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    • 1. 发明授权
    • Plasma processing system and plasma processing method
    • 等离子体处理系统和等离子体处理方法
    • US06245190B1
    • 2001-06-12
    • US09048075
    • 1998-03-26
    • Toshio MasudaKatsuhiko MitaniTetsunori KajiJun'ichi TanakaKatsuya WatanabeShigeru ShirayoneToru OtsuboIchiro SasakiHideshi FukumotoMakoto Koizumi
    • Toshio MasudaKatsuhiko MitaniTetsunori KajiJun'ichi TanakaKatsuya WatanabeShigeru ShirayoneToru OtsuboIchiro SasakiHideshi FukumotoMakoto Koizumi
    • H05H146
    • H01J37/32091H01J37/32082H01J37/32165H01J37/32623H01J37/3266H01J37/32678
    • A plasma processing apparatus and a method therefor which can achieve a preferred process rate, a fine pattern process capability, a selectivity and uniformity of processing at the same time compatibly for a large size wafer, which effects are achieved by controlling the plasma state and the dissociation state of etching gas through control of the electron resonance through application of a magnetic field thereto. A high frequency power at 20-300 MHz is applied across a pair of electrodes in a vacuum process chamber, and a magnetic field is formed parallel to the plane of the electrodes in the space between the electrodes. By controlling the intensity of the magnetic field in a range of 100 gauss or smaller, formation of electron cyclotron resonance and electron sheath resonance occurring from interaction between the electrical field and the magnetic field in the electrode sheath portion is controlled. Thereby, the plasma state, i.e., the electron density, electron energy distribution and dissociation state of the process gas in the plasma, can be controlled. The magnetic field is generated by a plurality of coils, an outer shield, and pendant yoke to form magnetic field parallel to the plane of the electrodes in the space between the upper and the bottom electrodes.
    • 一种等离子体处理装置及其方法,其能够通过控制等离子体状态和等离子体状态来实现对于大尺寸晶片同时实现优选的处理速率,精细图案处理能力,同时处理的选择性和均匀性, 通过对其施加磁场来控制电子共振来蚀刻气体的解离状态。 在真空处理室中的一对电极上施加20-300MHz的高频功率,并且在电极之间的空间中形成平行于电极平面的磁场。 通过控制100高斯或更小范围内的磁场的强度,控制由电场鞘部分中的电场和磁场之间的相互作用产生的电子回旋共振和电子鞘共振的形成。 由此,可以控制等离子体状态,即等离子体中的处理气体的电子密度,电子能量分布和解离状态。 磁场由多个线圈,外屏蔽和悬挂磁轭产生,以在上电极和下电极之间的空间中形成平行于电极平面的磁场。
    • 6. 发明授权
    • Color Braun tube
    • 彩色布朗管
    • US06262526B1
    • 2001-07-17
    • US09492525
    • 2000-01-27
    • Hiroshi MiyazawaMakoto KoizumiMutsumi MaeharaHidetoshi Kida
    • Hiroshi MiyazawaMakoto KoizumiMutsumi MaeharaHidetoshi Kida
    • H01J2946
    • H01J29/624H01J29/488H01J29/51H01J2229/4824
    • An in-line type color Braun tube having a fluorescent screen and a shield cup at an end of an electron gun, the shield cup including a cylindrical side wall and a bottom having a center electron beam passing hole and two side electron beam passing holes aligned in a horizontal direction. A convergence correcting member including a base and a pair of horizontal plates, the base and horizontal plates being a one piece member, and a bottom member of the base being cross-shaped and including two side electron beam passing holes and a center electron beam passing hole. A pair of horizontal plates sandwiches an electron beam passing through each of the side electron beam passing holes, in a direction vertical to the electron beam. The base is spot-welded to the bottom of the shield cup at an outer side of each of the side electron bottom beam passing holes proximate to a periphery of the bottom of the shield cup or at outer sides of the center electron beam passing hole along a branch of the cross-shaped base of the bottom member.
    • 一种在电子枪的端部具有荧光屏和屏蔽杯的直列式彩色布朗管,该屏蔽杯包括圆柱形侧壁和具有中心电子束通过孔和两个侧面电子束通过孔对准的底部 在水平方向。 一种会聚校正构件,包括基座和一对水平板,所述基座和水平板是一体构件,并且所述基座的底部构件是十字形的,并且包括两个侧面电子束通过孔和中心电子束通过 孔。 一对水平板在垂直于电子束的方向上夹着通过每个侧电子束通过孔的电子束。 基座在靠近屏蔽杯底部的周边的每个侧面电子底部梁通过孔的外侧或在中心电子束通过孔的外侧点焊到屏蔽杯的底部 底部构件的十字形底座的分支。
    • 9. 发明授权
    • Oligonucleotides having a 2′-O,4′-C-ethylene nucleotide in the third position of the 3′-end
    • 在3'-末端的第3位具有2'-O,4'-C-亚乙基核苷酸的寡核苷酸
    • US07906639B2
    • 2011-03-15
    • US10577982
    • 2004-11-04
    • Makoto Koizumi
    • Makoto Koizumi
    • C07H21/04C12P19/34
    • C12Q1/6853C07H21/04
    • The present invention relates to a method for detecting gene polymorphism by PCR, using, as a primer, an oligonucleotide, wherein the third nucleotide from the 3′-end thereof is a 2′-O,4′-C-ethylene nucleotide (ENA) unit, the other oligonucleotides are natural oligonucleotides, the 3′-end position thereof is a nucleotide complementary to the nucleotide of the reference sequence of a polymorphic sequence of a target gene, and the other positions are nucleotides complementary to the nucleotide sequence of the target gene, or an oligonucleotide, wherein the 3′-end of the nucleotide sequence thereof is a polymorphic position, the second nucleotide from the 3′-end thereof is a nucleotide having a base that is not complementary to a gene to be detected, and the third nucleotide from the 3′-end thereof is a 2′-O,4′-C-ethylene nucleotide (ENA) unit; oligonucleotides used in detection of gene polymorphism; and a kit for detecting gene polymorphism, comprising the above oligonucleotides.
    • 本发明涉及一种利用PCR检测基因多态性的方法,使用寡核苷酸作为引物,其中3'末端的第3个核苷酸为2'-O,4'-C-亚乙基核苷酸(ENA )单元,其它寡核苷酸是天然寡核苷酸,其3'端位置是与目标基因的多态性序列的参考序列的核苷酸互补的核苷酸,其它位置是与核苷酸序列的核苷酸互补的核苷酸 靶基因或寡核苷酸,其核苷酸序列的3'末端为多态性位置,其3'末端的第2个核苷酸为具有与待检测基因不互补的碱基的核苷酸, 并且其3'末端的第三个核苷酸是2'-O,4'-C-亚乙基核苷酸(ENA)单元; 用于检测基因多态性的寡核苷酸; 和用于检测基因多态性的试剂盒,其包含上述寡核苷酸。