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    • 3. 发明授权
    • Coating solution for silica-based coating film and method for the
preparation thereof
    • 二氧化硅系涂膜用涂布液及其制备方法
    • US5762697A
    • 1998-06-09
    • US749845
    • 1996-11-15
    • Yoshinori SakamotoYoshio HagiwaraToshimasa Nakayama
    • Yoshinori SakamotoYoshio HagiwaraToshimasa Nakayama
    • C08G77/06C08J3/09C09D183/04H01L21/316C09D183/06
    • C08J3/095C08G77/06C09D183/04C08J2383/04
    • Proposed is a coating solution for the formation of a silica-based coating film on the surface of a substrate used in the manufacturing process of semiconductor devices as well as a method for the coating solution, which exhibits excellent storage stability without gelation and is capable of forming a silica-based coating film free from the troubles due to evolution of gases such as crack formation even when the coating film has a relatively large thickness. The coating solution is prepared by the hydrolysis reaction of a trialkoxy silane such as triethoxy silane dissolved in propyleneglycol dimethyl ether in a specified concentration with addition of a specified amount of water followed by removal of the alcohol formed by the hydrolysis reaction of the trialkoxy silane by distillation to such an extent that the content of the alcohol in the coating solution does not exceed 10% by weight or, preferably, 3% by weight.
    • 提出了用于在半导体器件的制造工艺中使用的基板表面上形成二氧化硅基涂膜的涂布溶液以及涂布溶液的方法,其表现出优异的储存稳定性而没有凝胶化,并且能够 形成即使当涂膜具有相对较大的厚度时也由于诸如裂纹形成等气体的析出而无法解决的二氧化硅系涂膜。 通过加入特定量的水,然后除去由三烷氧基硅烷的水解反应形成的醇,通过溶解在规定浓度的丙二醇二甲醚中的三烷氧基硅烷如三乙氧基硅烷等水解反应制备涂布溶液, 蒸馏到使涂布溶液中的醇的含量不超过10重量%,优选3重量%的程度。