and the angular position of the light sources varied in the forward and return strokes so that the illumination distribution pattern of the exposure light emitted from the light source is also varied. In addition, upon rotation of the light source an angle of incidents of each exposure light ray which is not perpendicular to the surface of the object to be exposed is inclined to the opposite direction to the surface of the object to be exposed.
    • 在曝光装置中,从光源发射并在照明面发射的光线,直接入射到被照射面的光线,以更大的入射角入射到被照射面的光线, 曝光物体的过度曝光被介于光源和照射表面之间的光屏蔽板中断,从而可以切断不想要的光线。 被照射的表面具有所使用的光源固有的特定照明分布图案,使得每个入射到被曝光物体表面上的每个点的光线的积分量不变得均匀。 根据本发明,在被照射的表面上被曝光或往复运动的物体和光源的角度位置在前进和返回行程中变化,使得从光源发射的曝光光的照明分布图案也变化 。 此外,在光源旋转时,不垂直于被曝光物体的表面的每个曝光光线的事件角度倾斜于与被曝光物体的表面相反的方向。
    • 8. 发明授权
    • Transfer type each-side exposure apparatus
    • 转印式各面曝光装置
    • US4721980A
    • 1988-01-26
    • US870357
    • 1986-06-04
    • Yoshio Yazaki
    • Yoshio Yazaki
    • G03F7/20H05K3/00G03B27/32G03B27/52
    • G03F7/2022
    • Disclosed is a transfer type each-side exposure apparatus which comprises light sources which oppose each other and transfer means which transfer materials to be exposed between the light sources. In one aspect, the apparatus further comprises light shielding means which prevent the passage of the light rays for irradiation as required, and control means which controls the actuation of the light shielding means. In another aspect, the apparatus further comprises reflectors which consist each of a cold mirror. In still another aspect, the apparatus is such that the light sources are each disposed in a manner that a cathode constituting its light emitting portion is displaced by a small distance from one of focal points of a corresponding reflector provided in the light source.
    • 公开了一种转印型的每一侧曝光装置,其包括彼此相对的光源和转印装置,其转印要在光源之间曝光的材料。 一方面,该装置还包括防止根据需要照射光线通过的遮光装置和控制遮光装置的致动的控制装置。 在另一方面,该装置还包括由冷镜组成的反射器。 另一方面,该装置是这样的,每个光源各自以构成其发光部分的阴极相对于设置在光源中的相应反射器的焦点之一的距离偏移的方式设置。
    • 9. 发明授权
    • Printing apparatus
    • 印刷装置
    • US4565443A
    • 1986-01-21
    • US656924
    • 1984-10-02
    • Yoshio Yazaki
    • Yoshio Yazaki
    • G03B27/02G03B27/04G03F7/20H01L21/027H05K3/00
    • G03B27/04H05K3/0082
    • A printing apparatus for exposing works, such as printed circuit boards, to light uses a pallet in which a number of works and at least one associated mask are stored. The works are located in stacked relation to one another. The mask is located above the works. The printing apparatus comprises an exposure device including light sources and transparent plates, an admitting device for holding the pallet in an access position and for holding the uppermost one of the mask and works in the pallet at a certain height, a conveying device including a rail extending from the access position to a takeout position past an exposure position at which an exposure operation is performed, and an attraction device including attraction plates having a number of attraction pads mounted to the underside thereof for attracting and holding the mask and works. Each attraction plate is vertically movable while keeping a horizontal posture. The conveying device further includes two cases one of which can reciprocate between the access position and the exposure position along the rail, the other being capable of reciprocating between the exposure position and the takeout position along the rail.
    • 用于将诸如印刷电路板的工作曝光的打印设备使用其中存储有多个作品和至少一个相关联的掩模的托盘。 作品相互重叠。 面具位于作品的上方。 该打印装置包括一个包括光源和透明板的曝光装置,一个用于将托盘保持在进入位置并用于保持最上面的一个面罩并在一定高度上工作在托盘中的允许装置,一个包括导轨 从进入位置延伸到经过曝光操作的曝光位置的取出位置;以及吸引装置,其包括具有安装在其下侧的用于吸引和保持面罩的吸引垫的数量的吸引板并进行工作。 每个吸引板在保持水平姿势的同时可垂直移动。 输送装置还包括两个壳体,其中一个可沿着轨道在进入位置和曝光位置之间往复运动,另一个能够沿着轨道在曝光位置和取出位置之间往复运动。
    • 10. 发明授权
    • Annular light source unit using electrodeless discharge and a method of
lighting the same
    • 使用无电极放电的环形光源单元及其照明方法
    • US4866351A
    • 1989-09-12
    • US182449
    • 1988-04-18
    • Yoshio Yazaki
    • Yoshio Yazaki
    • H05B41/24F21S2/00H01J65/04H05B41/16
    • H05B41/16
    • Disclosed are an annular light source unit using electrodeless discharge and a method of lighting the same. The unit comprises an annular electrodeless discharge tube, a bowl-shaped microwave cavity device, and a plurality of microwave oscillators. The cavity unit is disposed in such a manner as to cover substantially the whole outer surface of the discharge tube excluding an underside thereof. The unit has slit antennas at a plurality of portions thereof prepared by dividing into substantially equal parts a whole circumferential portion thereof facing a whole circumferential surface of the discharge tube. The method comprises the step of individually sequentially starting the operations of the microwave oscillators after the stabilization of the discharge at a portion of the discharge tube in the vicinity of the corresponding slit antenna due to supply, therefrom, of microwave powers transmitted from the immediately preceding microwave oscillator.
    • 公开了一种使用无电极放电的环形光源单元及其照明方法。 该单元包括环形无电极放电管,碗状微波腔装置和多个微波振荡器。 空腔单元以除了其下侧以外的基本上覆盖放电管的整个外表面的方式设置。 该单元在其多个部分具有狭缝天线,其通过将面向放电管的整个圆周表面的整个周边部分分成大致相等的部分而制备。 该方法包括以下步骤:在相应的狭缝天线附近在放电管的一部分处的放电稳定之后,分别依次启动微波振荡器的操作,从而提供从前一个发送的微波功率 微波振荡器。