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1. 发明申请

WO2006099758A2 METHOD FOR OPERATING A PULSED ARC SOURCE 审中-公开
标题翻译：一种用于操作脉冲电弧源
公开(公告)号：WO2006099758A2
公开(公告)日：2006-09-28
申请号：PCT/CH2006000123
申请日：2006-03-01
申请人： UNAXIS BALZERS AG , RAMM JUERGEN , GSTOEHL OLIVER , WIDRIG BENO , LENDI DANIEL
发明人： RAMM JUERGEN , GSTOEHL OLIVER , WIDRIG BENO , LENDI DANIEL
CPC分类号： H01J37/3444 , C23C14/024 , C23C14/0641 , C23C14/08 , C23C14/081 , C23C14/083 , C23C14/325 , F01D5/288 , F05D2230/313 , H01J37/32055 , H01J37/34
摘要： The invention relates to an arc method for depositing insulating layers and to an arc method for low-temperature coating. To this end, an electrical spark discharge, which is ignited or operated on a surface of target of an arc source, is simultaneously supplied with a direct current as well as with pulsed or alternating current. The invention also relates to an arc source in which the target is connected to a power supply unit that is either at least one first pulsed high-current supply (18, 18') and another power supply (13', 18'') or a power supply (21, 21', 22) designed with combinational circuit technology.
摘要翻译：本发明涉及一种Arcverfahren用于绝缘层的沉积和低温涂层的Arcverfahren，其中被点燃电弧源的目标的表面上或操作的电火花放电同时与直流和脉冲或交流电流供给。此外，本发明涉及其中所述目标被连接到或者至少第一脉冲高电源18，18“和另一电源13”，18“”，或在开关电源技术电源21，21执行”的电源单元的电弧源，是连接22

2. 发明申请

WO2006099760A3 METHOD FOR OPERATING A PULSED ARC EVAPORATION SOURCE AND VACUUM PROCESS SYSTEM COMPRISING SAID PULSED ARC EVAPORATION SOURCE 审中-公开
标题翻译：一种用于操作脉冲电弧蒸发源和脉冲ARCVERDAMPFUNGSQUELLE真空处理厂
公开(公告)号：WO2006099760A3
公开(公告)日：2007-12-06
申请号：PCT/CH2006000125
申请日：2006-03-01
申请人： OERLIKON TRADING AG , RAMM JUERGEN , WIDRIG BENO , LENDI DANIEL , DERFLINGER VOLKER , REITER ANDREAS
发明人： RAMM JUERGEN , WIDRIG BENO , LENDI DANIEL , DERFLINGER VOLKER , REITER ANDREAS
IPC分类号： H01J37/32 , C23C14/32 , H01J37/34
CPC分类号： C23C14/083 , C23C14/024 , C23C14/0641 , C23C14/08 , C23C14/081 , C23C14/325 , F01D5/288 , F05D2230/313
摘要： The invention relates to a vacuum process system for surface-treating work pieces (3) using an arc evaporation source (5). Said system comprises a first electrode (5') connected to a DC power source (13) and a second electrode (3, 18, 20), disposed separately from the arc evaporation source (5). The two electrodes (5', 3, 18, 20) are operated while being connected to a single pulsed power supply (16).
摘要翻译：本发明涉及一种真空处理系统，用于工件的表面加工（3）与连接到直流电源（13）被连接到电弧蒸发器源的一个电弧蒸发器源（5），其包括第一电极（5“）（5），其设置分别第二电极（3，18，20）。两个电极（5”，3，18，20）连接到一个单脉冲电源（16）进行操作。

3. 发明申请

WO2012139707A8 CARBON SPARK EVAPORATION 审中-公开
标题翻译：碳无线电扩展
公开(公告)号：WO2012139707A8
公开(公告)日：2013-11-28
申请号：PCT/EP2012001322
申请日：2012-03-26
申请人： OERLIKON TRADING AG , RAMM JUERGEN , WIDRIG BENO , RUHM KURT
发明人： RAMM JUERGEN , WIDRIG BENO , RUHM KURT
IPC分类号： H01J37/32
CPC分类号： H01J37/32055 , C23C14/325 , H01J37/32064 , H05B7/148 , H05B7/20 , H05H2001/4682
摘要： The invention relates to a method for operating a pulsed discontinuous spark discharge. The spark is fed via a capacitor. Between the pulses there are switched-off time intervals during which no spark current flows. Within the pulses, that is to say during the switched-on time intervals, the supply of charge is stopped upon a current threshold being reached and is restarted, with the result that subpulses occur within the pulses. The time intervals and subpulses are chosen according to the invention such that when the capacitor is switched on again, the spark discharge readily ignites again.
摘要翻译：本发明涉及一种操作脉冲间歇火花放电的方法。火花通过电容器供给。有在这期间流过无火花电流脉冲的时间间隔之间关闭。内的脉冲，在期间被激活的时间间隔即在电荷供给将实现电流阈值断开并再次接通，从而将有脉冲内的子脉冲。的时间间隔和子脉冲被创造性地选择，使得当所述电容器的一个新的连接时，火花放电再次容易点燃。

4. 发明申请

WO2012167886A8 METHOD FOR REMOVING HARD CARBON LAYERS 审中-公开
标题翻译：去层用于硬质涂层
公开(公告)号：WO2012167886A8
公开(公告)日：2014-01-23
申请号：PCT/EP2012002305
申请日：2012-05-31
申请人： OERLIKON TRADING AG , RAMM JUERGEN , WIDRIG BENO
发明人： RAMM JUERGEN , WIDRIG BENO
IPC分类号： C23G5/00
CPC分类号： C23G5/00
摘要： The invention relates to a method for removing carbon layers, in particular ta-C layers, from substrate surfaces of tools and components. The substrate to be de-coated is accordingly arranged on a substrate support in a vacuum chamber, the vacuum chamber is charged with at least one reactive gas assisting the evacuation of carbon in gaseous form and a low-voltage plasma discharge is created in the vacuum chamber to activate the reactive gas and hence assist the required chemical reaction or reactions to de-coat the coated substrate. The low-voltage plasma discharge is a dc low-volt arc discharge, the substrate surfaces to be de-coated are bombarded substantially exclusively with electrons and oxygen, nitrogen and hydrogen are used as reactive gas.
摘要翻译：一种用于汽提的碳层，特别是工具和组件基板表面的TA-C层的方法。的被剥离基板被相应配置的基板支架上在真空室中，真空室中的至少一种加入气态形式支持反应气体中去除碳和低电压等离子放电在所述真空室的反应气体的激发，并因此支持所需的化学反应或创建用于经涂覆的基材的剥离反应。低压等离子体放电为直流低电压电弧放电，与电子轰击被剥离仅基底表面并基本上作为反应气体，氧，氮和氢被使用。

5. 发明申请

WO2011036246A3 METHOD FOR PRODUCING CUBIC ZIRCONIA LAYERS 审中-公开
标题翻译：用于生产立方氧化锆层
公开(公告)号：WO2011036246A3
公开(公告)日：2011-06-16
申请号：PCT/EP2010064136
申请日：2010-09-24
申请人： OERLIKON TRADING AG , RAMM JUERGEN , WIDRIG BENO
发明人： RAMM JUERGEN , WIDRIG BENO
IPC分类号： C23C14/00 , C23C14/06 , C23C14/08 , C23C14/32
CPC分类号： C23C14/24 , C23C14/0021 , C23C14/0036 , C23C14/0042 , C23C14/0676 , C23C14/083 , C23C14/325 , C23C14/3485
摘要： In order to produce zirconia-based layers on a deposition substrate, wherein reactive spark deposition using pulsed spark current and/or the application of a magnetic field that is perpendicular to the spark target are employed, a mixed target comprising elemental zirconium and at least one stabilizer is used, or a zirconium target comprising elemental zirconium is used, wherein in addition to oxygen, nitrogen is used as the reactive gas. As an alternative, it is also possible, combined with the use of the mixed target, to use nitrogen as the reactive gas in addition to oxygen.
摘要翻译：用于在沉积基底上生产氧化锆类层，其中反应性电弧蒸镀脉冲正常的电弧电流和/或应用到无线电目标磁场，一个元素锆和至少一种稳定剂的综合混合靶使用或元素锆，其中的一个Zirkoniumtarget 然后用氧气，氮气作为反应性气体一起使用。可替代地，通过使用混合靶的组合，也可用于除氧气，氮气作为反应性气体。

6. 发明申请

WO2008009619A1 METHOD FOR DEPOSITING ELECTRICALLY INSULATING LAYERS 审中-公开
标题翻译：方法分离电气绝缘层
公开(公告)号：WO2008009619A1
公开(公告)日：2008-01-24
申请号：PCT/EP2007057179
申请日：2007-07-12
申请人： OERLIKON TRADING AG , RAMM JUERGEN , WIDRIG BENO , WOHLRAB CHRISTIAN
发明人： RAMM JUERGEN , WIDRIG BENO , WOHLRAB CHRISTIAN
IPC分类号： C23C14/32 , C23C14/08
CPC分类号： C23C14/325 , C23C14/081 , H01J37/32055 , H01J37/3405 , H01J37/3417 , H01J37/3447 , H01J37/345 , H01J37/3467
摘要： Method for producing layers of low conductivity, especially insulating layers, on at least one workpiece by vacuum coating, wherein an electrical arc discharge is operated between at least one anode and one cathode of an arc source in an atmosphere containing reactive gas, and only a small external magnetic field or none at all is produced at the surface of a target electrically connected to the cathode essentially perpendicular to the target surface to assist the vaporization process, the degree of recoating of the surface by other coating sources being less than 10%, and the magnetic field is generated by a magnet system that comprises at least one axially polarized coil with a geometry similar in size to the target.
摘要翻译：一种用于制备不良导通，通过真空沉积，其中，至少一个阳极和一个电弧源的阴极之间的电弧放电，在reaktivgashaltiger气氛和的与阴极电关联的表面上操作的装置尤其绝缘层上的至少一个工件处理对象没有或只有一小，基本上与靶表面产生垂直，外部磁场以辅助蒸发工艺，其中所述表面的重新涂覆由其它涂料源，或用磁铁系统的磁场是小于10％，所述至少一个轴向极化线圈具有类似目标外周几何形状包括，被生成。

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