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1. 发明申请

US20120279310A1 PRESSURE SENSOR, ESPECIALLY PRESSURE DIFFERENCE SENSOR 审中-公开
标题翻译：压力传感器，特殊压力传感器
公开(公告)号：US20120279310A1
公开(公告)日：2012-11-08
申请号：US13503804
申请日：2010-10-07
申请人： Timo Kober , Michael Philipps , Dieter Stolze , Anh Tuan Tham , Roland Werthschutzky
发明人： Timo Kober , Michael Philipps , Dieter Stolze , Anh Tuan Tham , Roland Werthschutzky
IPC分类号： G01L9/00 , C03B23/203 , C03B23/025
CPC分类号： G01L9/0042 , C03B23/0026 , G01L19/0618
摘要： The pressure sensor of the invention includes at least one platform, at least one measuring membrane 30, and a transducer, wherein the measuring membrane comprises a semiconductor material, wherein the measuring membrane, enclosing a pressure chamber, is secured on the platform, wherein the measuring membrane is contactable with at least one pressure and is elastically deformable in a pressure-dependent manner, wherein the transducer provides an electrical signal dependent on deformation of the measuring membrane, wherein the platform has a membrane bed, on which the measuring membrane lies in the case of overload, in order to support the measuring membrane, wherein the membrane bed 21 has a glass layer 20, whose surface faces the measuring membrane and forms a wall of the pressure chamber, wherein the surface of the glass layer has a contour, which is suitable for supporting the measuring membrane 30 in the case of overload, characterized in that the contour of the membrane bed 21 is obtainable by a sagging of an unsupported region of a glass plate at increased temperature, due to the force of gravity on the unsupported region of the glass plate, and subsequent cooling of the glass plate.
摘要翻译：本发明的压力传感器包括至少一个平台，至少一个测量膜30和换能器，其中测量膜包括半导体材料，其中包围压力室的测量膜固定在平台上，其中，测量膜可与至少一个压力接触并且以压力依赖的方式弹性变形，其中换能器提供取决于测量膜的变形的电信号，其中平台具有膜床，测量膜位于该膜片上过载的情况，为了支撑测量膜，其中膜床21具有玻璃层20，玻璃层20的表面面向测量膜并形成压力室的壁，其中玻璃层的表面具有轮廓，其适用于在过载的情况下支撑测量膜30，其特征在于，膜床21的轮廓是由于玻璃板的未支撑区域上的重力，以及随后的玻璃板的冷却，在升高的温度下通过玻璃板的未支撑区域的下垂可以获得。

2. 发明授权

US08402836B2 Pressure difference measuring cell 有权
标题翻译：压力差测量单元
公开(公告)号：US08402836B2
公开(公告)日：2013-03-26
申请号：US12735098
申请日：2008-12-12
申请人： Wolfgang Dannhauer , Michael Philipps , Friedrich Schwabe , Dieter Stolze , Anh Tuan Tham
发明人： Wolfgang Dannhauer , Michael Philipps , Friedrich Schwabe , Dieter Stolze , Anh Tuan Tham
IPC分类号： G01L13/02
CPC分类号： G01L19/0609 , G01L9/0073 , G01L13/026
摘要： A pressure difference measuring cell for registering pressure difference between a first pressure and a second pressure, comprises: an elastic measuring arrangement having at least one measuring membrane, or diaphragm, that comprises silicon; a platform, which is pressure-tightly connected with the elastic measuring arrangement; a first hydraulic path for transferring a first pressure onto a first surface section of the elastic measuring arrangement; and a second hydraulic path for transferring a second pressure onto a second surface section of the elastic measuring arrangement. The first pressure opposes the second pressure, and the elastic deflection of the measuring arrangement is a measure for the difference between the first and the second pressure, wherein the pressure difference measuring cell has additionally at least one hydraulic throttle, characterized in that the at least one hydraulic throttle comprises porous silicon.
摘要翻译：用于记录第一压力和第二压力之间的压力差的压差测量单元包括：弹性测量装置，其具有包括硅的至少一个测量膜或隔膜; 与弹性测量装置压力连接的平台; 用于将第一压力转移到弹性测量装置的第一表面部分上的第一液压路径; 以及用于将第二压力传递到弹性测量装置的第二表面部分上的第二液压路径。所述第一压力与所述第二压力相反，并且所述测量装置的弹性挠度是所述第一和第二压力之间的差值的量度，其中所述压差测量单元还具有至少一个液压节流阀，其特征在于，所述至少一个一个液压油门包括多孔硅。

3. 发明申请

US20130047738A1 PLATFORM WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR WITH SUCH A PLATFORM AND METHOD FOR THEIR MANUFACTURE 审中-公开
标题翻译：带平面膜的平台，具有这种平台的压力传感器及其制造方法
公开(公告)号：US20130047738A1
公开(公告)日：2013-02-28
申请号：US13696453
申请日：2011-04-14
申请人： Anh Tuan Tham , Dieter Stolze , Rafael Teipen
发明人： Anh Tuan Tham , Dieter Stolze , Rafael Teipen
IPC分类号： B81C1/00 , C01B33/02 , G01L9/00
CPC分类号： G01L19/0618 , B81C1/00103 , B81C2201/0143 , G01L7/082 , Y10T428/24479
摘要： A method for the manufacture of a platform having a membrane bed includes providing a platform body, which comprises silicon; and removing silicon material from a surface of the platform body by means of laser ablation. Preferably, this is followed by oxidizing the ablated surface and then etching the oxidized surface. In an example of the invention, a resulting pressure sensor comprises two platforms, each with a membrane bed having a contour for supporting a measuring membrane, wherein the contour essentially corresponds to a bend line of the measuring membrane.
摘要翻译：一种用于制造具有膜床的平台的方法，包括提供包括硅的平台体; 以及通过激光烧蚀从平台体的表面去除硅材料。优选地，随后氧化烧蚀表面，然后蚀刻氧化表面。在本发明的一个实例中，所得到的压力传感器包括两个平台，每个平台具有用于支撑测量膜的轮廓的膜床，其中轮廓基本上对应于测量膜的弯曲线。

4. 发明申请

US20100140725A1 PRESSURE SENSOR 有权
标题翻译：压力传感器
公开(公告)号：US20100140725A1
公开(公告)日：2010-06-10
申请号：US12449821
申请日：2008-03-04
申请人： Igor Getman , Dieter Stolze , Anh Tuan Tham
发明人： Igor Getman , Dieter Stolze , Anh Tuan Tham
IPC分类号： H01L29/84 , H01L21/30
CPC分类号： G01L9/0055 , G01L9/0042
摘要： A piezoresistive pressure sensor is especially suitable for measuring smaller pressures and has a small linearity error. The pressure sensor is manufactured from a BESOI wafer having first and second silicon layers and an oxide layer arranged therebetween. The pressure sensor includes, formed from the first silicon layer of the BESOI wafer, an active layer, in which piezoresistive elements are doped, and, formed from the second silicon layer of the BESOI wafer, a membrane carrier, which externally surrounds a cavity in the second silicon layer, via which a membrane forming region of the active layer and an oxide layer associated therewith are exposed, wherein, in an outer edge of the region of the oxide layer exposed by the cavity, a groove is provided surrounding the region.
摘要翻译：压阻式压力传感器特别适用于测量较小的压力并具有较小的线性误差。压力传感器由具有第一和第二硅层并且布置在其间的氧化物层的BESOI晶片制造。压力传感器包括由BESOI晶片的第一硅层形成的有源层，其中掺杂了压阻元件，并且由BESOI晶片的第二硅层形成膜载体，膜载体外部包围空腔通过该第二硅层，有源层的膜形成区域和与其相关联的氧化物层被暴露，其中在由空腔暴露的氧化物层的区域的外边缘中围绕该区域设置凹槽。

5. 发明授权

US08304844B2 Pressure measuring device 有权
标题翻译：压力测量装置
公开(公告)号：US08304844B2
公开(公告)日：2012-11-06
申请号：US12734545
申请日：2008-11-07
申请人： Igor Getman , Dieter Stolze , Anh Tuan Tham
发明人： Igor Getman , Dieter Stolze , Anh Tuan Tham
IPC分类号： H01L27/14 , H01L29/84
CPC分类号： G01L19/147
摘要： A pressure measuring device having a pedestal, an intermediate piece of semiconductor arranged on the pedestal and, connected with the pedestal and arranged on the intermediate piece and connected with the intermediate piece, a semiconductor pressure sensor having a support and a measuring membrane, or diaphragm. The pressure measuring device offers reliable protection of the sensitive measuring membrane, or diaphragm, against mechanical distortions. Provided extending in the interior of the intermediate piece is an annular cavity, which surrounds a first cylindrical section and, pedestal end thereof, a second cylindrical section of the intermediate piece. The second cylindrical section has a greater outer diameter than the first cylindrical section. The cavity is open on an end of the intermediate piece toward the pedestal. The second cylindrical section has an end face facing the pedestal and lying on an end face of the pedestal, for forming a connecting area, via which the intermediate piece is mechanically connected with the pedestal.
摘要翻译：一种具有基座的压力测量装置，布置在基座上的中间片半导体，并与基座连接并布置在中间件上并与中间件连接，具有支撑件和测量膜或隔膜的半导体压力传感器。压力测量装置提供对敏感测量膜或隔膜的可靠保护，防止机械扭曲。提供在中间件的内部延伸的是环形空腔，其环绕第一圆柱形部分及其基座端部，中间件的第二圆柱形部分。第二圆柱形部分具有比第一圆柱形部分更大的外径。空腔在中间件的端部朝向底座打开。第二圆柱形部分具有面向基座的端面并且位于基座的端面上，用于形成连接区域，中间件通过该连接区域与基座机械连接。

6. 发明授权

US08384170B2 Pressure sensor 有权
标题翻译：压力传感器
公开(公告)号：US08384170B2
公开(公告)日：2013-02-26
申请号：US12449821
申请日：2008-03-04
申请人： Igor Getman , Anh Tuan Tham , Dieter Stolze
发明人： Igor Getman , Anh Tuan Tham , Dieter Stolze
IPC分类号： H01L29/84
CPC分类号： G01L9/0055 , G01L9/0042
摘要： A piezoresistive pressure sensor is especially suitable for measuring smaller pressures and has a small linearity error. The pressure sensor is manufactured from a BESOI wafer having first and second silicon layers and an oxide layer arranged therebetween. The pressure sensor includes, formed from the first silicon layer of the BESOI wafer, an active layer, in which piezoresistive elements are doped, and, formed from the second silicon layer of the BESOI wafer, a membrane carrier, which externally surrounds a cavity in the second silicon layer, via which a membrane forming region of the active layer and an oxide layer associated therewith are exposed, wherein, in an outer edge of the region of the oxide layer exposed by the cavity, a groove is provided surrounding the region.
摘要翻译：压阻式压力传感器特别适用于测量较小的压力并具有较小的线性误差。压力传感器由具有第一和第二硅层并且布置在其间的氧化物层的BESOI晶片制造。压力传感器包括由BESOI晶片的第一硅层形成的有源层，其中掺杂了压阻元件，并且由BESOI晶片的第二硅层形成膜载体，膜载体外部包围空腔通过该第二硅层，有源层的膜形成区域和与其相关联的氧化物层被暴露，其中在由空腔暴露的氧化物层的区域的外边缘中围绕该区域设置凹槽。

7. 发明授权

US08033178B2 Pressure-measuring cell 有权
标题翻译：压力测量池
公开(公告)号：US08033178B2
公开(公告)日：2011-10-11
申请号：US12086615
申请日：2006-12-22
申请人： Dietfried Burczyk , Anh Tuan Tham , Dieter Stolze
发明人： Dietfried Burczyk , Anh Tuan Tham , Dieter Stolze
IPC分类号： G01L9/02
CPC分类号： G01L9/0055
摘要： A pressure sensor comprises a sensor platform; a measuring membrane, or diaphragm, which is held by the sensor platform, and can have a pressure applied to it and is deformable as a function of pressure; and at least two resistance elements having an AlxGa1—xN layer. At least a first resistance element of the at least two resistance elements is arranged on the measuring membrane, or diaphragm and has a deformation-dependent resistance value. The pressure sensor can be operated using a measurement circuit to register a signal which depends on the resistance values of the at least two resistance elements in the plane of the AlxGa1—xN layer. Four resistance elements are preferably provided in a full bridge.
摘要翻译：压力传感器包括传感器平台; 测量膜或隔膜，其由传感器平台保持，并且可以具有施加到其上的压力并且可以作为压力的函数变形; 以及至少两个具有Al x Ga 1-x N层的电阻元件。至少两个电阻元件的至少第一电阻元件布置在测量膜或隔膜上并具有变形依赖性电阻值。可以使用测量电路对压力传感器进行操作，以注册取决于AlxGa1-xN层的平面中的至少两个电阻元件的电阻值的信号。四个电阻元件优选设置在全桥中。

8. 发明申请

US20100308426A1 PRESSURE MEASURING DEVICE 有权
标题翻译：压力测量装置
公开(公告)号：US20100308426A1
公开(公告)日：2010-12-09
申请号：US12734545
申请日：2008-11-07
申请人： Igor Getman , Dieter Stolze , Anh Tuan Tham
发明人： Igor Getman , Dieter Stolze , Anh Tuan Tham
IPC分类号： H01L29/84 , H01L21/50
CPC分类号： G01L19/147
摘要： A pressure measuring device having a pedestal, an intermediate piece of semiconductor arranged on the pedestal and, connected with the pedestal and arranged on the intermediate piece and connected with the intermediate piece, a semiconductor pressure sensor having a support and a measuring membrane, or diaphragm. The pressure measuring device offers reliable protection of the sensitive measuring membrane, or diaphragm, against mechanical distortions. Provided extending in the interior of the i[ntermediate piece is an annular cavity, which surrounds a first cylindrical section and, pedestal end thereof, a second cylindrical section of the intermediate piece. The second cylindrical section has a greater outer diameter than the first cylindrical section. The cavity is open on an end of the intermediate piece toward the pedestal. The second cylindrical section has an end face facing the pedestal and lying on an end face of the pedestal, for forming a connecting area, via which the intermediate piece is mechanically connected with the pedestal.
摘要翻译：一种压力测量装置，具有基座，布置在基座上的中间片半导体，并与基座连接并布置在中间件上并与中间件连接，具有支撑件和测量膜或隔膜的半导体压力传感器。压力测量装置提供对敏感测量膜或隔膜的可靠保护，防止机械扭曲。提供在i中心部分的内部延伸的环形空腔，其围绕第一圆柱形部分，并且其基座端部是中间件的第二圆柱形部分。第二圆柱形部分具有比第一圆柱形部分更大的外径。空腔在中间件的端部朝向底座打开。第二圆柱形部分具有面向基座的端面并且位于基座的端面上，用于形成连接区域，中间件通过该连接区域与基座机械连接。

9. 发明申请

US20090293627A1 Pressure-Measuring Cell 有权
标题翻译：压力测量单元
公开(公告)号：US20090293627A1
公开(公告)日：2009-12-03
申请号：US12086615
申请日：2006-12-22
申请人： Anh Tuan Tham , Dietfried Burczyk , Dieter Stolze
发明人： Anh Tuan Tham , Dietfried Burczyk , Dieter Stolze
IPC分类号： G01L9/06
CPC分类号： G01L9/0055
摘要： A pressure sensor comprises a sensor platform; a measuring membrane, or diaphragm, which is held by the sensor platform, and can have a pressure applied to it and is deformable as a function of pressure; and at least two resistance elements having an A1xGa1−xN layer. At least a first resistance element of the at least two resistance elements is arranged on the measuring membrane, or diaphragm and has a defomation-dependent resistance value. The pressure sensor can be operated using a measurement circuit to register a signal which depends on the resistance values of the at least two resistance elements in the plane of the A1xGa1−xN layer. Four resistance elements are preferably provided in a full bridge.
摘要翻译：压力传感器包括传感器平台; 测量膜或隔膜，其由传感器平台保持，并且可以具有施加到其上的压力并且可以作为压力的函数变形; 以及至少两个具有Al x Ga 1-x N层的电阻元件。至少两个电阻元件的至少第一电阻元件布置在测量膜或隔膜上并且具有取决于相关的电阻值。可以使用测量电路对压力传感器进行操作，以对依赖于Al x Ga 1-x N层的平面中的至少两个电阻元件的电阻值的信号进行寄存。四个电阻元件优选设置在全桥中。

10. 发明申请

US20100281992A1 PRESSURE DIFFERENCE MEASURING CELL 有权
标题翻译：压力差异测量单元
公开(公告)号：US20100281992A1
公开(公告)日：2010-11-11
申请号：US12735098
申请日：2008-12-12
申请人： Wolfgang Dannhauer , Michael Philipps , Friedrich Schwabe , Dieter Stolze
发明人： Wolfgang Dannhauer , Michael Philipps , Friedrich Schwabe , Dieter Stolze
IPC分类号： G01L9/00
CPC分类号： G01L19/0609 , G01L9/0073 , G01L13/026
摘要： A pressure difference measuring cell for registering pressure difference between a first pressure and a second pressure, comprises: an elastic measuring arrangement having at least one measuring membrane, or diaphragm, that comprises silicon; a platform, which is pressure-tightly connected with the elastic measuring arrangement; a first hydraulic path for transferring a first pressure onto a first surface section of the elastic measuring arrangement; and a second hydraulic path for transferring a second pressure onto a second surface section of the elastic measuring arrangement. The first pressure opposes the second pressure, and the elastic deflection of the measuring arrangement is a measure for the difference between the first and the second pressure, wherein the pressure difference measuring cell has additionally at least one hydraulic throttle, characterized in that the at least one hydraulic throttle comprises porous silicon.
摘要翻译：用于记录第一压力和第二压力之间的压力差的压差测量单元包括：弹性测量装置，其具有包括硅的至少一个测量膜或隔膜; 与弹性测量装置压力连接的平台; 用于将第一压力转移到弹性测量装置的第一表面部分上的第一液压路径; 以及用于将第二压力传递到弹性测量装置的第二表面部分上的第二液压路径。所述第一压力与所述第二压力相反，并且所述测量装置的弹性挠度是所述第一和第二压力之间的差值的量度，其中所述压差测量单元还具有至少一个液压节流阀，其特征在于，所述至少一个一个液压油门包括多孔硅。

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