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1. 发明申请

US20100308426A1 PRESSURE MEASURING DEVICE 有权
标题翻译：压力测量装置
公开(公告)号：US20100308426A1
公开(公告)日：2010-12-09
申请号：US12734545
申请日：2008-11-07
申请人： Igor Getman , Dieter Stolze , Anh Tuan Tham
发明人： Igor Getman , Dieter Stolze , Anh Tuan Tham
IPC分类号： H01L29/84 , H01L21/50
CPC分类号： G01L19/147
摘要： A pressure measuring device having a pedestal, an intermediate piece of semiconductor arranged on the pedestal and, connected with the pedestal and arranged on the intermediate piece and connected with the intermediate piece, a semiconductor pressure sensor having a support and a measuring membrane, or diaphragm. The pressure measuring device offers reliable protection of the sensitive measuring membrane, or diaphragm, against mechanical distortions. Provided extending in the interior of the i[ntermediate piece is an annular cavity, which surrounds a first cylindrical section and, pedestal end thereof, a second cylindrical section of the intermediate piece. The second cylindrical section has a greater outer diameter than the first cylindrical section. The cavity is open on an end of the intermediate piece toward the pedestal. The second cylindrical section has an end face facing the pedestal and lying on an end face of the pedestal, for forming a connecting area, via which the intermediate piece is mechanically connected with the pedestal.
摘要翻译：一种压力测量装置，具有基座，布置在基座上的中间片半导体，并与基座连接并布置在中间件上并与中间件连接，具有支撑件和测量膜或隔膜的半导体压力传感器。压力测量装置提供对敏感测量膜或隔膜的可靠保护，防止机械扭曲。提供在i中心部分的内部延伸的环形空腔，其围绕第一圆柱形部分，并且其基座端部是中间件的第二圆柱形部分。第二圆柱形部分具有比第一圆柱形部分更大的外径。空腔在中间件的端部朝向底座打开。第二圆柱形部分具有面向基座的端面并且位于基座的端面上，用于形成连接区域，中间件通过该连接区域与基座机械连接。

2. 发明授权

US08304844B2 Pressure measuring device 有权
标题翻译：压力测量装置
公开(公告)号：US08304844B2
公开(公告)日：2012-11-06
申请号：US12734545
申请日：2008-11-07
申请人： Igor Getman , Dieter Stolze , Anh Tuan Tham
发明人： Igor Getman , Dieter Stolze , Anh Tuan Tham
IPC分类号： H01L27/14 , H01L29/84
CPC分类号： G01L19/147
摘要： A pressure measuring device having a pedestal, an intermediate piece of semiconductor arranged on the pedestal and, connected with the pedestal and arranged on the intermediate piece and connected with the intermediate piece, a semiconductor pressure sensor having a support and a measuring membrane, or diaphragm. The pressure measuring device offers reliable protection of the sensitive measuring membrane, or diaphragm, against mechanical distortions. Provided extending in the interior of the intermediate piece is an annular cavity, which surrounds a first cylindrical section and, pedestal end thereof, a second cylindrical section of the intermediate piece. The second cylindrical section has a greater outer diameter than the first cylindrical section. The cavity is open on an end of the intermediate piece toward the pedestal. The second cylindrical section has an end face facing the pedestal and lying on an end face of the pedestal, for forming a connecting area, via which the intermediate piece is mechanically connected with the pedestal.
摘要翻译：一种具有基座的压力测量装置，布置在基座上的中间片半导体，并与基座连接并布置在中间件上并与中间件连接，具有支撑件和测量膜或隔膜的半导体压力传感器。压力测量装置提供对敏感测量膜或隔膜的可靠保护，防止机械扭曲。提供在中间件的内部延伸的是环形空腔，其环绕第一圆柱形部分及其基座端部，中间件的第二圆柱形部分。第二圆柱形部分具有比第一圆柱形部分更大的外径。空腔在中间件的端部朝向底座打开。第二圆柱形部分具有面向基座的端面并且位于基座的端面上，用于形成连接区域，中间件通过该连接区域与基座机械连接。

3. 发明申请

US20100140725A1 PRESSURE SENSOR 有权
标题翻译：压力传感器
公开(公告)号：US20100140725A1
公开(公告)日：2010-06-10
申请号：US12449821
申请日：2008-03-04
申请人： Igor Getman , Dieter Stolze , Anh Tuan Tham
发明人： Igor Getman , Dieter Stolze , Anh Tuan Tham
IPC分类号： H01L29/84 , H01L21/30
CPC分类号： G01L9/0055 , G01L9/0042
摘要： A piezoresistive pressure sensor is especially suitable for measuring smaller pressures and has a small linearity error. The pressure sensor is manufactured from a BESOI wafer having first and second silicon layers and an oxide layer arranged therebetween. The pressure sensor includes, formed from the first silicon layer of the BESOI wafer, an active layer, in which piezoresistive elements are doped, and, formed from the second silicon layer of the BESOI wafer, a membrane carrier, which externally surrounds a cavity in the second silicon layer, via which a membrane forming region of the active layer and an oxide layer associated therewith are exposed, wherein, in an outer edge of the region of the oxide layer exposed by the cavity, a groove is provided surrounding the region.
摘要翻译：压阻式压力传感器特别适用于测量较小的压力并具有较小的线性误差。压力传感器由具有第一和第二硅层并且布置在其间的氧化物层的BESOI晶片制造。压力传感器包括由BESOI晶片的第一硅层形成的有源层，其中掺杂了压阻元件，并且由BESOI晶片的第二硅层形成膜载体，膜载体外部包围空腔通过该第二硅层，有源层的膜形成区域和与其相关联的氧化物层被暴露，其中在由空腔暴露的氧化物层的区域的外边缘中围绕该区域设置凹槽。

4. 发明授权

US08384170B2 Pressure sensor 有权
标题翻译：压力传感器
公开(公告)号：US08384170B2
公开(公告)日：2013-02-26
申请号：US12449821
申请日：2008-03-04
申请人： Igor Getman , Anh Tuan Tham , Dieter Stolze
发明人： Igor Getman , Anh Tuan Tham , Dieter Stolze
IPC分类号： H01L29/84
CPC分类号： G01L9/0055 , G01L9/0042
摘要： A piezoresistive pressure sensor is especially suitable for measuring smaller pressures and has a small linearity error. The pressure sensor is manufactured from a BESOI wafer having first and second silicon layers and an oxide layer arranged therebetween. The pressure sensor includes, formed from the first silicon layer of the BESOI wafer, an active layer, in which piezoresistive elements are doped, and, formed from the second silicon layer of the BESOI wafer, a membrane carrier, which externally surrounds a cavity in the second silicon layer, via which a membrane forming region of the active layer and an oxide layer associated therewith are exposed, wherein, in an outer edge of the region of the oxide layer exposed by the cavity, a groove is provided surrounding the region.
摘要翻译：压阻式压力传感器特别适用于测量较小的压力并具有较小的线性误差。压力传感器由具有第一和第二硅层并且布置在其间的氧化物层的BESOI晶片制造。压力传感器包括由BESOI晶片的第一硅层形成的有源层，其中掺杂了压阻元件，并且由BESOI晶片的第二硅层形成膜载体，膜载体外部包围空腔通过该第二硅层，有源层的膜形成区域和与其相关联的氧化物层被暴露，其中在由空腔暴露的氧化物层的区域的外边缘中围绕该区域设置凹槽。

5. 发明申请

US20120118065A1 METHOD FOR PRESSURE MEASUREMENT IN THE CASE OF VARIABLE TEMPERATURES AND PRESSURE MEASURING SENSOR FOR PRESSURE MEASUREMENT IN THE CASE OF VARIABLE TEMPERATURES 有权
标题翻译：可变温度情况下压力测量方法和压力测量传感器在可变温度情况下的压力测量方法
公开(公告)号：US20120118065A1
公开(公告)日：2012-05-17
申请号：US13386193
申请日：2010-06-22
申请人： Igor Getman , Manuel Biondi Liedtke , Thomas Uehlin , Elmar Wosnitza
发明人： Igor Getman , Manuel Biondi Liedtke , Thomas Uehlin , Elmar Wosnitza
IPC分类号： G01L19/04
CPC分类号： G01L9/125
摘要： A method for the compensating temperature gradient influences on a pressure measuring transducer, comprising the steps of: registering a pressure signal Sp(t); registering a temperature signal T(t); ascertaining a pressure measured value ps(Sp(t), T(t)); determining the time derivative of the temperature signal dT/dt; correcting the pressure measured value with a correction function, which depends on the time derivative, wherein, as a function of the sign of the time derivative, another correction function is selected, or other coefficients in a function of equal type are selected.
摘要翻译：用于补偿温度梯度的方法影响压力测量换能器，包括以下步骤：对压力信号Sp（t）进行记录; 记录温度信号T（t）; 确定压力测量值ps（Sp（t），T（t））; 确定温度信号dT / dt的时间导数; 用取决于时间导数的校正函数校正压力测量值，其中，作为时间导数的符号的函数，选择另一校正函数，或者选择相等类型的函数中的其他系数。

6. 发明授权

US07946148B2 Manufacturing-side calibration of a measuring device for capacitive fill level measurement, and corresponding measuring device 有权
标题翻译：用于电容式液位测量的测量装置的制造侧校准和相应的测量装置
公开(公告)号：US07946148B2
公开(公告)日：2011-05-24
申请号：US11663206
申请日：2005-09-13
申请人： Igor Getman , Armin Wernet , Roland Dieterle , Kaj Uppenkamp
发明人： Igor Getman , Armin Wernet , Roland Dieterle , Kaj Uppenkamp
IPC分类号： G01F19/00 , G01F23/26 , G01R35/00
CPC分类号： G01F25/0076 , G01F23/263 , G01F23/266 , G01F25/0061
摘要： A method for manufacturing-side calibration of a measuring device for capacitive fill level measurement of a medium, wherein at least one probe unit of the measuring device is activated with an electrical, alternating voltage of a predeterminable frequency. As a function of the frequency of the activating signal, a conductivity range is determined, within which the fill level measurement is essentially independent of a change of the electrical conductivity of the medium; for such conductivity range, at least a first reference matching between a predeterminable, first fill-level value and a first capacitance value belonging to the first fill-level value is produced; and the first reference matching between the first fill-level value and the first capacitance value is recorded. Additionally, the invention relates to a corresponding measuring device.
摘要翻译：一种用于介质的电容式填充液位测量的测量装置的制造侧校准的方法，其中所述测量装置的至少一个探针单元由可预定频率的电气交流电压激活。作为激活信号的频率的函数，确定电导率范围，其中填充电平测量基本上与介质的电导率的变化无关; 对于这种导电率范围，产生至少第一参考匹配在可预定的第一填充电平值和属于第一填充电平值的第一电容值之间; 并且记录第一填充电平值和第一电容值之间的第一参考匹配。另外，本发明涉及相应的测量装置。

7. 发明申请

US20100005879A1 Apparatus for Capacitive Determining and/or Monitoring of Fill Level of a Medium 有权
标题翻译：用于容量确定和/或监测介质填充水平的装置
公开(公告)号：US20100005879A1
公开(公告)日：2010-01-14
申请号：US12084114
申请日：2006-10-17
申请人： Igor Getman
发明人： Igor Getman
IPC分类号： G01F23/26
CPC分类号： G01F23/266 , G01F25/0061
摘要： An apparatus for capacitive determining and/or monitoring of fill level of a medium in a container. The apparatus includes: A probe unit; a control unit, which supplies the probe unit with a drive signal; and an evaluating unit, which receives a response signal from the probe unit and which determines from the response signal a statement concerning fill level. Stored in the evaluating unit are at least a first and a second formula or a first and a second evaluating algorithm; and, in case accretion lies below a predetermined limit value, the evaluating unit determines the statement concerning fill level via a first formula and, in case accretion lies above the predetermined limit value, the evaluating unit determines the statement concerning fill level via a second formula.
摘要翻译：一种用于电容性确定和/或监测容器中的介质的填充水平的装置。该装置包括：探针单元; 控制单元，其向探针单元提供驱动信号; 以及评估单元，其从所述探测单元接收响应信号，并且根据所述响应信号确定关于填充水平的声明。存储在评估单元中的至少是第一和第二公式或第一和第二评估算法; 并且如果积存低于预定极限值，评估单元经由第一公式确定关于填充水平的说明，并且如果积存高于预定极限值，则评估单元经由第二公式确定关于填充水平的说明。

8. 发明授权

US06834419B2 Method of producing sensor element 有权
标题翻译：传感器元件的制造方法
公开(公告)号：US06834419B2
公开(公告)日：2004-12-28
申请号：US10704162
申请日：2003-11-07
申请人： Sergej Lopatin , Igor Getman , Anatoliy Panitch , Yuriy Wusewker
发明人： Sergej Lopatin , Igor Getman , Anatoliy Panitch , Yuriy Wusewker
IPC分类号： H04R1700
CPC分类号： G01F23/2968 , G01P15/09 , H01L41/0472 , H01L41/0835 , H01L41/1132 , Y10T29/42 , Y10T29/49128 , Y10T29/4913 , Y10T29/49135 , Y10T29/49139 , Y10T29/49146 , Y10T29/49165 , Y10T29/49798
摘要： The invention relates to an electromechanical drive or a sensor element composed of piezoelectric elements arranged in the form of a stack. The drive or the sensor element is intended for measurement instruments and operates even at very high temperatures. The new drive or the new sensor element (10) for this purpose comprises a number of piezoelectric ceramic layers (12a-f), with electrode layers (16a-e) in each case being arranged between two mutually facing surfaces of directly adjacent piezoelectric ceramic layers. Connectors (18a,b) in the form of wires run in grooves (14a-d) in the electrode layers (16a-e) in order to make electrical contact with the electrode layers (16a-e), and are passed out of the electrode layers (16a-e).
摘要翻译：本发明涉及一种机电驱动器或由堆叠形式布置的压电元件组成的传感器元件。驱动器或传感器元件用于测量仪器，即使在非常高的温度下也可以运行。用于此目的的新驱动器或新的传感器元件（10）包括多个压电陶瓷层（12a-f），其具有电极层 16a-e）在每种情况下被布置在直接相邻的压电陶瓷层的两个相互面对的表面之间。电线形式的连接器（18a，b）在电极层（16a-e）中的凹槽（14a-d）中延伸，以便与电极层（16a-e）电接触，并且从电极层（16a-e）。

9. 发明授权

US6142015A Method and assembly for overfill detection in liquid level sensing in a vessel by the pulse transit time technique 失效
标题翻译：通过脉冲传播时间技术在容器中液位检测中的溢出检测方法和装配
公开(公告)号：US6142015A
公开(公告)日：2000-11-07
申请号：US055636
申请日：1998-04-06
申请人： Igor Getman , Sergej Lopatin , Roland Muller
发明人： Igor Getman , Sergej Lopatin , Roland Muller
IPC分类号： G01F23/28 , G01F23/296 , G01F23/00 , G01S9/68
CPC分类号： G01F23/2962 , G01F23/2961 , G01F23/2965 , G01F23/2968
摘要： Sensing the level of a liquid in a vessel by the pulse transit time technique is done by means of an ultrasonic transducer mounted above the highest-permissible level in the vessel which emits ultrasonic transmission pulses to the surface of the liquid and receives the ultrasonic echo pulses reflected from the liquid surface. The level in the vessel is established from the transit time of the ultrasonic pulses. To detect an overfill when the ultrasonic transducer is immersed in the liquid the decaying output signal of the ultrasonic transducer generated by the ringing of the ultrasonic transducer following the end of the each ultrasonic transmission pulse is analyzed. In this arrangement the fact is exploited that due to the better coupling of the ultrasonic transducer to the liquid than to air the ringing duration is shorter when the ultrasonic transducer is covered by the liquid.
摘要翻译：通过脉冲传播时间技术来检测容器中的液体的水平通过安装在容器中最高允许水平以上的超声波换能器来完成，该超声换能器向液体表面发射超声波传播脉冲并接收超声回波脉冲从液面反射。从超声波脉冲的通过时间确定容器内的电平。为了检测超声波换能器浸没在液体中时的超填充物，分析了在每个超声波发射脉冲结束之后通过超音波振荡器振铃产生的超声换能器的衰减输出信号。在这种布置中，利用超声波换能器与液体的耦合比空气更好地连接超声换能器时，振动持续时间更短。

10. 发明授权

US09470773B2 Method for operating an absolute, or relative, pressure sensor having a capacitive transducer 有权
标题翻译：用于操作具有电容式换能器的绝对或相对压力传感器的方法
公开(公告)号：US09470773B2
公开(公告)日：2016-10-18
申请号：US14127249
申请日：2012-06-01
申请人： Thomas Uehlin , Elmar Wosnitza , Igor Getman
发明人： Thomas Uehlin , Elmar Wosnitza , Igor Getman
IPC分类号： G01R35/00 , G01L9/00 , G01L27/00
CPC分类号： G01R35/00 , G01L9/0072 , G01L27/007
摘要： A method for operating a pressure sensor, which includes a measuring membrane, at least one platform and a capacitive transducer having two pressure dependent capacitances between electrodes on the measuring membrane. The measuring membrane divides a volume pressure-tightly into two volume portions, wherein the second volume portion is enclosed in a measuring chamber between the measuring membrane and the platform. A deflection of the measuring membrane depends on a pressure measurement variable p, which is a difference between a first pressure p1 and second pressure p2 in the volume portions. The pressure measurement variable p follows from both capacitances, wherein, for an intact pressure sensor, the second capacitance is a predetermined function of the first capacitance and, in given cases, the temperature. The method has steps as follows: registering value pairs of both capacitances; testing whether the value pairs correspond within a tolerance range to the predetermined function; and determining a change, respectively damage, of the sensor, when this is too long not the case.
摘要翻译：一种用于操作压力传感器的方法，其包括测量膜，至少一个平台和在测量膜上的电极之间具有两个压力相关电容的电容换能器。测量膜将体积压力分成两个体积部分，其中第二体积部分被包围在测量膜和平台之间的测量室中。测量膜的挠曲取决于压力测量变量p，其是体积部分中的第一压力p1和第二压力p2之间的差。压力测量变量p来自两个电容，其中，对于完整的压力传感器，第二电容是第一电容的预定函数，并且在给定情况下是温度。该方法具有以下步骤：注册两个电容的值对; 测试值对是否在与所述预定功能的公差范围内; 并确定传感器的变化，分别损坏，当这太长时间不是这样。

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