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    • 1. 发明授权
    • Plasma reactor with multiple small internal inductive antennas
    • 具有多个小型内部电感天线的等离子体电抗器
    • US6158384A
    • 2000-12-12
    • US336642
    • 1999-06-18
    • Yan YeAllan D'AmbraYeuk-Fai Edwin MokRichard E. RemmingtonJames E. Sammons, III
    • Yan YeAllan D'AmbraYeuk-Fai Edwin MokRichard E. RemmingtonJames E. Sammons, III
    • H05H1/46C23C16/507H01J37/32H01L21/302C23C16/00H05H1/00
    • H01J37/321H01J37/32477
    • The present invention employs a plurality of small inductive antennas to generate a processing plasma. In one embodiment, small coil antennas are secured within the chamber so that both of the pole regions of the antennas couple power to the plasma. The antennas may be oriented so that poles regions are anywhere from perpendicular, to parallel to a chamber wall. The number, location, and orientation of the small antennas within the chamber may be selected to optimize plasma characteristics. In addition, the antennas may be secured to top, side, or bottom walls to improve plasma characteristics; and power deposition within the processing chamber may be adjusted by changing the orientation of the coils, and the magnitude and phase relationship of RF power through the individual antennas. Process gas may be selectively delivered to areas of high power deposition such as adjacent pole regions or through the center of a coil or loop antenna to control plasma characteristics. In a preferred embodiment, the antennas are formed of a conductor surrounded by a non-sputtering, electrically insulating, thermally conductive jacket coupled to an electrically conductive chamber wall. The exposed surface of the jacket may be segmented to reduce eddy currents in conductive deposits.
    • 本发明采用多个小型电感天线来产生处理等离子体。 在一个实施例中,小型线圈天线被固定在腔室内,使得天线的两个极区将功率耦合到等离子体。 天线可以被定向成使得极区域从垂直方向到平行于室壁的任何地方。 可以选择腔室内的小天线的数量,位置和取向以优化等离子体特性。 此外,天线可固定到顶壁,侧壁或底壁以改善等离子体特性; 并且可以通过改变线圈的取向以及通过各个天线的RF功率的幅度和相位关系来调整处理室内的功率沉积。 工艺气体可以选择性地输送到高功率沉积的区域,例如相邻的极区域或通过线圈或环形天线的中心来控制等离子体特性。 在优选实施例中,天线由与由导电室壁连接的非溅射电绝缘导热套围绕的导体形成。 夹套的暴露表面可以被分段以减少导电沉积物中的涡流。
    • 2. 发明授权
    • Plasma reactor with internal inductive antenna capable of generating helicon wave
    • 具有能够产生螺旋波的内部感应天线的等离子体反应器
    • US06178920B2
    • 2001-01-30
    • US09336512
    • 1999-06-18
    • Yan YeAllan D'AmbraYeuk-Fai Edwin MokRichard E. RemingtonJames E. Sammons, III
    • Yan YeAllan D'AmbraYeuk-Fai Edwin MokRichard E. RemingtonJames E. Sammons, III
    • C23C1600
    • H01J37/3211H01J37/321H01J37/32477
    • The present invention employs an internal inductive antenna capable of generating a helicon wave for generating a plasma. One embodiment of the present invention employs loop type antenna secured within a bell shaped portion of the chamber. Another embodiment employs a flat coil type antenna secured within the chamber. In the preferred embodiments, the internal antenna of the present invention is constructed to prevent sputtering of the antenna. The antenna may be formed of a non-sputtering conductive material, or may formed a conductive material surrounded, completely or partially, by a non-sputtering jacket. In one embodiment, the non-sputtering jacket may be coupled to the chamber wall so that heat generated by the antenna is transferred between the jacket and the chamber wall by conduction. Preferably, the non-sputtering jacket is formed of a material that also is electrically insulative with the surface of the antenna exposed to plasma being segmented to inhibit eddy current in conductive deposits. The gaps separate the exposed surface of the antennas so that conductive deposits are inhibited from electrically joining the separated surfaces, while inhibiting plasma generation within the gaps. A portion or all of the chamber wall may be constructed of electrically and thermally conductive material.
    • 本发明采用能够产生用于产生等离子体的螺旋波的内部感应天线。 本发明的一个实施例采用固定在腔室的钟形部分内的环形天线。 另一实施例采用固定在腔室内的扁平线圈型天线。 在优选实施例中,本发明的内部天线被构造成防止天线的溅射。 天线可以由非溅射导电材料形成,或者可以形成由非溅射护套完全或部分地包围的导电材料。 在一个实施例中,非溅射护套可以耦合到室壁,使得由天线产生的热量通过传导在护套和腔室壁之间传递。 优选地,非溅射护套由与绝缘等离子体的天线表面电绝缘的材料形成,以阻止导电沉积物中的涡流。 间隙分开天线的暴露表面,使得阻止导电沉积物电连接分离的表面,同时抑制间隙内的等离子体产生。 室壁的一部分或全部可以由导电和导热材料构成。
    • 9. 发明授权
    • Video encoding by filter selection
    • 通过过滤器选择进行视频编码
    • US08811484B2
    • 2014-08-19
    • US12208269
    • 2008-09-10
    • Giovanni MottaMarta KarczewiczYan Ye
    • Giovanni MottaMarta KarczewiczYan Ye
    • H04N7/12
    • H04N19/577H04N19/117H04N19/136H04N19/147H04N19/19H04N19/192H04N19/523H04N19/61H04N19/80
    • A method and a device are described for selecting between multiple available filters in an encoder to provide a frame having a low error and distortion rate. For each full and sub pixel position, determining whether to use an alternative filter over the default filter during interpolation by estimating the rate distortion gain of using each filter and signaling to the decoder the optimal filter(s) applied to each full and sub-pixel position. In one embodiment, identifying a reference frame and a current frame, interpolating the reference frame using a default filter to create a default interpolated frame, interpolating the reference frame using an alternative filter to create an alternative interpolated frame, determining for each sub-pixel position whether to use the default filter or the alternative filter based on a minimal cost to generate a final reference frame.
    • 描述了用于在编码器中的多个可用滤波器之间进行选择以提供具有低误差和失真率的帧的方法和装置。 对于每个完整和子像素位置,通过估计使用每个滤波器的速率失真增益并向解码器发送信号,确定在插值期间是否使用默认滤波器上的替代滤波器,将最佳滤波器应用于每个全像素和子像素 位置。 在一个实施例中,识别参考帧和当前帧,使用默认滤波器内插参考帧以创建默认内插帧,使用替代滤波器内插参考帧以创建替代插值帧,确定每个子像素位置 是否使用默认过滤器或替代过滤器基于最小成本生成最终参考帧。
    • 10. 发明授权
    • Video decoding using temporally constrained spatial dependency
    • 视频解码使用时间约束空间依赖
    • US08724707B2
    • 2014-05-13
    • US12436953
    • 2009-05-07
    • Ming-Chang TsaiChia-Yuan TengYan Ye
    • Ming-Chang TsaiChia-Yuan TengYan Ye
    • H04N7/12
    • H04N19/55H04N19/132H04N19/162H04N19/17H04N19/44H04N19/61H04N19/70
    • This disclosure describes techniques for region-of-interest (ROI) encoding. In accordance with the techniques described herein, an encoding device may determine a temporal spatial dependency value for a candidate reference video block for inter-coding a current block in a video frame. The encoding device may compare the temporal spatial dependency value to a threshold value and select a coding mode for the current block based on the comparison. A decoding device may receive data defining a ROI as well as the temporal spatial dependency value and decode a video block in the ROI based at least in part on the temporal spatial dependency value. In this manner, the techniques of this disclosure may allow a video content viewer the ability to choose a ROI to watch.
    • 本公开描述了用于感兴趣区域(ROI)编码的技术。 根据本文描述的技术,编码设备可以确定候选参考视频块的时间空间依赖性值,用于对视频帧中的当前块进行帧间编码。 编码装置可以将时间空间相关性值与阈值进行比较,并且基于该比较选择当前块的编码模式。 解码装置可以至少部分地基于时间空间依赖性值来接收定义ROI的数据以及时间空间相关性值并对ROI中的视频块进行解码。 以这种方式,本公开的技术可以允许视频内容观看者选择要观看的ROI的能力。