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    • 2. 发明申请
    • METHOD AND APPARATUS FOR APPLYING COATING SOLUTION, AND METHOD FOR MANUFACTURING COATED PRODUCT
    • 用于涂覆溶液的方法和装置,以及制造涂覆产品的方法
    • US20130243957A1
    • 2013-09-19
    • US13989189
    • 2011-11-24
    • Toshitsugu HosokawaKeiichi OkamotoSatoru Yamamoto
    • Toshitsugu HosokawaKeiichi OkamotoSatoru Yamamoto
    • B05C3/18
    • B05C3/18B05C5/0254B05D1/26B05D2252/02
    • The invention is a method, an apparatus, and a coated product-manufacturing method each capable of applying a coating solution to a flexible backing sheet using a die coater while preventing contaminants from forming defects. A virtual line L is drawn to pass through the discharge port 74 of the die coater 7 and to extend perpendicular to the backing sheet 1, the distance D1 between a starting line P1 and a boundary line P2 is 50 mm or less, wherein the starting line P1 is defined as a line intersecting with the virtual line L on the second surface of the backing sheet 1, and the boundary line P2 is defined as a line at a boundary where the second surface of the backing sheet 1 begins to separate, upstream of the starting line P1, from the outer surface of the backup roller 8 as the backup roller 8 rotates, and the distance between the starting line P1 and a line on the roller P3 is 5 μm or more, wherein the line on the roller P3 is defined as a line intersecting with the virtual line L on the outer surface of the backup roller 8.
    • 本发明是一种方法,设备和涂覆产品的制造方法,其各自能够使用模涂机将涂布溶液施加到柔性背衬片上,同时防止污染物形成缺陷。 虚拟线L被拉出以通过模涂机7的排出口74并且垂直于背衬片1延伸,起始线P1和边界线P2之间的距离D1为50mm或更小,其中起始 线P1被定义为与背衬片1的第二表面上的虚拟线L相交的线,并且边界线P2被定义为在背衬片1的第二表面开始分离的边界处的线,上游 作为支承辊8的支承辊8的外表面,起始线P1与辊P3之间的距离为5um以上,辊P3上的线 被定义为与支撑辊8的外表面上的虚拟线L相交的线。
    • 3. 发明申请
    • Web Access Monitoring Method and Associated Program
    • Web访问监控方法及相关程序
    • US20100169472A1
    • 2010-07-01
    • US12086500
    • 2005-12-15
    • Keiichi OkamotoRyu Naeki
    • Keiichi OkamotoRyu Naeki
    • G06F15/16G06F11/07
    • G06F21/6218G06F21/552G06F2221/2149H04L63/0245H04L67/02H04L67/22
    • A centralized control server for controlling each computer includes a step for setting monitoring rules including warning conditions and processing forms at the time of warning for web accesses which are improper from a business or educational point of view. A client computer is provided with a filtering module for monitoring web accesses. Said filtering module includes a step for analyzing the communication contents of the client computer and detecting the occurrence of a web access to an object to be monitored prescribed by the monitoring rules, a step for counting an access quantity at the time of detection of the web access, and a step for issuing warning processing in real time to a user or an administrator in accordance with the processing forms at the time of warning when it is judged that the access quantity has reached an upper limit value prescribed by the warning conditions.
    • 用于控制每台计算机的集中控制服务器包括用于设置监视规则的步骤,包括在从业务或教育观点来看不正确的web访问的警告时的警告状况和处理形式。 客户端计算机配有一个过滤模块,用于监控Web访问。 所述过滤模块包括用于分析客户端计算机的通信内容并检测对由监视规则规定的待监视对象的web访问的发生的步骤,用于在检测到web时计数访问量的步骤 访问,以及当判断出访问量达到由警告条件规定的上限值时,根据警告时的处理形式,向用户或管理员实时发出警告处理的步骤。
    • 4. 发明授权
    • Projection alignment method and apparatus
    • 投影对准方法及装置
    • US4708484A
    • 1987-11-24
    • US789778
    • 1985-10-21
    • Yoshihiro KomeyamaYukio KemboAsahiro KuniRyuuichi FunatsuAkira InagakiMinoru IkedaKeiichi Okamoto
    • Yoshihiro KomeyamaYukio KemboAsahiro KuniRyuuichi FunatsuAkira InagakiMinoru IkedaKeiichi Okamoto
    • G01R31/26G03F9/00H01L21/30G01B11/26
    • G03F9/7023G03F9/7049G03F9/7076
    • The present invention relates, in a projection aligner wherein a mask and a wafer are held proximate to one another and wherein a circuit pattern depicted on the mask is transferred onto the wafer, to a method of detecting the respective positions of the mask and the wafer for the relative positioning between the mask and the wafer. To the end of dispensing with the withdrawal of a microscope objective in such a way that the objective of a microscope for detecting the mask and the wafer and projection light, for example, an X-ray, are prevented from interfering, thereby to achieve the enhancement of throughput and to permit the detection of the positions of the mask and the wafer even during projection, the present invention consists in that the objective of the microscope is inclined with respect to a perpendicular to the plane of the mask or the plane of the wafer being a plane to-be-detected, so as not to interfere with the projection light, for example, the X-ray, whereby the circuit pattern can be transferred while the relative positions of the mask and the wafer are being detected.
    • 本发明涉及一种投影对准器,其中掩模和晶片彼此靠近地保持,并且其中将掩模上描绘的电路图案转印到晶片上,以检测掩模和晶片的相应位置的方法 用于掩模和晶片之间的相对定位。 以这样的方式分配显微镜物镜的取出的结束,使得防止用于检测掩模和晶片的显微镜和例如X射线的投射光的目的被干扰,从而实现 增加吞吐量并且即使在投影期间也能够检测掩模和晶片的位置,本发明的目的在于,显微镜的目的是相对于掩模的平面垂直于或平面的倾斜 晶片是要被检测的平面,以便不干涉诸如X射线的投影光,由此可以在检测掩模和晶片的相对位置的同时传输电路图案。
    • 5. 发明授权
    • Apparatus for relatively positioning a plurality of objects by the use
of a scanning optoelectric microscope
    • 用于通过使用扫描光电显微镜相对定位多个物体的装置
    • US3943359A
    • 1976-03-09
    • US480242
    • 1974-06-17
    • Yoshio MatsumotoKeiichi Okamoto
    • Yoshio MatsumotoKeiichi Okamoto
    • G03F9/00G01J1/20
    • G03F9/70
    • A positioning apparatus comprising marks for position detection which are respectively formed on a plurality of objects, means to cause optical images of the position detecting marks from the respective objects to reach a scanning mechanism, the scanning mechanism scanning the optical images at the same time, a plurality of detectors, each of which consists of a slit and a photoelectric element, the slits being arranged on an identical optical axis so that the optical images of the position detecting marks of the respective objects as scanned by the scanning mechanism may be detected respectively and individually, and a driving device which moves one of the plurality of objects on the basis of signals from the detectors, to effect the relative positioning of the plurality of objects.
    • 一种定位装置,包括分别形成在多个物体上的用于位置检测的标记,用于使来自各个物体的位置检测标记的光学图像到达扫描机构的装置,扫描机构同时扫描光学图像, 多个检测器,每个检测器由狭缝和光电元件组成,狭缝布置在相同的光轴上,使得可以分别检测由扫描机构扫描的各个物体的位置检测标记的光学图像 以及驱动装置,其基于来自检测器的信号移动多个物体中的一个,以实现多个物体的相对定位。
    • 6. 发明授权
    • Development support system
    • 开发支持系统
    • US5767848A
    • 1998-06-16
    • US354640
    • 1994-12-13
    • Kichie MatsuzakiKeiichi OkamotoHideaki SuzukiHiroshi MakitaHisashi OnariToshijiro OhashiMitsuharu HayakawaRoberto KishikawaHiroshi Kitazawa
    • Kichie MatsuzakiKeiichi OkamotoHideaki SuzukiHiroshi MakitaHisashi OnariToshijiro OhashiMitsuharu HayakawaRoberto KishikawaHiroshi Kitazawa
    • G06Q10/10G06F9/22
    • G06Q10/10
    • A development support system for supporting new product development activities including designing, manufacturing experimental models and testing the functions of the experimental models and for providing an environment for the cooperative activities of a plurality of members of a development project team has a model storage for storing product models, resource models of resources to be used for product development and product development activity models; a target storage for storing target values of schedules of product development, and the cost and the performance of the product; an estimating unit for estimating schedules of product development and the cost and the performance of the product on the basis of the models stored in the model storage; a support unit for support the operations of the members of the development project team for making reference to the models, the target values and the estimated values, and changing and particularizing the models, the target values and the estimated values; a notifying unit for deciding, when each model is changed or particularized, whether or not the estimated values meet the corresponding target values and, when the estimated values do not meet the corresponding target values, for notifying the members of the development project team to that effects; and a unit for monitoring electronic mail necessary for carrying out tasks essential to the development of the product, extracting information relating to the progress of tasks essential to carrying out the development of the product, and providing the members of the development project team with information about the progress of the tasks.
    • 支持新产品开发活动的开发支持系统,包括设计,制造实验模型和测试实验模型的功能,并为开发项目团队的多个成员的合作活动提供环境,具有存储产品的模型存储 模型,用于产品开发和产品开发活动模式的资源的资源模型; 用于存储产品开发时间表的目标值的目标存储,以及产品的成本和性能; 估计单元,用于基于存储在模型存储器中的模型来估计产品开发的时间表以及产品的成本和性能; 支持单位,支持开发项目组成员参考模型,目标值和估计值,改变模型,目标值和估计值; 通知单元,用于在每个模型被改变或特定化时决定估计值是否满足相应的目标值,并且当估计值不符合相应的目标值时,用于将开发项目组的成员通知给该 效果; 监控电子邮件单位,用于开展产品开发所必需的任务,提取与进行产品开发所必需的任务进度相关的信息,并向开发项目组成员提供有关 任务进度。
    • 7. 发明授权
    • Pattern test apparatus including a plurality of pattern generators
    • 图案测试装置,包括多个图案发生器
    • US4744047A
    • 1988-05-10
    • US793219
    • 1985-10-31
    • Keiichi OkamotoToshimitsu HamadaMineo Nomoto
    • Keiichi OkamotoToshimitsu HamadaMineo Nomoto
    • G06K9/00G01R31/28G06F11/00G06F15/70
    • G01R31/281
    • An apparatus for testing printed wiring patterns for use in combination with an apparatus including a plurality of dedicated pattern generators for generating arcuate wiring patterns. In contrast to the conventional LSI pattern inspection effected with design data being inputted, the apparatus can inspect the pattern including curved portions peculiar to the printed wiring pattern. Although the conventional LSI inspection technique involves an impracticably increased amount of design data, the invention allows the test or inspection to be performed at a high speed with an improved reliability and can be applied to the inspection of any pattern including arcuate patterns. By inputting graphic data in conformance with the order for generating patterns, pattern generation can be accomplished not only through ordinary raster scan but also by other various scanning methods.
    • 一种用于测试印刷布线图案的装置,用于与包括用于产生弓形布线图案的多个专用图案发生器的装置组合使用。 与通过输入设计数据进行的常规LSI图案检查相反,该设备可以检查包括印刷布线图案特有的弯曲部分的图案。 虽然传统的LSI检测技术涉及到不切实际地增加的设计数据量,但是本发明允许以高速度提高测试或检查的可靠性,并且可以应用于包括弧形图案的任何图案的检查。 通过根据生成图案的顺序输入图形数据,不仅可以通过普通光栅扫描也可以通过其他各种扫描方法来实现图案生成。
    • 9. 发明授权
    • Scanning photoelectric microscope
    • 扫描光电显微镜
    • US3941980A
    • 1976-03-02
    • US405269
    • 1973-10-11
    • Keiichi OkamotoYoshio MatsumotoYasujiro Oshima
    • Keiichi OkamotoYoshio MatsumotoYasujiro Oshima
    • G01B11/00G03F9/00G01B11/26
    • G03F9/70
    • The present invention discloses a scanning photoelectric microscope in which a first reference object to be measured which is mounted on a stationary support is disposed relative to a second object to be measured which is disposed on a slidable table so as to form on both sides of the first object to be measured two indication intervals, which are caused to coincide with each other for alignment. The scanning photoelectric microscope according to the present invention comprises a scanning device for scanning an image reflected from the two indication intervals formed by the first and second objects to be measured at a constant speed to effect parallel displacement, a marker device for detecting positions of a scanned image corresponding to those of motion of the scanning device, and a circuit for detecting the two indication intervals detected by the scanning device in terms of time in response to a signal from the marker device, the second object to be measured being shifted until the two indication intervals coincide with each other.
    • 本发明公开了一种扫描光电显微镜,其中安装在固定支架上的被测量第一参考物体相对于第二待测物体设置,该第二物体设置在滑动台上,以形成在 首先要测量两个指示间隔,这两个指示间隔彼此一致以进行对准。 根据本发明的扫描光电显微镜包括扫描装置,用于扫描从由待测量的第一和第二物体形成的两个指示间隔反射的图像以恒定速度进行平行位移,用于检测位置的标记装置 扫描图像对应于扫描装置的运动的扫描图像,以及用于响应于来自标记装置的信号检测由扫描装置检测的两个指示区间的电路,第二待测对象被移动直到 两个指示间隔彼此一致。
    • 10. 发明申请
    • Unauthorized Communication Program Regulation System and Associated Program
    • 未经授权的沟通计划管理制度及相关计划
    • US20100169484A1
    • 2010-07-01
    • US12086497
    • 2005-12-15
    • Keiichi OkamotoRyu Naeki
    • Keiichi OkamotoRyu Naeki
    • G06F15/173
    • H04L63/1408G06F21/54G06F21/552H04L63/0227
    • A server controlling each computer is provided with means for distributing file patterns for identifying unauthorized communication programs. Said computer is provided with a filtering module for performing monitoring and regulation processing on communications originating from the computer. Said filtering module is provided with a database for storing the file patterns acquired from the server, means for monitoring the communications of a communication module started by the computer and detecting the occurrence of a communication start request to other computers, means for comparing the file pattern of the communication module to the file patterns within the database and inspecting whether or not the communication module is an unauthorized communication program, and means for regulating the communications of the communication module when the inspection means has judged it to be an unauthorized communication program.
    • 控制每台计算机的服务器提供有用于分发用于识别未授权通信程序的文件模式的装置。 所述计算机设置有用于对从计算机发起的通信进行监视和调节处理的过滤模块。 所述过滤模块设置有用于存储从服务器获取的文件模式的数据库,用于监视由计算机启动的通信模块的通信的装置,并且检测到对其他计算机的通信开始请求的发生,用于比较文件模式的装置 所述通信模块与所述数据库内的文件模式相关联,并且检查所述通信模块是否为未经授权的通信程序;以及用于当所述检查装置判断为未经授权的通信程序时用于调节所述通信模块的通信的装置。