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    • 9. 发明授权
    • Machining error correction apparatus
    • 加工纠错装置
    • US5405285A
    • 1995-04-11
    • US187769
    • 1994-01-28
    • Yoshihiro HiranoAtsushi Ozaki
    • Yoshihiro HiranoAtsushi Ozaki
    • B23Q15/04B24B49/02B24B49/03C30B33/00G05B19/401G05B19/418H01L21/304B24B1/02
    • C30B29/06B24B49/02C30B33/00G05B19/401G05B19/4189Y02P90/10Y02P90/28
    • The diameter, the orientation flat width/notch depth and the length of the block 10p are measured by the measuring devices 71a, 71b and 71c respectively and then the machining errors .DELTA.Dp, .DELTA.Wp and .DELTA.Lp in the measured values against the set values are calculated at the error calculation unit 833. Then .DELTA.Dp, .DELTA.Wp and .DELTA.Lp are stored in memory at the memory unit 834 in correspondence with the identification codes IDi and IDj of the grinding device 5i (i=1-N) and the cutting device 6j (j=1-M) that performed the machining. Then at the average value calculation unit 835, the average values of .DELTA.Dp and .DELTA.Wp for each of the grinding devices 51-5N and the average value of the .DELTA.Lp for each of the cutting devices 61-6M are calculated. The average values of .DELTA.Dp and .DELTA.Wp are supplied to the corresponding grinding device 5i as the diameter correction value and the width/depth correction value respectively and the average value of .DELTA.Lp is sent to the corresponding cutting device 6j as the length correction value from the transmission unit 836.
    • 通过测量装置71a,71b和71c测量直径,取向平坦宽度/切口深度和块10p的长度,然后根据设定值测量测量值中的加工误差DELTA Dp,DELTA Wp和DELTA Lp 在误差计算单元833处计算。然后,DELTA Dp,DELTA Wp和DELTA Lp根据研磨装置5i(i = 1-N)的识别码IDi和IDj存储在存储器单元834的存储器中,并且 切割装置6j(j = 1-M)进行加工。 然后在平均值计算单元835中,计算每个研磨装置51-5N的DELTA Dp和DELTA Wp的平均值以及每个切割装置61-6M的DELTA Lp的平均值。 将DELTA Dp和DELTA Wp的平均值作为直径校正值和宽度/深度校正值分别提供给相应的研磨装置5i,并且将DELTA Lp的平均值发送到相应的切割装置6j作为长度校正值 从传输单元836。