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1. 发明授权

US6149789A Process for manipulating microscopic, dielectric particles and a device therefor 失效
标题翻译：用于操作微观电介质颗粒的方法及其装置
公开(公告)号：US6149789A
公开(公告)日：2000-11-21
申请号：US508079
申请日：1995-07-27
申请人： Wolfgang Benecke , Bernd Wagner , Gunter Fuhr , Rolf Hagedorn , Thorsten Muller
发明人： Wolfgang Benecke , Bernd Wagner , Gunter Fuhr , Rolf Hagedorn , Thorsten Muller
IPC分类号： B01F13/00 , B01J19/00 , B03C5/00 , B03C5/02 , G01N27/447 , G01N27/26
CPC分类号： B01F13/0077 , B01F13/0076 , B01J19/0093 , B03C5/005 , B03C5/026 , B03C5/028 , B01F13/0059 , B01J2219/00853
摘要： Disclosed is a process for manipulating microscopic dielectric particles in which particles are exposed to an electric field. In disadvantaged processes the particles are exposed to inhomogeneous electric field and are polarized by them. The polarized particles are moved in the direction of higher field strength. These processes permit no reversal of the traveling direction of the particles. The particles are enriched at the electrode so that they cannot be retained in free space. In the invented process the particles are exposed to high-frequency field traveling in one or more prescribed direction, by which the particles are subject to a force which sets them in a motion that is strongly synchronous to the field. With the aid of a device for carrying out the invented process, the particles can be manipulated very flexibly. By means of linearly or circularly disposed electrodes, the particles can be moved on linear paths in any direction including through branched microstructures, they can be separated according to their dielectric properties and retained without contact. Applications are in the fields of biotechnology and molecular separation, focussing and microtransport technology.
摘要翻译：公开了一种操作微粒介质颗粒的方法，其中颗粒暴露于电场。在不利的过程中，颗粒暴露于不均匀的电场，并被它们极化。极化粒子沿高场强的方向移动。这些处理不允许反转颗粒的行进方向。颗粒在电极处富集，使得它们不能保留在自由空间中。在本发明的方法中，颗粒暴露于在一个或多个规定方向上行进的高频场，通过该方法，颗粒受到将其设置成与场强同步的运动的力。借助于用于实施本发明方法的装置，可以非常灵活地操纵颗粒。通过线性或圆形设置的电极，颗粒可以在包括通过分支微结构的任何方向上在线性路径上移动，它们可以根据其介电性质分离并保持而不接触。应用领域包括生物技术和分子分离，聚焦和微传输技术。

2. 发明授权

US5454472A Method of continuously separating mixtures of microscopic dielectric particles and apparatus for carrying through this method 失效
标题翻译：连续分离微观电介质颗粒的混合物的方法和用于承载该方法的装置
公开(公告)号：US5454472A
公开(公告)日：1995-10-03
申请号：US196093
申请日：1994-02-18
申请人： Wolfgang Benecke , Bernd Wagner , Rolf Hagedorn , Gunter Fuhr , Torsten Muller
发明人： Wolfgang Benecke , Bernd Wagner , Rolf Hagedorn , Gunter Fuhr , Torsten Muller
IPC分类号： B01J19/00 , B03C5/00 , B03C5/02 , G01N27/447 , G01N30/00 , B03C1/30
CPC分类号： B03C5/028 , B01J19/0093 , B03C5/005 , B03C5/022 , B03C5/026 , G01N30/0005 , B01J2219/00828 , B01J2219/00853 , B01J2219/00905 , B01J2219/0093 , G01N2030/0035
摘要： A method of separating mixtures of microscopic dielectric particles in sunsions in an apparatus for carrying the method. A mixture of particles is forced onto guide paths by dielectrophoretic forces or by a flow of the suspension medium with an additional force, which is provided to compensate the force causing the particles to move along the guide paths for specific particle species causing the specific particle species to be fed out from the mixture of particles. The apparatus may be integrated on surfaces of silicon wafers at low cost and in mass-production numbers, and is suitable for isolating minute particles such as biological cells, cell organelles, bio molecules as well as organic dielectric particles.
摘要翻译： PCT No.PCT / DE92 / 00694 Sec。 371日期1994年2月18日 102（e）1994年2月18日PCT PCT 1992年8月19日PCT公布。出版物WO93 / 03850 日期1993年3月4日。一种在用于携带该方法的装置中分离悬浮液中的微观电介质颗粒的混合物的方法。通过介电电泳力或通过附加力的悬浮介质的流动将粒子的混合物强制到引导路径上，附加的力被提供以补偿导致颗粒沿着引导路径移动的力，以产生特定的颗粒物质从颗粒混合物中送出。该设备可以以低成本和批量生产数量集成在硅晶片的表面上，并且适用于分离微粒，例如生物细胞，细胞器，生物分子以及有机电介质颗粒。

3. 发明授权

US5430339A Electric motor 失效
标题翻译：电动马达
公开(公告)号：US5430339A
公开(公告)日：1995-07-04
申请号：US915858
申请日：1992-09-21
申请人： Wolfgang Benecke , Bernd Wagner , Jan Gimsa , Gunter Fuhr , Rolf Hagedorn , Roland Glaser
发明人： Wolfgang Benecke , Bernd Wagner , Jan Gimsa , Gunter Fuhr , Rolf Hagedorn , Roland Glaser
IPC分类号： H02N1/00
CPC分类号： H02N1/004
摘要： The present invention relates to a dielectric motor which is driven by means of electric fields. The motor is distinguished by two or more dielectric rotors being disposed in a central region which is surrounded by several electrodes.The rotors may be made of different dielectric materials and be electrically axially asymmetric in design. They are driven by continuously or discontinuously rotating electric fields. Depending on the geometric and electric design, very variable rotation conditions can be achieved, which can be simply controlled via the frequency of the rotating fields. The motor is suited for switch and drive purposes and can be utilized to construct microdosing devices, pumps and valves.
摘要翻译：本发明涉及一种通过电场驱动的介质电动机。电动机的特征在于两个或多个电介质转子设置在由几个电极包围的中心区域中。转子可以由不同的电介质材料制成，并且在设计上电轴向不对称。它们由连续或不连续旋转的电场驱动。根据几何和电气设计，可以实现非常可变的旋转条件，这可以通过旋转场的频率简单地控制。电动机适用于开关和驱动目的，可用于构建微量计量装置，泵和阀。

4. 发明授权

US5572076A Dielectric micromechanical element 失效
标题翻译：电介质微机械元件
公开(公告)号：US5572076A
公开(公告)日：1996-11-05
申请号：US730914
申请日：1991-10-21
申请人： Wolfgang Benecke , Bernhard Wagner , Gunter Fuhr , Rolf Hagedorn , Roland Glaser , Jan Gimsa
发明人： Wolfgang Benecke , Bernhard Wagner , Gunter Fuhr , Rolf Hagedorn , Roland Glaser , Jan Gimsa
IPC分类号： H02K41/02 , H02N1/00 , H02K57/00 , H02N1/06
CPC分类号： H02N1/004
摘要： A dielectric micromechanical element the moveable component of which (hereinafter referred to as rotor) is an electrically homogeneous or inhomogeneous dielectric. The rotor is driven via one or more electric field vectors which are generated via electrode arrangements by switched voltages and/or by triggering the electrodes with phase-shifted voltages. On at least one side of the rotor and/or inside the rotor the electrodes form a linear or curved row of electrodes.
摘要翻译： PCT No.PCT / DE90 / 00069 Sec。 371日期1991年10月21日 102（e）日期1991年10月21日PCT提交1990年2月2日PCT公布。第WO90 / 09059号公报日期1990年8月9日介电微机电元件其可动部件（以下称为转子）是电均匀或不均匀的电介质。转子通过一个或多个通过电极装置通过开关电压产生的电场矢量和/或通过用相移电压触发电极来驱动。在转子的至少一侧和/或转子内部，电极形成线性或弯曲的电极行。

5. 发明授权

US5726509A Dielectric motor 失效
标题翻译：介质马达
公开(公告)号：US5726509A
公开(公告)日：1998-03-10
申请号：US730907
申请日：1991-10-21
申请人： Wolfgang Benecke , Bernhard Wagner , Gunter Fuhr , Rolf Hagedorn , Roland Glaser , Jan Gimsa
发明人： Wolfgang Benecke , Bernhard Wagner , Gunter Fuhr , Rolf Hagedorn , Roland Glaser , Jan Gimsa
IPC分类号： H02K37/00 , H02N1/00
CPC分类号： H02N1/004
摘要： A motor whose torque is not generated by magnetic fields but rather by dielectric forces to be used in microelectronics and micromechanics. The rotors are composed of several dielectrics, which are arranged in a sector-shaped or shell-shaped manner or partially or completely envelop each other. These motors can be miniaturized down to a size of a few millimeters. They are distinguished by having slow to medium rotation speeds, short starting phases (ms range and less), extremely low current consumption, simple construction, high running constancy and being practically maintenance free. The characteristic curve of rotation (rotation as the function of the field frequency) may be selected in many ranges by changing the dielectrics of the rotor.
摘要翻译： PCT No.PCT / DE90 / 00067 Sec。 371日期1991年10月21日 102（e）日期1991年10月21日PCT提交1990年2月2日PCT公布。第WO90 / 09057号公报日期1990年8月9日电机的转矩不是由磁场产生的，而是由微电子学和微机械学中使用的介电力产生的。转子由几个电介质组成，它们以扇形或壳形的方式布置或部分地或完全地彼此包围。这些电机可以小型化至几毫米的尺寸。它们的特点是具有慢到中等的转速，启动阶段短（ms范围小），极低的电流消耗，简单的结构，高运行稳定性和实际的免维护。通过改变转子的电介质可以在许多范围内选择旋转的特性曲线（作为场频的函数的旋转）。

6. 发明授权

US5407856A Direct substrate bonding 失效
标题翻译：直接衬底粘合
公开(公告)号：US5407856A
公开(公告)日：1995-04-18
申请号：US146088
申请日：1994-05-09
申请人： Hans J. Quenzer , Wolfgang Benecke
发明人： Hans J. Quenzer , Wolfgang Benecke
IPC分类号： H01L21/02 , H01L21/18 , H01L21/20 , H01L21/76
CPC分类号： H01L21/187 , H01L21/2007 , Y10S148/012 , Y10S148/135
摘要： Disclosed is a process for producing a solid, surface bonding between two wafer plates, of which at least one is composed of a semiconducting material, such as e.g. silicon. The process has the following steps: on the cleaned surface of at least one wafer plate a film having a residual moisture from solvents containing silicates or phosphates is applied, the two wafer surfaces on at least one of which a film is applied are joined, the two wafers are tempered in the joined state at temperatures lower than approx. 420.degree. C.
摘要翻译： PCT No.PCT / DE92 / 00365 Sec。 371日期1994年5月9日 102（e）日期1994年5月9日PCT提交1992年5月8日PCT公布。 WO92 / 20094 PCT出版物日期：1992年11月12日。公开的是在两个晶片板之间产生固体表面结合的方法，其中至少一个由半导体材料构成，例如半导体材料。硅。该方法具有以下步骤：在至少一个晶片板的清洁表面上施加具有来自含有硅酸盐或磷酸盐的溶剂的残留水分的膜，其中至少一个施加膜的两个晶片表面被接合，两个晶片在低于约的温度下在接合状态下回火。 420℃

7. 发明申请

US20050121080A1 Integrated fluid sensing device 失效
公开(公告)号：US20050121080A1
公开(公告)日：2005-06-09
申请号：US11034703
申请日：2005-01-13
申请人： Karl-Heinz Forster , Frank Langro , Frank Latino , Josef Binder , Wolfgang Benecke , Thomas Starz , Oliver Ahrens
发明人： Karl-Heinz Forster , Frank Langro , Frank Latino , Josef Binder , Wolfgang Benecke , Thomas Starz , Oliver Ahrens
IPC分类号： F15B13/00 , F15B13/08 , G01F1/28 , G01F1/684 , G01F5/00 , G01F15/14 , G01F15/18 , G01L1/04 , G01L1/26 , G05D7/06
CPC分类号： G01F1/6842 , F15B13/0814 , F15B13/0839 , F15B13/0853 , F15B13/0857 , F15B13/086 , G01F1/28 , G01F5/00 , G01F15/14 , G01F15/18 , G01L1/044 , G01L1/26 , G05D7/0652 , Y10T137/7761 , Y10T137/87885
摘要： A circuit board, which includes one or more sensors, is integrated in a fluid control device, such as a valve manifold and a base plate. The fluid control device selectively directs a fluid used to control pneumatic or hydraulic equipment. The sensors are used to measure physical characteristics of the fluid, such as flow rate, pressure, and temperature. A flow sensor includes a paddle and a support member. The paddle is disposed at least partially in an orifice and is displaced in response to fluid flow. The support member positions the paddle in the orifice and includes a plurality of strain gauges. The strain gauges are disposed on only one side of the support member and are mechanically stressed in response to the paddle being displaced by the fluid flow.

8. 发明授权

US5049460A Method for producing beam-shaping diaphragms for lithographic devices 失效
标题翻译：用于制造光刻设备的光束成形隔膜的方法
公开(公告)号：US5049460A
公开(公告)日：1991-09-17
申请号：US353062
申请日：1989-05-17
申请人： Wolfgang Benecke , Uwe Schnakenberg , Burkhard Lischke
发明人： Wolfgang Benecke , Uwe Schnakenberg , Burkhard Lischke
IPC分类号： H01J9/02 , H01J37/09 , H01L21/027
CPC分类号： H01J9/02 , H01J37/09
摘要： Methods for producing beam shaping diaphragms for lithographic devices in which a silicon layer is epitaxially deposited on a semiconductor body and the epitaxial layer is formed in the central region as a self-supporting membrane and is formed with preferably straight line-shaped quadratic recesses which have perpendicular limiting surfaces. Photolithographic processes and galvanic second-casting techniques may be used in the process for producing the beam-shaping diaphragm. The beam-shaping diaphragm can also be produced in lightly doped epitaxial layers by using electro-chemical etching methods.
摘要翻译：用于制造其中硅层外延沉积在半导体本体上的光刻设备的光束成形光阑的方法，并且外延层在中心区域形成为自支撑膜，并且形成有优选的直线形二次凹部，其具有垂直限制表面。在制造光束整形隔膜的过程中可以使用光刻工艺和电流二次铸造技术。光束整形膜也可以通过使用电化学蚀刻方法在轻掺杂的外延层中制造。

9. 发明授权

US5335544A Apparatus for measuring mechanical forces and force actions 失效
标题翻译：用于测量机械力和力作用的装置
公开(公告)号：US5335544A
公开(公告)日：1994-08-09
申请号：US778893
申请日：1992-02-21
申请人： Bernhard Wagner , Wolfgang Benecke , Werner Riethmuller , Uwe Schnakenberg
发明人： Bernhard Wagner , Wolfgang Benecke , Werner Riethmuller , Uwe Schnakenberg
IPC分类号： G01P15/12 , G01P15/08 , G01P15/125
CPC分类号： G01P15/123 , G01P15/0802 , G01P15/12 , G01P15/125 , G01P2015/0828
摘要： An apparatus for measuring mechanical forces and force actions by means of body, a restoring element and a movable mass, with elements for limiting the deflections of the movable mass. The movable mass is deflected against the resistance of the restoring element under the influence of a mechanical force which, with the aid of sensors, is converted into electrical signals. The elements for limiting deflection include at least two parallel tongues fixed respectively to the restoring element and to the movable mass, and a bridge element fixed at right angles to one of the tongues, at least partly overlapping the other of the tongues.
摘要翻译： PCT No.PCT / DE90 / 00412 Sec。一九九二年二月二十一日 102（e）日期1992年2月21日PCT提交1990年5月31日PCT公布。出版物WO91 / 0052200 日期1991年1月10日。一种用于通过身体，恢复元件和可移动块测量机械力和力作用的装置，具有用于限制可移动块的偏转的元件。在机械力的影响下，可移动物体抵抗复原元件的阻力而偏转，该机械力借助传感器转换成电信号。用于限制偏转的元件包括分别固定到复原元件和可移动块体上的至少两个平行舌片，以及与舌片之一成直角固定的桥元件，至少部分地与舌片中的另一个重叠。

10. 发明授权

US06971272B2 Integrated fluid sensing device 失效
标题翻译：集成流体感测装置
公开(公告)号：US06971272B2
公开(公告)日：2005-12-06
申请号：US11034703
申请日：2005-01-13
申请人： Karl-Heinz Förster , Frank J. Langro , Frank Latino , Josef Binder , Wolfgang Benecke , Thomas Stärz , Oliver Ahrens
发明人： Karl-Heinz Förster , Frank J. Langro , Frank Latino , Josef Binder , Wolfgang Benecke , Thomas Stärz , Oliver Ahrens
IPC分类号： F15B13/00 , F15B13/08 , G01F1/28 , G01F1/684 , G01F5/00 , G01F15/14 , G01F15/18 , G01L1/04 , G01L1/26 , G05D7/06
CPC分类号： G01F1/6842 , F15B13/0814 , F15B13/0839 , F15B13/0853 , F15B13/0857 , F15B13/086 , G01F1/28 , G01F5/00 , G01F15/14 , G01F15/18 , G01L1/044 , G01L1/26 , G05D7/0652 , Y10T137/7761 , Y10T137/87885
摘要： A circuit board, which includes one or more sensors, is integrated in a fluid control device, such as a valve manifold and a base plate. The fluid control device selectively directs a fluid used to control pneumatic or hydraulic equipment. The sensors are used to measure physical characteristics of the fluid, such as flow rate, pressure, and temperature. A flow sensor includes a paddle and a support member. The paddle is disposed at least partially in an orifice and is displaced in response to fluid flow. The support member positions the paddle in the orifice and includes a plurality of strain gauges. The strain gauges are disposed on only one side of the support member and are mechanically stressed in response to the paddle being displaced by the fluid flow.
摘要翻译：包括一个或多个传感器的电路板集成在诸如阀歧管和基板的流体控制装置中。流体控制装置选择性地引导用于控制气动或液压设备的流体。传感器用于测量流体的物理特性，如流量，压力和温度。流量传感器包括桨叶和支撑构件。桨叶至少部分地设置在孔中并且响应于流体流动而移位。支撑构件将桨定位在孔中并且包括多个应变计。应变计设置在支撑构件的仅一侧上，并且响应于桨被流体流动而偏移而被机械地应力。

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