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    • 1. 发明申请
    • Hydraulic pressure intermediary
    • 液压中介
    • US20090301209A1
    • 2009-12-10
    • US11921567
    • 2006-05-10
    • Wolfgang DannhauerRalf NurnbergerAnh Tuan Tham
    • Wolfgang DannhauerRalf NurnbergerAnh Tuan Tham
    • G01L7/08
    • G01L19/0046
    • A hydraulic pressure intermediary includes: a platform, which has a bowl-shaped surface having an annular, platform-surface edge region, a platform-surface central region depressed relative to the platform-surface edge region and surrounded by the platform-surface edge region, and an annular platform-surface transition region, which borders, on its inner side, the platform-surface central region and, on its outer side, the platform-surface edge region; a bowl-shaped, separating membrane having a flat, annular, separating-membrane edge region, a separating-membrane central region depressed relative to the separating-membrane edge region and an annular separating-membrane transition region, which borders, on its inner side, the separating-membrane central region and, on its outer side, the separating-membrane edge region. The separating membrane is connected with the platform-surface edge region within the separating-membrane edge region along a surrounding joint. Further, the separating-membrane transition region includes an annular moat having a moat outer side, a moat inner side, and a moat transition zone, wherein the moat outer side has a first annular inclined surface, which borders on the separating-membrane edge region, the moat inner side includes a second annular inclined surface, which borders on the separating-membrane central region, and the moat transition zone extends between the first and the second inclined surfaces.
    • 液压中介包括:具有碗状表面的平台,该碗状表面具有环形平台表面边缘区域,相对于平台表面边缘区域凹陷并被平台表面边缘区域包围的平台表面中心区域 以及在其内侧与平台表面中心区域相邻并且在其外侧与平台表面边缘区域相邻的环形平台表面过渡区域; 具有平坦的,环状的分隔膜边缘区域的碗状分离膜,相对于分隔膜边缘区域凹陷的分离膜中心区域和在其内侧边界的环状分离膜过渡区域 ,分离膜中心区域,其外侧为分离膜边缘区域。 分离膜沿着周围的接头与分离膜边缘区域内的平台表面边缘区域连接。 此外,分离膜过渡区域包括具有护城河外侧,护城河内侧和护城河过渡区域的环形护城河,其中护城河外侧具有第一环形倾斜表面,该第一环形倾斜表面邻接在分隔膜边缘区域 护城河内侧包括与分隔膜中心区域相接的第二环形倾斜表面,并且护城河过渡区域在第一和第二倾斜表面之间延伸。
    • 2. 发明授权
    • Pressure difference measuring cell
    • 压力差测量单元
    • US08402836B2
    • 2013-03-26
    • US12735098
    • 2008-12-12
    • Wolfgang DannhauerMichael PhilippsFriedrich SchwabeDieter StolzeAnh Tuan Tham
    • Wolfgang DannhauerMichael PhilippsFriedrich SchwabeDieter StolzeAnh Tuan Tham
    • G01L13/02
    • G01L19/0609G01L9/0073G01L13/026
    • A pressure difference measuring cell for registering pressure difference between a first pressure and a second pressure, comprises: an elastic measuring arrangement having at least one measuring membrane, or diaphragm, that comprises silicon; a platform, which is pressure-tightly connected with the elastic measuring arrangement; a first hydraulic path for transferring a first pressure onto a first surface section of the elastic measuring arrangement; and a second hydraulic path for transferring a second pressure onto a second surface section of the elastic measuring arrangement. The first pressure opposes the second pressure, and the elastic deflection of the measuring arrangement is a measure for the difference between the first and the second pressure, wherein the pressure difference measuring cell has additionally at least one hydraulic throttle, characterized in that the at least one hydraulic throttle comprises porous silicon.
    • 用于记录第一压力和第二压力之间的压力差的压差测量单元包括:弹性测量装置,其具有包括硅的至少一个测量膜或隔膜; 与弹性测量装置压力连接的平台; 用于将第一压力转移到弹性测量装置的第一表面部分上的第一液压路径; 以及用于将第二压力传递到弹性测量装置的第二表面部分上的第二液压路径。 所述第一压力与所述第二压力相反,并且所述测量装置的弹性挠度是所述第一和第二压力之间的差值的量度,其中所述压差测量单元还具有至少一个液压节流阀,其特征在于,所述至少一个 一个液压油门包括多孔硅。
    • 3. 发明授权
    • Hydraulic pressure intermediary
    • 液压中介
    • US07798007B2
    • 2010-09-21
    • US11921567
    • 2006-05-10
    • Wolfgang DannhauerRalf NürnbergerAnh Tuan Tham
    • Wolfgang DannhauerRalf NürnbergerAnh Tuan Tham
    • G01L7/08
    • G01L19/0046
    • A hydraulic pressure intermediary includes: a platform, which has a bowl-shaped surface having an annular, platform-surface edge region, a platform-surface central region depressed relative to the platform-surface edge region and surrounded by the platform-surface edge region, and an annular platform-surface transition region, which borders, on its inner side, the platform-surface central region and, on its outer side, the platform-surface edge region; a bowl-shaped, separating membrane having a flat, annular, separating-membrane edge region, a separating-membrane central region depressed relative to the separating-membrane edge region and an annular separating-membrane transition region, which borders, on its inner side, the separating-membrane central region and, on its outer side, the separating-membrane edge region. The separating membrane is connected with the platform-surface edge region within the separating-membrane edge region along a surrounding joint. Further, the separating-membrane transition region includes an annular moat having a moat outer side, a moat inner side, and a moat transition zone, wherein the moat outer side has a first annular inclined surface, which borders on the separating-membrane edge region, the moat inner side includes a second annular inclined surface, which borders on the separating-membrane central region, and the moat transition zone extends between the first and the second inclined surfaces.
    • 液压中介包括:具有碗状表面的平台,该碗状表面具有环形平台表面边缘区域,相对于平台表面边缘区域凹陷并被平台表面边缘区域包围的平台表面中心区域 以及在其内侧与平台表面中心区域相邻并且在其外侧与平台表面边缘区域相邻的环形平台表面过渡区域; 具有平坦的,环状的分隔膜边缘区域的碗状分离膜,相对于分隔膜边缘区域凹陷的分离膜中心区域和在其内侧边界的环状分离膜过渡区域 ,分离膜中心区域,其外侧为分离膜边缘区域。 分离膜沿着周围的接头与分离膜边缘区域内的平台表面边缘区域连接。 此外,分离膜过渡区域包括具有护城河外侧,护城河内侧和护城河过渡区域的环形护城河,其中护城河外侧具有第一环形倾斜表面,该第一环形倾斜表面邻接在分隔膜边缘区域 护城河内侧包括与分隔膜中心区域相接的第二环形倾斜表面,并且护城河过渡区域在第一和第二倾斜表面之间延伸。
    • 4. 发明授权
    • Relative pressure sensor
    • 相对压力传感器
    • US08490494B2
    • 2013-07-23
    • US13125413
    • 2009-08-12
    • Davide ParrottoAnh Tuan ThamFrank PasslerOlaf KrusemarkUlrich Buder
    • Davide ParrottoAnh Tuan ThamFrank PasslerOlaf KrusemarkUlrich Buder
    • G01L7/00
    • G01L19/0645G01L19/147
    • A relative pressure sensor for registering pressure of a medium relative to surrounding atmospheric pressure includes: a pressure measuring cell having a measuring membrane and a platform, wherein pressure of the medium can act on a first side of the measuring membrane facing away from the platform, and wherein the platform has a reference air opening, through which surrounding atmospheric pressure can act on a second side of the measuring membrane facing the platform. A support body, through which a reference air duct extends between a first surface section and a second surface section of the support body is provided, wherein the pressure measuring cell is affixed to the support body with a pressure resistant, bonded adhesive. The reference air opening communicates with the reference air duct, in order to form a reference air path to the measuring membrane, wherein the bonded adhesive surrounds the reference air path, and the relative pressure sensor further includes a shield element, which protects the bonded adhesive from direct contact with reference air.
    • 用于记录介质相对于周围大气压的压力的相对压力传感器包括:具有测量膜和平台的压力测量单元,其中所述介质的压力可以作用在所述测量膜的远离所述平台的第一侧上, 并且其中所述平台具有参考空气开口,周围大气压力可通过所述参考空气开口作用在面向所述平台的所述测量膜的第二侧上。 提供了一种支撑体,通过该支撑体,参考空气管道在支撑体的第一表面部分和第二表面部分之间延伸,其中压力测量单元用耐压粘合的粘合剂固定到支撑体上。 参考空气开口与参考空气管道连通,以便形成到测量膜的参考空气路径,其中粘合的粘合剂围绕参考空气路径,并且相对压力传感器还包括屏蔽元件,其保护粘合的粘合剂 与参考空气直接接触。
    • 5. 发明申请
    • PRESSURE SENSOR, ESPECIALLY PRESSURE DIFFERENCE SENSOR
    • 压力传感器,特殊压力传感器
    • US20120279310A1
    • 2012-11-08
    • US13503804
    • 2010-10-07
    • Timo KoberMichael PhilippsDieter StolzeAnh Tuan ThamRoland Werthschutzky
    • Timo KoberMichael PhilippsDieter StolzeAnh Tuan ThamRoland Werthschutzky
    • G01L9/00C03B23/203C03B23/025
    • G01L9/0042C03B23/0026G01L19/0618
    • The pressure sensor of the invention includes at least one platform, at least one measuring membrane 30, and a transducer, wherein the measuring membrane comprises a semiconductor material, wherein the measuring membrane, enclosing a pressure chamber, is secured on the platform, wherein the measuring membrane is contactable with at least one pressure and is elastically deformable in a pressure-dependent manner, wherein the transducer provides an electrical signal dependent on deformation of the measuring membrane, wherein the platform has a membrane bed, on which the measuring membrane lies in the case of overload, in order to support the measuring membrane, wherein the membrane bed 21 has a glass layer 20, whose surface faces the measuring membrane and forms a wall of the pressure chamber, wherein the surface of the glass layer has a contour, which is suitable for supporting the measuring membrane 30 in the case of overload, characterized in that the contour of the membrane bed 21 is obtainable by a sagging of an unsupported region of a glass plate at increased temperature, due to the force of gravity on the unsupported region of the glass plate, and subsequent cooling of the glass plate.
    • 本发明的压力传感器包括至少一个平台,至少一个测量膜30和换能器,其中测量膜包括半导体材料,其中包围压力室的测量膜固定在平台上,其中, 测量膜可与至少一个压力接触并且以压力依赖的方式弹性变形,其中换能器提供取决于测量膜的变形的电信号,其中平台具有膜床,测量膜位于该膜片上 过载的情况,为了支撑测量膜,其中膜床21具有玻璃层20,玻璃层20的表面面向测量膜并形成压力室的壁,其中玻璃层的表面具有轮廓, 其适用于在过载的情况下支撑测量膜30,其特征在于,膜床21的轮廓是 由于玻璃板的未支撑区域上的重力,以及随后的玻璃板的冷却,在升高的温度下通过玻璃板的未支撑区域的下垂可以获得。
    • 6. 发明授权
    • Pressure measuring device
    • 压力测量装置
    • US08304844B2
    • 2012-11-06
    • US12734545
    • 2008-11-07
    • Igor GetmanDieter StolzeAnh Tuan Tham
    • Igor GetmanDieter StolzeAnh Tuan Tham
    • H01L27/14H01L29/84
    • G01L19/147
    • A pressure measuring device having a pedestal, an intermediate piece of semiconductor arranged on the pedestal and, connected with the pedestal and arranged on the intermediate piece and connected with the intermediate piece, a semiconductor pressure sensor having a support and a measuring membrane, or diaphragm. The pressure measuring device offers reliable protection of the sensitive measuring membrane, or diaphragm, against mechanical distortions. Provided extending in the interior of the intermediate piece is an annular cavity, which surrounds a first cylindrical section and, pedestal end thereof, a second cylindrical section of the intermediate piece. The second cylindrical section has a greater outer diameter than the first cylindrical section. The cavity is open on an end of the intermediate piece toward the pedestal. The second cylindrical section has an end face facing the pedestal and lying on an end face of the pedestal, for forming a connecting area, via which the intermediate piece is mechanically connected with the pedestal.
    • 一种具有基座的压力测量装置,布置在基座上的中间片半导体,并与基座连接并布置在中间件上并与中间件连接,具有支撑件和测量膜或隔膜的半导体压力传感器 。 压力测量装置提供对敏感测量膜或隔膜的可靠保护,防止机械扭曲。 提供在中间件的内部延伸的是环形空腔,其环绕第一圆柱形部分及其基座端部,中间件的第二圆柱形部分。 第二圆柱形部分具有比第一圆柱形部分更大的外径。 空腔在中间件的端部朝向底座打开。 第二圆柱形部分具有面向基座的端面并且位于基座的端面上,用于形成连接区域,中间件通过该连接区域与基座机械连接。
    • 8. 发明授权
    • Pressure resistently encapsulated, pressure difference sensor
    • 耐压密封,压差传感器
    • US09054222B2
    • 2015-06-09
    • US14007704
    • 2012-02-10
    • Anh Tuan ThamFrank PasslerRafael Teipen
    • Anh Tuan ThamFrank PasslerRafael Teipen
    • H01L29/84G01L9/00G01L13/02G01L19/14H01L23/473
    • H01L29/84G01L9/0073G01L13/025G01L19/143G01L19/147H01L23/473H01L2924/0002H01L2924/00
    • A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a semiconductor pressure measuring transducer core, which has a measuring membrane body and at least one support body. The measuring membrane body is connected pressure-tightly with the at least one support body, which has a pressure inlet opening. Ducts extend respectively from an outer surface of the capsule into the transducer seat, wherein the pressure inlet opening communicates with the first duct A side of the measuring membrane is contactable with a pressure through the pressure inlet opening, wherein the support body contacts a joint, which surrounds the first pressure inlet opening and the opening of the first duct into the transducer seat and is connected pressure-tightly with a wall of the transducer seat, and wherein a second side of the measuring membrane is hydraulically isolated from its first side and communicates with the second duct.
    • 压差传感器包括具有陶瓷胶囊主体的胶囊。 胶囊在其内部具有换能器座,其中在换能器座中布置有半导体压力测量换能器芯,其具有测量膜主体和至少一个支撑体。 测量膜体与至少一个具有压力入口的支撑体压力连接。 管道分别从胶囊的外表面延伸到换能器座中,其中与测量膜的第一管道A侧连通的压力入口开口与通过压力入口开口的压力接触,其中支撑体接触接头, 其围绕第一压力入口和第一导管的开口进入换能器座,并且与换能器座的壁压力连接,并且其中测量膜的第二侧与其第一侧液压隔离并且连通 与第二个管道。
    • 9. 发明申请
    • PRESSURE SENSOR
    • 压力传感器
    • US20100140725A1
    • 2010-06-10
    • US12449821
    • 2008-03-04
    • Igor GetmanDieter StolzeAnh Tuan Tham
    • Igor GetmanDieter StolzeAnh Tuan Tham
    • H01L29/84H01L21/30
    • G01L9/0055G01L9/0042
    • A piezoresistive pressure sensor is especially suitable for measuring smaller pressures and has a small linearity error. The pressure sensor is manufactured from a BESOI wafer having first and second silicon layers and an oxide layer arranged therebetween. The pressure sensor includes, formed from the first silicon layer of the BESOI wafer, an active layer, in which piezoresistive elements are doped, and, formed from the second silicon layer of the BESOI wafer, a membrane carrier, which externally surrounds a cavity in the second silicon layer, via which a membrane forming region of the active layer and an oxide layer associated therewith are exposed, wherein, in an outer edge of the region of the oxide layer exposed by the cavity, a groove is provided surrounding the region.
    • 压阻式压力传感器特别适用于测量较小的压力并具有较小的线性误差。 压力传感器由具有第一和第二硅层并且布置在其间的氧化物层的BESOI晶片制造。 压力传感器包括由BESOI晶片的第一硅层形成的有源层,其中掺杂了压阻元件,并且由BESOI晶片的第二硅层形成膜载体,膜载体外部包围空腔 通过该第二硅层,有源层的膜形成区域和与其相关联的氧化物层被暴露,其中在由空腔暴露的氧化物层的区域的外边缘中围绕该区域设置凹槽。
    • 10. 发明申请
    • Pressure Resistently Encapsulated, Pressure Difference Sensor
    • 耐压密封压差传感器
    • US20140021563A1
    • 2014-01-23
    • US14007704
    • 2012-02-10
    • Anh Tuan ThamFrank PasslerRafael Teipen
    • Anh Tuan ThamFrank PasslerRafael Teipen
    • H01L29/84
    • H01L29/84G01L9/0073G01L13/025G01L19/143G01L19/147H01L23/473H01L2924/0002H01L2924/00
    • A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a semiconductor pressure measuring transducer core, which has a measuring membrane body and at least one support body. The measuring membrane body is connected pressure-tightly with the at least one support body, which has a pressure inlet opening. Ducts extend respectively from an outer surface of the capsule into the transducer seat, wherein the pressure inlet opening communicates with the first duct A side of the measuring membrane is contactable with a pressure through the pressure inlet opening, wherein the support body contacts a joint, which surrounds the first pressure inlet opening and the opening of the first duct into the transducer seat and is connected pressure-tightly with a wall of the transducer seat, and wherein a second side of the measuring membrane is hydraulically isolated from its first side and communicates with the second duct.
    • 压差传感器包括具有陶瓷胶囊主体的胶囊。 胶囊在其内部具有换能器座,其中在换能器座中布置有半导体压力测量换能器芯,其具有测量膜主体和至少一个支撑体。 测量膜体与至少一个具有压力入口的支撑体压力连接。 管道分别从胶囊的外表面延伸到换能器座中,其中与测量膜的第一管道A侧连通的压力入口开口与通过压力入口开口的压力接触,其中支撑体接触接头, 其围绕第一压力入口和第一导管的开口进入换能器座,并且与换能器座的壁压力连接,并且其中测量膜的第二侧与其第一侧液压隔离并且连通 与第二个管道。