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    • 1. 发明授权
    • Apparatus for inspecting bottles having elliptic light converging means
    • 用于检查具有椭圆光会聚装置的瓶子的装置
    • US4171481A
    • 1979-10-16
    • US887965
    • 1978-03-20
    • Yoshitada MimaYouji KannoNobuo SatoYasuhiko HaraYosiaki TomitaTakuro KarakawaMasahiro MiyamotoToshitaka Kano
    • Yoshitada MimaYouji KannoNobuo SatoYasuhiko HaraYosiaki TomitaTakuro KarakawaMasahiro MiyamotoToshitaka Kano
    • G01N21/90G01N21/32
    • G01N21/90
    • An apparatus of the invention for inspecting bottles for detecting flaws or contamination in the bottles relies upon the light converging function performed by one open-sided elliptic cylinder having reflective inner surface and two foci. The point or line to be inspected of the bottle is positioned at one of the two foci, while at least one light receiving element is disposed at the other focus. A beam of light is applied to the point or line to be inspected of the bottle, so that, if there is any defect such as flaw or contamination, the light is reflected irregularly by the bottle in indefinite direction. The irregularly reflected fractions of light are reflected by the inner surface of the elliptic cylinder and converge on the light receiving element disposed at the other focus, so as to be effectively received by the same element. the presence of the defect, if any, is detected from the output of the light receiving element. Another light receiving element may be disposed outside of the elliptic cylinder so as to receive the fraction of light passed through the bottle.
    • 本发明的用于检测瓶子中的缺陷或污染的瓶子的装置依赖于一个具有反射内表面和两个焦点的开放式侧面椭圆筒执行的聚光功能。 要检查瓶子的点或线位于两个焦点中的一个,而在另一个焦点处设置至少一个光接收元件。 将光束施加到要检查的瓶子的点或线上,使得如果存在诸如缺陷或污染的缺陷,则不规则地由灯在不定的方向上反射光。 光的不规则反射分数被椭圆柱体的内表面反射并且会聚在设置在另一焦点上的光接收元件上,以便被同一元件有效地接收。 从光接收元件的输出检测缺陷的存在(如果有的话)。 另一个光接收元件可以设置在椭圆柱体的外部,以便接收通过瓶子的一部分光。
    • 3. 发明授权
    • Method and apparatus for detecting a circuit pattern
    • 用于检测电路图案的方法和装置
    • US5331407A
    • 1994-07-19
    • US845723
    • 1992-03-04
    • Hideaki DoiYasuhiko HaraKoichi Karasaki
    • Hideaki DoiYasuhiko HaraKoichi Karasaki
    • G01B11/24G01B11/245G01N21/88G01N21/93G01N21/956G06T1/00H01L21/66H05K3/00G01B7/00
    • G01N21/956
    • A method and apparatus for detecting a circuit pattern comprise a stage for mounting an object under inspection having a circuit pattern to be detected, means of generating a signal in response to the amount of movement of the stage, a detection optical system for detecting the circuit pattern, an opto-electric transducer which receives the image of the pattern provided by the detection optical system and transforms the image into an image signal, means of calculating the amount of expansion or contraction of the object by detecting the distance between specific patterns on the object, and drive control means which produces a clock signal for the opto-electric transducer based on the stage movement signal provided by the signal generation means and varies the clock signal so as to vary the dimension of the detected image arbitrarily.
    • 用于检测电路图案的方法和装置包括用于安装被检测物体的载台,该载物台具有要检测的电路图案,响应于载物台的移动量产生信号的装置,用于检测电路的检测光学系统 图案,光电换能器,其接收由检测光学系统提供的图案的图像并将图像转换为图像信号;通过检测物体的特定图案之间的距离来计算物体的膨胀或收缩量的装置 物体和驱动控制装置,其基于由信号发生装置提供的级移动信号产生用于光电换能器的时钟信号,并且改变时钟信号以便任意地改变检测图像的尺寸。
    • 5. 发明授权
    • Pattern test apparatus
    • 图案测试仪
    • US4962541A
    • 1990-10-09
    • US154239
    • 1988-02-10
    • Hideaki DoiYasuhiko HaraAkira SaseSatoshi Shinada
    • Hideaki DoiYasuhiko HaraAkira SaseSatoshi Shinada
    • H01L21/66G01N21/88G01N21/93G01N21/956G06T1/00G06T7/00
    • G06T7/001G01N21/95607G03F1/84G06T2207/30148
    • Disclosed is a pattern test apparatus for detecting a fault on the basis of comparison/collation between a test reference pattern and a test target pattern, the apparatus being arranged such that a picture element area is defined by a circle with a predetermined radius on a reference matter having at test reference pattern, and when the number of the picture elements located on the reference pattern is larger than the number of the picture elements located outside the reference pattern, a part of the reference pattern corresponding to a picture element located in the center of the circle is deleted. By such an arrangement, the test reference pattern can be made analogous to the real test target pattern regardless of the shape thereof, so that misjudgment of a normal test target pattern for a fault pattern can be prevented.
    • 公开了一种用于基于测试参考图案和测试对象图案之间的比较/对照来检测故障的图案测试设备,该设备被布置为使得图像元素区域由参考上的预定半径的圆圈定义 具有测试参考图案的物体,并且当位于参考图案上的像素的数量大于位于参考图案外部的图像元素的数量时,与位于中心的图像元素相对应的参考图案的一部分 的圈子被删除。 通过这样的布置,可以使测试参考图案与实际测试对象图案类似,而不管其形状如何,从而可以防止对故障图案的正常测试对象图案的误判。
    • 6. 发明授权
    • Method of detecting pattern defect and its apparatus
    • 检测图案缺陷及其设计的方法
    • US4614430A
    • 1986-09-30
    • US604998
    • 1984-04-27
    • Yasuhiko HaraYoshimasa OhshimaSatoru FushimiHiroshi Makihira
    • Yasuhiko HaraYoshimasa OhshimaSatoru FushimiHiroshi Makihira
    • G01N21/956G06T7/00G01N21/88
    • G06T7/001G01N21/95607G06T2207/10056G06T2207/30148
    • A pattern defect is detected in accordance with the difference between a pair of patterns. The patterns are scanned and imaged to obtain first and second binary signals. A positioning error between the patterns is two-dimensionally detected during the scanning with respective first and second binary signals delayed by a prescribed amount so that each of the picture elements in a prescribed area of a two-dimensional image, delayed and cut out two-dimensionally, corresponding to one pattern, is compared with a specified picture element in a predetermined area of an image delayed and cut out two-dimensionally corresponding to another pattern. The result of the comparison is statistically summed to derive a positioning error by detecting the position shown as an extreme value from the summed values. The positioning error is corrected by two-dimensionally shifting at least one of the delayed binary signals. The corrected binary signals are then two-dimensionally compared with each other.
    • 根据一对图案之间的差异来检测图案缺陷。 扫描和成像图案以获得第一和第二二进制信号。 在扫描期间,以相应的第一和第二二进制信号延迟规定量的二维检测图案之间的定位误差,使得二维图像的规定区域中的每个图像元素被延迟和切出二维图像, 对应于一个图案的尺寸与在与另一图案对应地延迟和切出的图像的预定区域中的指定图像元素进行比较。 比较的结果被统计学地相加以通过从求和值中检测显示为极值的位置来导出定位误差。 通过二维移位延迟的二进制信号中的至少一个来校正定位误差。 然后将校正后的二进制信号二维地进行比较。