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    • 2. 发明申请
    • Method of manufacturing field effect transistor
    • 制造场效应晶体管的方法
    • US20060121658A1
    • 2006-06-08
    • US11180726
    • 2005-07-14
    • Ho AhnJong LimHong JiWoo ChangJae MunHae Kim
    • Ho AhnJong LimHong JiWoo ChangJae MunHae Kim
    • H01L21/338
    • H01L29/66856H01L29/66462
    • Provided is a method of manufacturing a field effect transistor (FET). The method includes steps of: forming an ohmic metal layer on a substrate in source and drain regions; sequentially forming an insulating layer and a multilayered resist layer on the entire surface of the resultant structure and simultaneously forming resist patterns having respectively different shapes in both a first region excluding the ohmic metal layer and a second region excluding the ohmic metal layer, wherein a lowermost resist pattern is exposed in the first region, and the insulating layer is exposed in the second region; exposing the substrate and the insulating layer by simultaneously etching the exposed insulating layer and the exposed lowermost resist pattern using the resist patterns as etch masks, respectively; performing a recess process on the exposed substrate and etching the exposed insulating layer to expose the substrate; and forming gate recess regions having different etching depths from each other over the substrate, depositing a predetermined gate metal, and removing the resist patterns. In this method, transistors having different threshold voltages can be manufactured without additional mask patterns using the least number of processes, with the results that the cost of production can be reduced and the stability and productivity of semiconductor devices can be improved.
    • 提供了制造场效应晶体管(FET)的方法。 该方法包括以下步骤:在源极和漏极区域的衬底上形成欧姆金属层; 在所得结构的整个表面上顺序地形成绝缘层和多层抗蚀剂层,并且同时形成除了欧姆金属层以外的第一区域和不包括欧姆金属层的第二区域中具有不同形状的抗蚀剂图案,其中最下面 抗蚀剂图案在第一区域中暴露,并且绝缘层在第二区域中暴露; 通过分别使用抗蚀剂图案作为蚀刻掩模,同时蚀刻暴露的绝缘层和暴露的最下面的抗蚀剂图案来暴露衬底和绝缘层; 对曝光的衬底进行凹陷处理并蚀刻暴露的绝缘层以露出衬底; 以及在衬底上形成具有彼此不同蚀刻深度的栅极凹陷区域,沉积预定的栅极金属和去除抗蚀剂图案。 在该方法中,可以使用最少数量的工艺来制造具有不同阈值电压的晶体管,而不需要额外的掩模图案,结果可以降低生产成本,并且可以提高半导体器件的稳定性和生产率。
    • 3. 发明申请
    • Transistor or semiconductor device and method of fabricating the same
    • 晶体管或半导体器件及其制造方法
    • US20070238232A9
    • 2007-10-11
    • US11179971
    • 2005-07-12
    • Jae MunJong LimWoo ChangHong JiHo AhnHae Kim
    • Jae MunJong LimWoo ChangHong JiHo AhnHae Kim
    • H01L21/338
    • H01L29/66462H01L29/7785
    • Provided are a transistor of a semiconductor device and method of fabricating the same. The transistor includes: an epitaxy substrate disposed on a semi-insulating substrate and having a buffer layer, a first Si planar doping layer, a first conductive layer, a second Si planar doping layer, and a second conductive layer, which are sequentially stacked, the second Si planar doping layer having a doping concentration different from that of the first Si planar doping layer; a source electrode and a drain electrode diffusing into the first Si planar doping layer to a predetermined depth and disposed on both sides of the second conductive layer to form an ohmic contact; and a gate electrode disposed on the second conductive layer between the source and drain electrodes and being in contact with the second conductive layer. In this structure, both isolation and switching speed of the transistor can be increased. Also, the maximum voltage limit applied to the transistor is increased due to increases in gate turn-on voltage and threshold voltage and a reduction in parallel conduction element. As a result, the power handling capability of the transistor can be improved, thus improving a high-power low-distortion characteristic and an isolation characteristic.
    • 提供半导体器件的晶体管及其制造方法。 晶体管包括:设置在半绝缘衬底上并具有缓冲层的外延衬底,第一Si平面掺杂层,第一导电层,第二Si平面掺杂层和第二导电层, 所述第二Si平面掺杂层具有与所述第一Si平面掺杂层的掺杂浓度不同的掺杂浓度; 源极电极和漏电极,其扩散到所述第一Si平面掺杂层中至预定深度并且设置在所述第二导电层的两侧以形成欧姆接触; 以及设置在所述源极和漏极之间的所述第二导电层上并与所述第二导电层接触的栅电极。 在这种结构中,可以提高晶体管的隔离和开关速度。 此外,施加到晶体管的最大电压限制由于栅极导通电压和阈值电压的增加以及并联导通元件的减小而增加。 结果,可以提高晶体管的功率处理能力,从而提高高功率低失真特性和隔离特性。
    • 5. 发明申请
    • Transistor or semiconductor device and method of fabricating the same
    • 晶体管或半导体器件及其制造方法
    • US20060105510A1
    • 2006-05-18
    • US11179971
    • 2005-07-11
    • Jae MunJong LimWoo ChangHong JiHo AhnHae Kim
    • Jae MunJong LimWoo ChangHong JiHo AhnHae Kim
    • H01L21/338
    • H01L29/66462H01L29/7785
    • Provided are a transistor of a semiconductor device and method of fabricating the same. The transistor includes: an epitaxy substrate disposed on a semi-insulating substrate and having a buffer layer, a first Si planar doping layer, a first conductive layer, a second Si planar doping layer, and a second conductive layer, which are sequentially stacked, the second Si planar doping layer having a doping concentration different from that of the first Si planar doping layer; a source electrode and a drain electrode diffusing into the first Si planar doping layer to a predetermined depth and disposed on both sides of the second conductive layer to form an ohmic contact; and a gate electrode disposed on the second conductive layer between the source and drain electrodes and being in contact with the second conductive layer. In this structure, both isolation and switching speed of the transistor can be increased. Also, the maximum voltage limit applied to the transistor is increased due to increases in gate turn-on voltage and threshold voltage and a reduction in parallel conduction element. As a result, the power handling capability of the transistor can be improved, thus improving a high-power low-distortion characteristic and an isolation characteristic.
    • 提供半导体器件的晶体管及其制造方法。 晶体管包括:设置在半绝缘衬底上并具有缓冲层的外延衬底,第一Si平面掺杂层,第一导电层,第二Si平面掺杂层和第二导电层, 所述第二Si平面掺杂层具有与所述第一Si平面掺杂层的掺杂浓度不同的掺杂浓度; 源极电极和漏电极,其扩散到所述第一Si平面掺杂层中至预定深度并且设置在所述第二导电层的两侧以形成欧姆接触; 以及设置在所述源极和漏极之间的所述第二导电层上并与所述第二导电层接触的栅电极。 在这种结构中,可以提高晶体管的隔离和开关速度。 此外,施加到晶体管的最大电压限制由于栅极导通电压和阈值电压的增加以及并联导通元件的减小而增加。 结果,可以提高晶体管的功率处理能力,从而提高高功率低失真特性和隔离特性。
    • 6. 发明申请
    • Unit type air conditioner
    • 单元式空调
    • US20050016194A1
    • 2005-01-27
    • US10714668
    • 2003-11-18
    • Jung ParkWoo Chang
    • Jung ParkWoo Chang
    • F24F1/02F24F13/20F25D23/12F25D17/06
    • F24F13/20F24F1/027
    • Unit type air conditioner including a base plate forming a bottom part thereof, a barrier projected upward from a center part of the base plate, to divides the unit type air conditioner into an indoor part for mounting an indoor heat exchanger thereon and an outdoor part for mounting an outdoor heat exchanger thereon, a shroud for leading air drawn from an outdoor to the outdoor heat exchanger, the shroud dividing an inside of the outdoor part, exterior members including a cabinet surrounding opposite side parts and rear side part of he outdoor part, and a cover on the cabinet to form an upper exterior of the outdoor part, and a brace fastened to the barrier, the shroud, and the exterior members, for preventing relative positional change between the barrier, the shroud, and the external members, thereby fastening components rigidly, to enhance fastening strength.
    • 单元型空调机,包括形成底部的基板,从基板的中心部向上方突出的挡板,将该单元型空调机分割为室内热交换器的室内部,以及室外部件, 在室外安装室外热交换器,用于将从室外引导到室外热交换器的引导空气的护罩,分隔室外部的内部的护罩,包括围绕室外部的相对侧部和后侧的壳体的外部构件, 以及机壳上的盖,以形成室外部分的上部外部,以及固定到屏障,护罩和外部构件的支架,用于防止屏障,护罩和外部构件之间的相对位置变化,由此 紧固部件刚性,以增强紧固强度。