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1. 发明授权

US09054222B2 Pressure resistently encapsulated, pressure difference sensor 有权
标题翻译：耐压密封，压差传感器
公开(公告)号：US09054222B2
公开(公告)日：2015-06-09
申请号：US14007704
申请日：2012-02-10
申请人： Anh Tuan Tham , Frank Passler , Rafael Teipen
发明人： Anh Tuan Tham , Frank Passler , Rafael Teipen
IPC分类号： H01L29/84 , G01L9/00 , G01L13/02 , G01L19/14 , H01L23/473
CPC分类号： H01L29/84 , G01L9/0073 , G01L13/025 , G01L19/143 , G01L19/147 , H01L23/473 , H01L2924/0002 , H01L2924/00
摘要： A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a semiconductor pressure measuring transducer core, which has a measuring membrane body and at least one support body. The measuring membrane body is connected pressure-tightly with the at least one support body, which has a pressure inlet opening. Ducts extend respectively from an outer surface of the capsule into the transducer seat, wherein the pressure inlet opening communicates with the first duct A side of the measuring membrane is contactable with a pressure through the pressure inlet opening, wherein the support body contacts a joint, which surrounds the first pressure inlet opening and the opening of the first duct into the transducer seat and is connected pressure-tightly with a wall of the transducer seat, and wherein a second side of the measuring membrane is hydraulically isolated from its first side and communicates with the second duct.
摘要翻译：压差传感器包括具有陶瓷胶囊主体的胶囊。胶囊在其内部具有换能器座，其中在换能器座中布置有半导体压力测量换能器芯，其具有测量膜主体和至少一个支撑体。测量膜体与至少一个具有压力入口的支撑体压力连接。管道分别从胶囊的外表面延伸到换能器座中，其中与测量膜的第一管道A侧连通的压力入口开口与通过压力入口开口的压力接触，其中支撑体接触接头，其围绕第一压力入口和第一导管的开口进入换能器座，并且与换能器座的壁压力连接，并且其中测量膜的第二侧与其第一侧液压隔离并且连通与第二个管道。

2. 发明申请

US20140021563A1 Pressure Resistently Encapsulated, Pressure Difference Sensor 有权
标题翻译：耐压密封压差传感器
公开(公告)号：US20140021563A1
公开(公告)日：2014-01-23
申请号：US14007704
申请日：2012-02-10
申请人： Anh Tuan Tham , Frank Passler , Rafael Teipen
发明人： Anh Tuan Tham , Frank Passler , Rafael Teipen
IPC分类号： H01L29/84
CPC分类号： H01L29/84 , G01L9/0073 , G01L13/025 , G01L19/143 , G01L19/147 , H01L23/473 , H01L2924/0002 , H01L2924/00
摘要： A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a semiconductor pressure measuring transducer core, which has a measuring membrane body and at least one support body. The measuring membrane body is connected pressure-tightly with the at least one support body, which has a pressure inlet opening. Ducts extend respectively from an outer surface of the capsule into the transducer seat, wherein the pressure inlet opening communicates with the first duct A side of the measuring membrane is contactable with a pressure through the pressure inlet opening, wherein the support body contacts a joint, which surrounds the first pressure inlet opening and the opening of the first duct into the transducer seat and is connected pressure-tightly with a wall of the transducer seat, and wherein a second side of the measuring membrane is hydraulically isolated from its first side and communicates with the second duct.
摘要翻译：压差传感器包括具有陶瓷胶囊主体的胶囊。胶囊在其内部具有换能器座，其中在换能器座中布置有半导体压力测量换能器芯，其具有测量膜主体和至少一个支撑体。测量膜体与至少一个具有压力入口的支撑体压力连接。管道分别从胶囊的外表面延伸到换能器座中，其中与测量膜的第一管道A侧连通的压力入口开口与通过压力入口开口的压力接触，其中支撑体接触接头，其围绕第一压力入口和第一导管的开口进入换能器座，并且与换能器座的壁压力连接，并且其中测量膜的第二侧与其第一侧液压隔离并且连通与第二个管道。

3. 发明授权

US10101231B2 Overload safe pressure sensor, especially pressure difference sensor 有权
公开(公告)号：US10101231B2
公开(公告)日：2018-10-16
申请号：US13516423
申请日：2010-11-11
申请人： Anh Tuan Tham , Rafael Teipen , Michael Philipps
发明人： Anh Tuan Tham , Rafael Teipen , Michael Philipps
IPC分类号： G01L9/00 , G01L9/08 , G01L13/02 , G01L19/04 , G01L19/06
摘要： A pressure sensor includes a sensor body with a sensor chamber in the interior, at least a first separating membrane, forming a first separating membrane chamber connected with the sensor body. A measuring membrane divides the sensor chamber into two chamber portions. A pressure transfer liquid, with which the first separating membrane chamber, the first chamber portion and a channel therebetween are filled, in order to transfer a pressure to the measuring membrane; wherein the pressure sensor is specified for a temperature range between a minimum temperature and a maximum temperature, as well as for a pressure range. At the minimum temperature, the pressure transfer liquid volume in the first chamber portion, the first channel and the first separating membrane chamber is sufficient over the total pressure range to transfer the pressure to the measuring membrane, without the first separating membrane coming to rest, and that when, in the case of overload at maximum temperature, the entire pressure transfer liquid volume moves out of the first separating membrane chamber into the first chamber portion, and is accommodated by the measuring membrane, the measuring membrane experiences no plastic deformation.

4. 发明申请

US20130047738A1 PLATFORM WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR WITH SUCH A PLATFORM AND METHOD FOR THEIR MANUFACTURE 审中-公开
标题翻译：带平面膜的平台，具有这种平台的压力传感器及其制造方法
公开(公告)号：US20130047738A1
公开(公告)日：2013-02-28
申请号：US13696453
申请日：2011-04-14
申请人： Anh Tuan Tham , Dieter Stolze , Rafael Teipen
发明人： Anh Tuan Tham , Dieter Stolze , Rafael Teipen
IPC分类号： B81C1/00 , C01B33/02 , G01L9/00
CPC分类号： G01L19/0618 , B81C1/00103 , B81C2201/0143 , G01L7/082 , Y10T428/24479
摘要： A method for the manufacture of a platform having a membrane bed includes providing a platform body, which comprises silicon; and removing silicon material from a surface of the platform body by means of laser ablation. Preferably, this is followed by oxidizing the ablated surface and then etching the oxidized surface. In an example of the invention, a resulting pressure sensor comprises two platforms, each with a membrane bed having a contour for supporting a measuring membrane, wherein the contour essentially corresponds to a bend line of the measuring membrane.
摘要翻译：一种用于制造具有膜床的平台的方法，包括提供包括硅的平台体; 以及通过激光烧蚀从平台体的表面去除硅材料。优选地，随后氧化烧蚀表面，然后蚀刻氧化表面。在本发明的一个实例中，所得到的压力传感器包括两个平台，每个平台具有用于支撑测量膜的轮廓的膜床，其中轮廓基本上对应于测量膜的弯曲线。

5. 发明申请

US20120265455A1 OVERLOAD SAFE PRESSURE SENSOR, ESPECIALLY PRESSURE DIFFERENCE SENSOR 有权
标题翻译：过载安全压力传感器，特殊压差传感器
公开(公告)号：US20120265455A1
公开(公告)日：2012-10-18
申请号：US13516423
申请日：2010-10-11
申请人： Anh Tuan Tham , Rafael Teipen , Michael Philipps
发明人： Anh Tuan Tham , Rafael Teipen , Michael Philipps
IPC分类号： G01L7/10 , G01L9/12 , G06F19/00
CPC分类号： G01L13/025 , G01L9/0044 , G01L19/04 , G01L19/0618
摘要： A pressure sensor includes a sensor body with a sensor chamber in the interior, at least a first separating membrane, forming a first separating membrane chamber connected with the sensor body. A measuring membrane divides the sensor chamber into two chamber portions. A pressure transfer liquid, with which the first separating membrane chamber, the first chamber portion and a channel therebetween are filled, in order to transfer a pressure to the measuring membrane; wherein the pressure sensor is specified for a temperature range between a minimum temperature and a maximum temperature, as well as for a pressure range. At the minimum temperature, the pressure transfer liquid volume in the first chamber portion, the first channel and the first separating membrane chamber is sufficient over the total pressure range to transfer the pressure to the measuring membrane, without the first separating membrane coming to rest, and that when, in the case of overload at maximum temperature, the entire pressure transfer liquid volume moves out of the first separating membrane chamber into the first chamber portion, and is accommodated by the measuring membrane, the measuring membrane experiences no plastic deformation.
摘要翻译：压力传感器包括在内部具有传感器室的传感器主体，至少第一分离膜，形成与传感器主体连接的第一分离膜室。测量膜将传感器室分成两个室部分。一个压力传送液体，第一分离膜室，第一室部分和它们之间的通道用来填充压力传送液体，以将压力传递到测量膜; 其中压力传感器被规定在最低温度和最高温度之间的温度范围以及压力范围内。在最低温度下，第一室部分，第一通道和第一分离膜室中的压力传送液体体积在总压力范围内是足够的，以将压力传递到测量膜，而没有第一分离膜静止，并且当在最高温度下过载的情况下，整个压力转移液体积从第一分离膜室移出到第一室部分中，并且由测量膜容纳，测量膜不会发生塑性变形。

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