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1. 发明授权

US06178920B2 Plasma reactor with internal inductive antenna capable of generating helicon wave 失效
标题翻译：具有能够产生螺旋波的内部感应天线的等离子体反应器
公开(公告)号：US06178920B2
公开(公告)日：2001-01-30
申请号：US09336512
申请日：1999-06-18
申请人： Yan Ye , Allan D'Ambra , Yeuk-Fai Edwin Mok , Richard E. Remington , James E. Sammons, III
发明人： Yan Ye , Allan D'Ambra , Yeuk-Fai Edwin Mok , Richard E. Remington , James E. Sammons, III
IPC分类号： C23C1600
CPC分类号： H01J37/3211 , H01J37/321 , H01J37/32477
摘要： The present invention employs an internal inductive antenna capable of generating a helicon wave for generating a plasma. One embodiment of the present invention employs loop type antenna secured within a bell shaped portion of the chamber. Another embodiment employs a flat coil type antenna secured within the chamber. In the preferred embodiments, the internal antenna of the present invention is constructed to prevent sputtering of the antenna. The antenna may be formed of a non-sputtering conductive material, or may formed a conductive material surrounded, completely or partially, by a non-sputtering jacket. In one embodiment, the non-sputtering jacket may be coupled to the chamber wall so that heat generated by the antenna is transferred between the jacket and the chamber wall by conduction. Preferably, the non-sputtering jacket is formed of a material that also is electrically insulative with the surface of the antenna exposed to plasma being segmented to inhibit eddy current in conductive deposits. The gaps separate the exposed surface of the antennas so that conductive deposits are inhibited from electrically joining the separated surfaces, while inhibiting plasma generation within the gaps. A portion or all of the chamber wall may be constructed of electrically and thermally conductive material.
摘要翻译：本发明采用能够产生用于产生等离子体的螺旋波的内部感应天线。本发明的一个实施例采用固定在腔室的钟形部分内的环形天线。另一实施例采用固定在腔室内的扁平线圈型天线。在优选实施例中，本发明的内部天线被构造成防止天线的溅射。天线可以由非溅射导电材料形成，或者可以形成由非溅射护套完全或部分地包围的导电材料。在一个实施例中，非溅射护套可以耦合到室壁，使得由天线产生的热量通过传导在护套和腔室壁之间传递。优选地，非溅射护套由与绝缘等离子体的天线表面电绝缘的材料形成，以阻止导电沉积物中的涡流。间隙分开天线的暴露表面，使得阻止导电沉积物电连接分离的表面，同时抑制间隙内的等离子体产生。室壁的一部分或全部可以由导电和导热材料构成。

2. 发明授权

US6158384A Plasma reactor with multiple small internal inductive antennas 失效
标题翻译：具有多个小型内部电感天线的等离子体电抗器
公开(公告)号：US6158384A
公开(公告)日：2000-12-12
申请号：US336642
申请日：1999-06-18
申请人： Yan Ye , Allan D'Ambra , Yeuk-Fai Edwin Mok , Richard E. Remmington , James E. Sammons, III
发明人： Yan Ye , Allan D'Ambra , Yeuk-Fai Edwin Mok , Richard E. Remmington , James E. Sammons, III
IPC分类号： H05H1/46 , C23C16/507 , H01J37/32 , H01L21/302 , C23C16/00 , H05H1/00
CPC分类号： H01J37/321 , H01J37/32477
摘要： The present invention employs a plurality of small inductive antennas to generate a processing plasma. In one embodiment, small coil antennas are secured within the chamber so that both of the pole regions of the antennas couple power to the plasma. The antennas may be oriented so that poles regions are anywhere from perpendicular, to parallel to a chamber wall. The number, location, and orientation of the small antennas within the chamber may be selected to optimize plasma characteristics. In addition, the antennas may be secured to top, side, or bottom walls to improve plasma characteristics; and power deposition within the processing chamber may be adjusted by changing the orientation of the coils, and the magnitude and phase relationship of RF power through the individual antennas. Process gas may be selectively delivered to areas of high power deposition such as adjacent pole regions or through the center of a coil or loop antenna to control plasma characteristics. In a preferred embodiment, the antennas are formed of a conductor surrounded by a non-sputtering, electrically insulating, thermally conductive jacket coupled to an electrically conductive chamber wall. The exposed surface of the jacket may be segmented to reduce eddy currents in conductive deposits.
摘要翻译：本发明采用多个小型电感天线来产生处理等离子体。在一个实施例中，小型线圈天线被固定在腔室内，使得天线的两个极区将功率耦合到等离子体。天线可以被定向成使得极区域从垂直方向到平行于室壁的任何地方。可以选择腔室内的小天线的数量，位置和取向以优化等离子体特性。此外，天线可固定到顶壁，侧壁或底壁以改善等离子体特性; 并且可以通过改变线圈的取向以及通过各个天线的RF功率的幅度和相位关系来调整处理室内的功率沉积。工艺气体可以选择性地输送到高功率沉积的区域，例如相邻的极区域或通过线圈或环形天线的中心来控制等离子体特性。在优选实施例中，天线由与由导电室壁连接的非溅射电绝缘导热套围绕的导体形成。夹套的暴露表面可以被分段以减少导电沉积物中的涡流。

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