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1. 发明授权

US4930890A Method and apparatus for detecting through-hole voids in multi-layer printed wiring board 失效
标题翻译：用于检测多层印刷电路板中的通孔空隙的方法和装置
公开(公告)号：US4930890A
公开(公告)日：1990-06-05
申请号：US210097
申请日：1988-06-22
申请人： Yasuhiko Hara , Kenzo Endo
发明人： Yasuhiko Hara , Kenzo Endo
IPC分类号： G01N21/88 , G01N21/64 , G01N21/956 , G01R31/28 , G01R31/309 , H05K3/00 , H05K13/08
CPC分类号： G01R31/309 , G01N21/95692 , G01R31/2806 , H05K13/08 , G01N2021/8887 , G01N2021/95653 , G01N21/64 , G01N2201/102
摘要： A method and apparatus for detecting through-hole voids in a multi-layer printed circuit board. The through-hole is formed with an electrical conductor for interconnecting wiring patterns of upper layers and wiring patterns of lower layers of the printed wiring board and is illuminated with a beam having a wavelength falling within a specified wavelength band capable of exciting an luminescent beam from a layer material. The layer material is exposed by a through-hole void in the through-hole of the printed wiring board. The luminescent beam excited by the illumination beam impinging upon the layer material by way of the through-hole void in the through-hole is focussed by means of a focussing optical system and a photoelectric converter. The photoelectric converter converts the luminescent beam into an electrical signal. The presence of a through-hole void is indicated by the electrical signal.
摘要翻译：一种用于检测多层印刷电路板中的通孔空隙的方法和装置。通孔形成有电导体，用于互连印刷线路板的上层的布线图案和下层的布线图案，并且用波长落在能够激发发光束的规定波长带内的波长照射一层材料。层状材料通过印刷电路板的通孔中的通孔空洞露出。由通过通孔中的通孔空穴撞击在层材料上的照明光束激发的发光束通过聚焦光学系统和光电转换器聚焦。光电转换器将发光束转换为电信号。电气信号表示通孔空隙的存在。

2. 发明授权

US5684349A Electromagnetic rotary actuator 失效
标题翻译：电磁旋转执行器
公开(公告)号：US5684349A
公开(公告)日：1997-11-04
申请号：US498544
申请日：1995-07-05
申请人： Yasuhiko Hara , Fumihiko Tsuji , Katsuhito Miyoshi
发明人： Yasuhiko Hara , Fumihiko Tsuji , Katsuhito Miyoshi
IPC分类号： B60G17/015 , F16F9/46 , H02K7/102 , H02K26/00 , H02K37/12 , H02K37/22 , H02K7/10 , H02K33/00
CPC分类号： H02K7/102 , B60K37/06 , H02K26/00 , B60K2350/102
摘要： A ring rotor is supported free to rotate in a housing, and a plurality of magnets are provided on the inner circumference of the ring rotor having their N and S poles oriented alternately. A stator is fixed to the housing on the inner side of the ring rotor, this stator having a plurality of coils. A switch is provided in the energizing path of the coils, and a mechanism for stopping the ring rotor at a predetermined rotation position is also provided. When one of the coils is energized via the switch, the ring rotor is caused to rotate, and is then held by the stop mechanism. Since the coils are not energized after the operation, power is economized, and burning of the coils is prevented.
摘要翻译：环形转子被支撑在壳体中自由旋转，并且多个磁体设置在环形转子的内圆周上，其中N和S极交替地取向。定子在环形转子的内侧固定在壳体上，该定子具有多个线圈。在线圈的通电路径中设置开关，并且还提供用于将环形转子停止在预定旋转位置的机构。当其中一个线圈通过开关通电时，使环转子旋转，然后由止动机构保持。由于在操作之后线圈不通电，因此节电，并且防止线圈的燃烧。

3. 发明授权

US5331407A Method and apparatus for detecting a circuit pattern 失效
标题翻译：用于检测电路图案的方法和装置
公开(公告)号：US5331407A
公开(公告)日：1994-07-19
申请号：US845723
申请日：1992-03-04
申请人： Hideaki Doi , Yasuhiko Hara , Koichi Karasaki
发明人： Hideaki Doi , Yasuhiko Hara , Koichi Karasaki
IPC分类号： G01B11/24 , G01B11/245 , G01N21/88 , G01N21/93 , G01N21/956 , G06T1/00 , H01L21/66 , H05K3/00 , G01B7/00
CPC分类号： G01N21/956
摘要： A method and apparatus for detecting a circuit pattern comprise a stage for mounting an object under inspection having a circuit pattern to be detected, means of generating a signal in response to the amount of movement of the stage, a detection optical system for detecting the circuit pattern, an opto-electric transducer which receives the image of the pattern provided by the detection optical system and transforms the image into an image signal, means of calculating the amount of expansion or contraction of the object by detecting the distance between specific patterns on the object, and drive control means which produces a clock signal for the opto-electric transducer based on the stage movement signal provided by the signal generation means and varies the clock signal so as to vary the dimension of the detected image arbitrarily.
摘要翻译：用于检测电路图案的方法和装置包括用于安装被检测物体的载台，该载物台具有要检测的电路图案，响应于载物台的移动量产生信号的装置，用于检测电路的检测光学系统图案，光电换能器，其接收由检测光学系统提供的图案的图像并将图像转换为图像信号;通过检测物体的特定图案之间的距离来计算物体的膨胀或收缩量的装置物体和驱动控制装置，其基于由信号发生装置提供的级移动信号产生用于光电换能器的时钟信号，并且改变时钟信号以便任意地改变检测图像的尺寸。

4. 发明授权

US5146509A Method of inspecting defects in circuit pattern and system for carrying out the method 失效
标题翻译：检查电路图形缺陷的方法和执行该方法的系统
公开(公告)号：US5146509A
公开(公告)日：1992-09-08
申请号：US575380
申请日：1990-08-28
申请人： Yasuhiko Hara , Mitsuyoshi Koizumi , Shigeki Kitamura
发明人： Yasuhiko Hara , Mitsuyoshi Koizumi , Shigeki Kitamura
IPC分类号： H05K3/00 , G01R31/308 , G06T7/00 , H01L21/66
CPC分类号： G06T7/001 , G01R31/308 , G06T2207/30141
摘要： A circuit pattern to be inspected is imaged so that an image signal representing the circuit pattern to be inspected is produced. The image signal of the circuit pattern is compared with a reference circuit pattern image signal, wherein a part of the image signal discerned to be different from the latter is detected as a candidate defect, at a rate synchronized with the rate of imaging. A local image signal corresponding to each local image covering a region including every one of detected candidate defects is extracted and stored in a memory device. Thereafter, on the basis of the local image signal read out from the memory device, whether or not the candidate defect concerned is fatally harmful with regard to electrical conductivity is examined at a rate asynchronous with the imaging rate.
摘要翻译：对要检查的电路图案进行成像，从而产生表示要检查的电路图案的图像信号。将电路图案的图像信号与参考电路图案图像信号进行比较，其中识别为不同于后者的图像信号的一部分以与成像速率同步的速率被检测为候选缺陷。提取与对应于覆盖包含检测到的候选缺陷中的每一个的区域的每个局部图像相对应的局部图像信号，并将其存储在存储装置中。此后，基于从存储装置读出的本地图像信号，以与成像速率异步的速率来检查有关的候选缺陷是否对导电性有害。

5. 发明授权

US4962541A Pattern test apparatus 失效
标题翻译：图案测试仪
公开(公告)号：US4962541A
公开(公告)日：1990-10-09
申请号：US154239
申请日：1988-02-10
申请人： Hideaki Doi , Yasuhiko Hara , Akira Sase , Satoshi Shinada
发明人： Hideaki Doi , Yasuhiko Hara , Akira Sase , Satoshi Shinada
IPC分类号： H01L21/66 , G01N21/88 , G01N21/93 , G01N21/956 , G06T1/00 , G06T7/00
CPC分类号： G06T7/001 , G01N21/95607 , G03F1/84 , G06T2207/30148
摘要： Disclosed is a pattern test apparatus for detecting a fault on the basis of comparison/collation between a test reference pattern and a test target pattern, the apparatus being arranged such that a picture element area is defined by a circle with a predetermined radius on a reference matter having at test reference pattern, and when the number of the picture elements located on the reference pattern is larger than the number of the picture elements located outside the reference pattern, a part of the reference pattern corresponding to a picture element located in the center of the circle is deleted. By such an arrangement, the test reference pattern can be made analogous to the real test target pattern regardless of the shape thereof, so that misjudgment of a normal test target pattern for a fault pattern can be prevented.
摘要翻译：公开了一种用于基于测试参考图案和测试对象图案之间的比较/对照来检测故障的图案测试设备，该设备被布置为使得图像元素区域由参考上的预定半径的圆圈定义具有测试参考图案的物体，并且当位于参考图案上的像素的数量大于位于参考图案外部的图像元素的数量时，与位于中心的图像元素相对应的参考图案的一部分的圈子被删除。通过这样的布置，可以使测试参考图案与实际测试对象图案类似，而不管其形状如何，从而可以防止对故障图案的正常测试对象图案的误判。

6. 发明授权

US4614430A Method of detecting pattern defect and its apparatus 失效
标题翻译：检测图案缺陷及其设计的方法
公开(公告)号：US4614430A
公开(公告)日：1986-09-30
申请号：US604998
申请日：1984-04-27
申请人： Yasuhiko Hara , Yoshimasa Ohshima , Satoru Fushimi , Hiroshi Makihira
发明人： Yasuhiko Hara , Yoshimasa Ohshima , Satoru Fushimi , Hiroshi Makihira
IPC分类号： G01N21/956 , G06T7/00 , G01N21/88
CPC分类号： G06T7/001 , G01N21/95607 , G06T2207/10056 , G06T2207/30148
摘要： A pattern defect is detected in accordance with the difference between a pair of patterns. The patterns are scanned and imaged to obtain first and second binary signals. A positioning error between the patterns is two-dimensionally detected during the scanning with respective first and second binary signals delayed by a prescribed amount so that each of the picture elements in a prescribed area of a two-dimensional image, delayed and cut out two-dimensionally, corresponding to one pattern, is compared with a specified picture element in a predetermined area of an image delayed and cut out two-dimensionally corresponding to another pattern. The result of the comparison is statistically summed to derive a positioning error by detecting the position shown as an extreme value from the summed values. The positioning error is corrected by two-dimensionally shifting at least one of the delayed binary signals. The corrected binary signals are then two-dimensionally compared with each other.
摘要翻译：根据一对图案之间的差异来检测图案缺陷。扫描和成像图案以获得第一和第二二进制信号。在扫描期间，以相应的第一和第二二进制信号延迟规定量的二维检测图案之间的定位误差，使得二维图像的规定区域中的每个图像元素被延迟和切出二维图像，对应于一个图案的尺寸与在与另一图案对应地延迟和切出的图像的预定区域中的指定图像元素进行比较。比较的结果被统计学地相加以通过从求和值中检测显示为极值的位置来导出定位误差。通过二维移位延迟的二进制信号中的至少一个来校正定位误差。然后将校正后的二进制信号二维地进行比较。

7. 发明授权

US5930382A Wiring pattern inspecting method and system for carrying out the same 失效
标题翻译：接线方式检查方法和系统进行
公开(公告)号：US5930382A
公开(公告)日：1999-07-27
申请号：US645475
申请日：1996-05-13
申请人： Yoko Irie , Hideaki Doi , Yasuhiko Hara , Tadashi Iida , Yasuhiro Fujishita , Yasuo Nakagawa , Takanori Ninomiya
发明人： Yoko Irie , Hideaki Doi , Yasuhiko Hara , Tadashi Iida , Yasuhiro Fujishita , Yasuo Nakagawa , Takanori Ninomiya
IPC分类号： G01N23/04 , G01N21/88 , G01N21/956 , G01N29/04 , G01R31/02 , G06T7/00 , H05K3/00 , G06K9/00 , G06K9/32 , G06K9/42
CPC分类号： G06T7/0004 , G06T2207/10116 , G06T2207/20044 , G06T2207/30141
摘要： A wiring pattern inspecting method comprises irradiating a test object provided with wiring patterns formed in a plurality of layers with x-rays, obtaining a variable-density image signal corresponding to the thickness of the wiring patterns superposed in a plurality of layers including superposed sections of the wiring patterns, extracting a plurality of image signals, the number of which corresponding to that of the superposed wiring patterns, from the variable-density image signal, and comparing end point information or isolated point information about the wiring patterns obtained from image signal representing a larger number of superposed wiring patterns, and branch information about the end points or the isolated points on the wiring points, obtained from the extracted image signal representing a smaller number of superposed wiring patterns to inspect the wiring patterns for defects in the wiring patterns. The wiring pattern inspecting method is carried out by a wiring pattern inspecting system.
摘要翻译：布线图案检查方法包括用X射线照射设置有多层的布线图案的测试对象，获得与叠加在多个层中的布线图案的厚度相对应的可变密度图像信号，所述多个层包括叠加部分布线图案，从可变密度图像信号中提取与叠加布线图案的数量相对应的多个图像信号的数量，以及比较从表示的图像信号获得的布线图案的终点信息或孤立点信息从提取的图像信号中获得的表示较少数量的叠加布线图案以检查布线图案中的布线图案中的缺陷的叠加布线图案的数量以及关于布线点上的端点或隔离点的分支信息。布线图形检查方法由布线图形检查系统进行。

8. 发明授权

US4608494A Component alignment apparatus 失效
标题翻译：元件对准装置
公开(公告)号：US4608494A
公开(公告)日：1986-08-26
申请号：US669437
申请日：1984-11-08
申请人： Mamoru Kobayashi , Hideaki Sasaki , Yasuhiko Hara
发明人： Mamoru Kobayashi , Hideaki Sasaki , Yasuhiko Hara
IPC分类号： G05D3/12 , H01L21/68 , H05K13/04 , G01M11/00 , G01N21/64
CPC分类号： H01L21/681 , H05K13/08 , Y10T29/53091 , Y10T29/53178 , Y10T29/53191
摘要： An apparatus for the alignment of electronic components to be mounted on a printed board. The alignment is accomplished by illuminating the surface of the printed board to cause emission of a fluorescent light from the substrate of the printed board, detecting the fluorescent light by optical means to detect an image of the conductor pattern of the printed board as a negative picture, taking an image of the electronic component leads through a different optical route and calculating the amount of deviation in position of the leads of an electronic component in accordance with the picture data obtained by both images, in order to correct the deviation.
摘要翻译：一种用于对准要安装在印刷电路板上的电子部件的装置。通过照射印刷电路板的表面来引起来自印刷电路板的基板的荧光的发光，通过光学装置检测荧光以检测作为负像的印刷电路板的导体图案的图像来实现对准通过不同的光学路线拍摄电子元件的图像，并根据由两个图像获得的图像数据计算电子元件的引线的位置偏移量，以便校正偏差。

9. 发明授权

US4508453A Pattern detection system 失效
标题翻译：模式检测系统
公开(公告)号：US4508453A
公开(公告)日：1985-04-02
申请号：US397900
申请日：1982-07-13
申请人： Yasuhiko Hara , Nobuyuki Akiyama , Satoru Fushimi , Yoshimasa Oshima , Nobuhiko Aoki
发明人： Yasuhiko Hara , Nobuyuki Akiyama , Satoru Fushimi , Yoshimasa Oshima , Nobuhiko Aoki
IPC分类号： G01N21/956 , G01R31/308 , G03F7/20 , G01M11/00
CPC分类号： G03F7/70616 , G01N21/956 , G01R31/308 , G03F7/7065
摘要： A pattern detection system for inspecting defects in fine or minute patterns such as photomask patterns at a fast speed is disclosed. The system comprises an illuminator, a device for moving objects with the patterns to be inspected with being illuminated by the illuminator, an optical system for imaging the objects, a scanner for scanning the objects in a direction intersected at a given angle with respect to direction of the objects moved by the moving device and arrays of photosensors arranged linearly in a direction perpendicular to that of images on the objects scanned by the scanner, on the surface of which the images are formed by the optical system and for producing respective outputs parallelly on the time basis.
摘要翻译：公开了一种用于以高速度检查诸如光掩模图案的精细或微小图案中的缺陷的图案检测系统。该系统包括照明器，用于利用照明器照亮要检查的图案来移动物体的装置，用于对物体进行成像的光学系统，用于沿相对于方向以给定角度相交的方向扫描物体的扫描仪由移动装置移动的物体和由扫描仪扫描的物体上垂直于图像的方向线性布置的光敏器件的阵列，其表面上由光学系统形成图像并且平行地产生相应的输出时间基础。

10. 发明授权

US4171481A Apparatus for inspecting bottles having elliptic light converging means 失效
标题翻译：用于检查具有椭圆光会聚装置的瓶子的装置
公开(公告)号：US4171481A
公开(公告)日：1979-10-16
申请号：US887965
申请日：1978-03-20
申请人： Yoshitada Mima , Youji Kanno , Nobuo Sato , Yasuhiko Hara , Yosiaki Tomita , Takuro Karakawa , Masahiro Miyamoto , Toshitaka Kano
发明人： Yoshitada Mima , Youji Kanno , Nobuo Sato , Yasuhiko Hara , Yosiaki Tomita , Takuro Karakawa , Masahiro Miyamoto , Toshitaka Kano
IPC分类号： G01N21/90 , G01N21/32
CPC分类号： G01N21/90
摘要： An apparatus of the invention for inspecting bottles for detecting flaws or contamination in the bottles relies upon the light converging function performed by one open-sided elliptic cylinder having reflective inner surface and two foci. The point or line to be inspected of the bottle is positioned at one of the two foci, while at least one light receiving element is disposed at the other focus. A beam of light is applied to the point or line to be inspected of the bottle, so that, if there is any defect such as flaw or contamination, the light is reflected irregularly by the bottle in indefinite direction. The irregularly reflected fractions of light are reflected by the inner surface of the elliptic cylinder and converge on the light receiving element disposed at the other focus, so as to be effectively received by the same element. the presence of the defect, if any, is detected from the output of the light receiving element. Another light receiving element may be disposed outside of the elliptic cylinder so as to receive the fraction of light passed through the bottle.
摘要翻译：本发明的用于检测瓶子中的缺陷或污染的瓶子的装置依赖于一个具有反射内表面和两个焦点的开放式侧面椭圆筒执行的聚光功能。要检查瓶子的点或线位于两个焦点中的一个，而在另一个焦点处设置至少一个光接收元件。将光束施加到要检查的瓶子的点或线上，使得如果存在诸如缺陷或污染的缺陷，则不规则地由灯在不定的方向上反射光。光的不规则反射分数被椭圆柱体的内表面反射并且会聚在设置在另一焦点上的光接收元件上，以便被同一元件有效地接收。从光接收元件的输出检测缺陷的存在（如果有的话）。另一个光接收元件可以设置在椭圆柱体的外部，以便接收通过瓶子的一部分光。

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